公开(公告)号：US08261617B2

公开(公告)日：2012-09-11

申请号：US12745745

申请日：2008-04-21

申请人： Chang Auck Choi ,  Chang Han Je ,  Gunn Hwang ,  Youn Tae Kim ,  Sung Hae Jung ,  Myung Lae Lee ,  Sung Sik Lee ,  Seok Hwan Moon

发明人： Chang Auck Choi ,  Chang Han Je ,  Gunn Hwang ,  Youn Tae Kim ,  Sung Hae Jung ,  Myung Lae Lee ,  Sung Sik Lee ,  Seok Hwan Moon

IPC分类号： G01L9/06 ,  B23P17/04

CPC分类号： G01L9/0042 ,  Y10T29/42 ,  Y10T29/49

摘要： A micro semiconductor-type pressure sensor and a manufacturing method thereof are provided. The micro semi-conductor-type pressure sensor is implemented by etching a cavity-formation region of a substrate to form a plurality of trenches, oxidizing the plurality of trenches through a thermal oxidation process to form a cavity-formation oxide layer, forming a membrane-formation material layer on upper portions of the cavity-formation oxide layer and the substrate, forming a plurality of etching holes in the membrane-formation material layer, removing the cavity-formation oxide layer through the plurality of etching holes to form a cavity buried in the substrate, forming a membrane reinforcing layer on an upper portion of the membrane-formation material layer to form a membrane for closing the cavity, and forming sensitive films made of a piezoresisive material on an upper portion of the membrane.

摘要翻译： 提供一种微型半导体型压力传感器及其制造方法。 微型半导体型压力传感器通过蚀刻衬底的空腔形成区域以形成多个沟槽来实现，通过热氧化工艺氧化多个沟槽以形成空腔形成氧化物层，形成膜 在形成空腔的氧化物层和衬底的上部上形成一层形成材料层，在膜形成材料层中形成多个蚀刻孔，通过多个蚀刻孔去除腔形成氧化物层，以形成埋入腔 在所述基板中，在所述膜形成材料层的上部形成膜增强层，以形成用于封闭所述空腔的膜，并且在所述膜的上部形成由压阻材料制成的敏感膜。

公开(公告)号：US07997137B2

公开(公告)日：2011-08-16

申请号：US12168025

申请日：2008-07-03

申请人： Sung Sik Lee ,  Ji Man Park ,  Myung Lae Lee ,  Sung Hae Jung ,  Chang Han Je ,  Gunn Hwang ,  Chang Auck Choi

发明人： Sung Sik Lee ,  Ji Man Park ,  Myung Lae Lee ,  Sung Hae Jung ,  Chang Han Je ,  Gunn Hwang ,  Chang Auck Choi

IPC分类号： G01P15/08

CPC分类号： G01P15/125 ,  G01P13/04

摘要： There is provided a bidirectional readout circuit for detecting direction and amplitude of an oscillation sensed at a capacitive microelectromechanical system (MEMS) accelerometer, the bidirectional readout circuit converting capacitance changes of the capacitive MEMS accelerometer into a time change amount by using high resolution capacitance-to-time conversion technology and outputting the time change amount as the direction and the amplitude of the oscillation by using time-to-digital conversion (TDC) technology, thereby detecting not only the amplitude of the oscillation but also the direction thereof, which is capable of being applied to various MEMS sensors.

摘要翻译： 提供了一种用于检测在电容式微机电系统（MEMS）加速度计处感测的振荡的方向和振幅的双向读出电路，双向读出电路通过使用高分辨率电容 - 电容将电容式MEMS加速度计的电容变化转换为时变量 时间转换技术，并且通过使用时间 - 数字转换（TDC）技术输出时间变化量作为振荡的方向和振幅，从而不仅检测振荡的振幅，而且检测其方向，这是能够 被应用于各种MEMS传感器。

公开(公告)号：US07975550B2

公开(公告)日：2011-07-12

申请号：US12111841

申请日：2008-04-29

申请人： Myung Lae Lee ,  Chang Han Je ,  Sung Sik Lee ,  Sung Hae Jung ,  Chang Auck Choi ,  Gunn Hwang

发明人： Myung Lae Lee ,  Chang Han Je ,  Sung Sik Lee ,  Sung Hae Jung ,  Chang Auck Choi ,  Gunn Hwang

IPC分类号： G01N29/00 ,  G01P15/10

CPC分类号： G01H11/02

摘要： There is provided a micromachined sensor for measuring a vibration, based on silicone micromachining technology, in which a conductor having elasticity is connected to masses moving due to a force generated by the vibration and the vibration is measured by using induced electromotive force generated due to the conductor moving in a magnetic field.

