公开(公告)号：US20140091806A1

公开(公告)日：2014-04-03

申请号：US14118778

申请日：2012-04-11

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Kazuya Kikunaga ,  Kazuhiro Nonaka

IPC: G01R29/12

CPC classification number: G01R29/12 ,  G01R29/24

Abstract: A static-electricity-quantity measuring apparatus and a static-electricity-quantity measuring method are optimum for a manufacturing site under a difficult-to-measure situation and measure the quantity of static electricity of electronic parts, machine parts, etc. simply with high accuracy. A static-electricity-quantity measuring apparatus of the present invention has: a receiving unit which receives virtual electromagnetic waves generated by vibrations applied to a measured object; a measuring unit which measures at least one of the intensity, frequency, and phase of the virtual electromagnetic waves received by the receiving unit; and a calculating unit which calculates the quantity of static electricity of the measured object based on the measurement result of the measuring unit.

Abstract translation: 静电量测量装置和静电量测量方法在难以测量的情况下对于制造场地是最佳的，并且仅测量电子部件，机器部件等的静电量 准确性。 本发明的静电量测量装置具有：接收单元，其接收由施加到测量对象的振动产生的虚拟电磁波; 测量单元，其测量由所述接收单元接收的所述虚拟电磁波的强度，频率和相位中的至少一个; 以及计算单元，其基于测量单元的测量结果来计算被测物体的静电量。

公开(公告)号：US09841450B2

公开(公告)日：2017-12-12

申请号：US14905591

申请日：2014-03-13

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Kazuya Kikunaga ,  Kazuhiro Nonaka

IPC: G01R29/12 ,  G01R29/24 ,  G06F1/00 ,  H01L21/00 ,  G01R29/14 ,  G01V3/08 ,  G01R29/08 ,  G06T11/20 ,  G01H11/06

CPC classification number: G01R29/24 ,  G01H11/06 ,  G01R29/0878 ,  G01R29/14 ,  G01V3/088 ,  G06F1/00 ,  G06T11/206 ,  H01L21/00 ,  H01L2221/00

Abstract: A static electricity distribution measuring apparatus (1) according to the present disclosure measures the static electricity distribution on a measurement surface of a measurement target (200), and is provided with: an array antenna (2) that receives electric fields generated from each of a plurality of areas (211) on the measurement surface through vibration; a vibrator (3) that vibrates the measurement target (200) or the array antenna (2); a measurer (4) that measures at least one from among intensity, frequency and phase of the electric fields in each of the plurality of areas (211) received by the array antenna (2); a calculator (5) that calculates an amount of static electricity for each of the plurality of areas (211) based on measurement results by the measurer (4); and a drawer (6) that draws the static electricity distribution on the measurement surface based on the amount of static electricity in each of the plurality of areas (211). The array antenna (2) has a plurality of antenna elements (21) respectively corresponding to the plurality of areas (211).