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公开(公告)号:US20170160147A1
公开(公告)日:2017-06-08
申请号:US15433158
申请日:2017-02-15
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Yuya GENMEI , Jiro INOUE , Masayuki ICHIMARU
IPC: G01L1/16 , H01L41/04 , H01L41/113 , H01L41/053 , G01B7/16 , H01L41/047
CPC classification number: G01L1/162 , G01B7/16 , G01B7/22 , H01L41/042 , H01L41/047 , H01L41/0533 , H01L41/1132
Abstract: A piezoelectric sensor is fixed to a detection object and detects distortion of the detection object includes first and second principal surfaces, and extends in the lengthwise direction. The piezoelectric sensor includes a piezoelectric body whose polarization axis extends in a direction parallel or substantially parallel to the lengthwise direction, and first and second detecting electrodes that are provided on a surface of the piezoelectric body and that extend in a direction parallel or substantially parallel to the lengthwise direction. Distortion of the detection object is detected based on electric output corresponding to shear stress of the piezoelectric body.