摘要翻译： 提供了一种用于测量振动的微机械传感器，其基于有机硅微加工技术，其中具有弹性的导体由于由振动产生的力连接到质量移动，并且通过使用由于振动产生的感应电动势来测量振动 导体在磁场中移动。

公开(公告)号：US20100251826A1

公开(公告)日：2010-10-07

申请号：US12745745

申请日：2008-04-21

申请人： Chang Auck Choi ,  Chang Han Je ,  Gunn Hwang ,  Youn Tae Kim ,  Sung Hae Jung ,  Myung Lae Lee ,  Sung Sik Lee ,  Seok Hwan Moon

发明人： Chang Auck Choi ,  Chang Han Je ,  Gunn Hwang ,  Youn Tae Kim ,  Sung Hae Jung ,  Myung Lae Lee ,  Sung Sik Lee ,  Seok Hwan Moon

IPC分类号： G01L9/06 ,  H01L41/22

CPC分类号： G01L9/0042 ,  Y10T29/42 ,  Y10T29/49

摘要： A micro semiconductor-type pressure sensor and a manufacturing method thereof are provided. The micro semi-conductor-type pressure sensor is implemented by etching a cavity-formation region of a substrate to form a plurality of trenches, oxidizing the plurality of trenches through a thermal oxidation process to form a cavity-formation oxide layer, forming a membrane-formation material layer on upper portions of the cavity-formation oxide layer and the substrate, forming a plurality of etching holes in the membrane-formation material layer, removing the cavity-formation oxide layer through the plurality of etching holes to form a cavity buried in the substrate, forming a membrane reinforcing layer on an upper portion of the membrane-formation material layer to form a membrane for closing the cavity, and forming sensitive films made of a piezoresisive material on an upper portion of the membrane.

摘要翻译： 提供一种微型半导体型压力传感器及其制造方法。 微型半导体型压力传感器通过蚀刻衬底的空腔形成区域以形成多个沟槽来实现，通过热氧化工艺氧化多个沟槽以形成空腔形成氧化物层，形成膜 在形成空腔的氧化物层和衬底的上部上形成一层形成材料层，在膜形成材料层中形成多个蚀刻孔，通过多个蚀刻孔去除腔形成氧化物层，以形成埋入腔 在所述基板中，在所述膜形成材料层的上部形成膜增强层，以形成用于封闭所述空腔的膜，并且在所述膜的上部形成由压阻材料制成的敏感膜。

公开(公告)号：US08359758B2

公开(公告)日：2013-01-29

申请号：US12672997

申请日：2008-04-15

申请人： Sung Sik Lee ,  Myung Lae Lee ,  Chang Han Je ,  Gunn Hwang ,  Chang Auck Choi

发明人： Sung Sik Lee ,  Myung Lae Lee ,  Chang Han Je ,  Gunn Hwang ,  Chang Auck Choi

IPC分类号： G01C9/00

CPC分类号： G01C9/00 ,  G01C9/06

摘要： A three-dimensional inclination angle calculation circuit is provided. The three-dimensional inclination angle calculation circuit includes: X-axis, Y-axis, and Z-axis vibration sensors which change X-axis, Y-axis, and Z-axis electrostatic capacitances according to three-dimensional positions of a measured plane with respect to a reference plane, respectively; X-axis, Y-axis, and Z-axis position value acquisition units which acquire X-axis, Y-axis, and Z-axis position values corresponding to the X-axis, Y-axis, and Z-axis electrostatic capacitances, respectively; and an inclination angle calculation unit which calculates an inclination angle of the measured plane with respect to the reference plane based on the X-axis, Y-axis, and Z-axis position values. Accordingly, it is possible to very easily calculate an inclination angle according to a three-dimensional position of a to-be-measured apparatus by using an existing vibration sensor.

摘要翻译： 提供三维倾斜角计算电路。 三维倾斜角计算电路包括：根据测量平面的三维位置改变X轴，Y轴和Z轴静电电容的X轴，Y轴和Z轴振动传感器 分别相对于参考平面; 获取对应于X轴，Y轴和Z轴静电电容的X轴，Y轴和Z轴位置值的X轴，Y轴和Z轴位置值获取单元， 分别; 以及倾斜角计算单元，其基于X轴，Y轴和Z轴位置值计算测量平面相对于参考平面的倾斜角度。 因此，通过使用现有的振动传感器，可以非常容易地计算出被测量装置的三维位置的倾斜角度。

公开(公告)号：US20110192040A1

公开(公告)日：2011-08-11

申请号：US12672997

申请日：2008-04-15

申请人： Sung Sik Lee ,  Myung Lae Lee ,  Chang Han Je ,  Gunn Hwang ,  Chang Auck Choi

发明人： Sung Sik Lee ,  Myung Lae Lee ,  Chang Han Je ,  Gunn Hwang ,  Chang Auck Choi

IPC分类号： G01C9/06

CPC分类号： G01C9/00 ,  G01C9/06

摘要： A three-dimensional inclination angle calculation circuit is provided. The three-dimensional inclination angle calculation circuit includes: X-axis, Y-axis, and Z-axis vibration sensors which change X-axis, Y-axis, and Z-axis electrostatic capacitances according to three-dimensional positions of a measured plane with respect to a reference plane, respectively; X-axis, Y-axis, and Z-axis position value acquisition units which acquire X-axis, Y-axis, and Z-axis position values corresponding to the X-axis, Y-axis, and Z-axis electrostatic capacitances, respectively; and an inclination angle calculation unit which calculates an inclination angle of the measured plane with respect to the reference plane based on the X-axis, Y-axis, and Z-axis position values. Accordingly, it is possible to very easily calculate an inclination angle according to a three-dimensional position of a to-be-measured apparatus by using an existing vibration sensor.

摘要翻译： 提供三维倾斜角计算电路。 三维倾斜角计算电路包括：根据测量平面的三维位置改变X轴，Y轴和Z轴静电电容的X轴，Y轴和Z轴振动传感器 分别相对于参考平面; 获取对应于X轴，Y轴和Z轴静电电容的X轴，Y轴和Z轴位置值的X轴，Y轴和Z轴位置值获取单元， 分别; 以及倾斜角计算单元，其基于X轴，Y轴和Z轴位置值计算测量平面相对于参考平面的倾斜角度。 因此，通过使用现有的振动传感器，可以非常容易地计算出被测量装置的三维位置的倾斜角度。

公开(公告)号：US08638110B2

公开(公告)日：2014-01-28

申请号：US12675111

申请日：2008-07-21

申请人： Sung Sik Lee ,  Myung Lae Lee ,  Gunn Hwang ,  Chang Auck Choi

发明人： Sung Sik Lee ,  Myung Lae Lee ,  Gunn Hwang ,  Chang Auck Choi

IPC分类号： G01R27/26

CPC分类号： G01D5/24

摘要： There is provided a high resolution circuit for converting a capacitance-to-time deviation including a capacitance deviation detecting unit generating two detection signals having a phase difference corresponding to variations of capacitance of an micro electro mechanical system (MEMS) sensor; a capacitance deviation amplifying unit dividing frequencies of the two detection signals to amplify the phase difference corresponding to the capacitance deviation; and a time signal generating unit generating a time signal having a pulse width corresponding to the amplified phase difference.

摘要翻译： 提供了一种用于转换电容 - 时间偏差的高分辨率电路，包括产生具有与微机电系统（MEMS）传感器的电容变化相对应的相位差的两个检测信号的电容偏差检测单元; 电容偏差放大单元，对所述两个检测信号的频率进行分频，以放大与所述电容偏差对应的相位差; 以及时间信号生成单元，生成具有与放大后的相位差对应的脉冲宽度的时间信号。

公开(公告)号：US20110133758A1

公开(公告)日：2011-06-09

申请号：US12675111

申请日：2008-07-21

申请人： Sung Sik Lee ,  Myung Lae Lee ,  Gunn Hwang ,  Chang Auck Choi

发明人： Sung Sik Lee ,  Myung Lae Lee ,  Gunn Hwang ,  Chang Auck Choi

IPC分类号： G01R27/26

CPC分类号： G01D5/24

摘要： There is provided a high resolution circuit for converting a capacitance-to-time deviation including a capacitance deviation detecting unit generating two detection signals having a phase difference corresponding to variations of capacitance of an micro electro mechanical system (MEMS) sensor; a capacitance deviation amplifying unit dividing frequencies of the two detection signals to amplify the phase difference corresponding to the capacitance deviation; and a time signal generating unit generating a time signal having a pulse width corresponding to the amplified phase difference.

摘要翻译： 提供了一种用于转换电容 - 时间偏差的高分辨率电路，包括产生具有与微机电系统（MEMS）传感器的电容变化相对应的相位差的两个检测信号的电容偏差检测单元; 电容偏差放大单元，对所述两个检测信号的频率进行分频，以放大与所述电容偏差对应的相位差; 以及时间信号生成单元，生成具有与放大后的相位差对应的脉冲宽度的时间信号。

公开(公告)号：US20110140578A1

公开(公告)日：2011-06-16

申请号：US12862577

申请日：2010-08-24

申请人： Sang Choon Ko ,  Chang Han Je ,  Ho Jun Ryu ,  Sung Sik Lee ,  Chi Hoon Jun

发明人： Sang Choon Ko ,  Chang Han Je ,  Ho Jun Ryu ,  Sung Sik Lee ,  Chi Hoon Jun

IPC分类号： H02N2/18

CPC分类号： H01L41/1138 ,  B60C23/0411 ,  H01L41/1136 ,  H02N2/186

摘要： Provided is a small piezoelectric power generator applied to a wireless sensor network system of a tire pressure monitoring system (TPMS) for monitoring an internal environment of a tire such as variation in air pressure in the tire. In particular, when the system, in which air pressure, temperature and acceleration sensors are mounted, installed in the tire is operated in the TPMS for an automobile, a small piezoelectric power generator for the TPMS can be used as a power source in place of a conventional battery. The piezoelectric power generator includes a substrate having an electrode for transmitting power to the exterior, a metal plate formed on the substrate, and a piezoelectric body disposed on the metal plate and transmitting the power generated by a piezoelectric material to the electrode.

摘要翻译： 提供了一种应用于轮胎压力监测系统（TPMS）的无线传感器网络系统的小型压电发电机，用于监测轮胎的内部环境，例如轮胎中的空气压力的变化。 特别地，当安装在轮胎中的气压，温度和加速度传感器的系统在用于汽车的TPMS中运行时，用于TPMS的小压电发电机可以用作电源来代替 常规电池。 压电发电机包括具有用于向外部传输电力的电极的基板，形成在基板上的金属板，以及设置在金属板上的压电体，并将由压电材料产生的电力传递到电极。

公开(公告)号：US08319397B2

公开(公告)日：2012-11-27

申请号：US12862577

申请日：2010-08-24

申请人： Sang Choon Ko ,  Chang Han Je ,  Ho Jun Ryu ,  Sung Sik Lee ,  Chi Hoon Jun

发明人： Sang Choon Ko ,  Chang Han Je ,  Ho Jun Ryu ,  Sung Sik Lee ,  Chi Hoon Jun

IPC分类号： H01L41/08

CPC分类号： H01L41/1138 ,  B60C23/0411 ,  H01L41/1136 ,  H02N2/186

摘要： Provided is a small piezoelectric power generator applied to a wireless sensor network system of a tire pressure monitoring system (TPMS) for monitoring an internal environment of a tire such as variation in air pressure in the tire. In particular, when the system, in which air pressure, temperature and acceleration sensors are mounted, installed in the tire is operated in the TPMS for an automobile, a small piezoelectric power generator for the TPMS can be used as a power source in place of a conventional battery. The piezoelectric power generator includes a substrate having an electrode for transmitting power to the exterior, a metal plate formed on the substrate, and a piezoelectric body disposed on the metal plate and transmitting the power generated by a piezoelectric material to the electrode.

摘要翻译： 提供了一种应用于轮胎压力监测系统（TPMS）的无线传感器网络系统的小型压电发电机，用于监测轮胎的内部环境，例如轮胎中的空气压力的变化。 特别地，当安装在轮胎中的气压，温度和加速度传感器的系统在用于汽车的TPMS中运行时，用于TPMS的小压电发电机可以用作电源来代替 常规电池。 压电发电机包括具有用于向外部传输电力的电极的基板，形成在基板上的金属板，以及设置在金属板上并将由压电材料产生的电力传递到电极的压电体。