STATIC-ELECTRICITY-QUANTITY MEASURING APPARATUS AND STATIC-ELECTRICITY- QUANTITY MEASURING METHOD
    3.
    发明申请
    STATIC-ELECTRICITY-QUANTITY MEASURING APPARATUS AND STATIC-ELECTRICITY- QUANTITY MEASURING METHOD 审中-公开
    静态电量测量装置和静态电量测量方法

    公开(公告)号:US20140091806A1

    公开(公告)日:2014-04-03

    申请号:US14118778

    申请日:2012-04-11

    CPC classification number: G01R29/12 G01R29/24

    Abstract: A static-electricity-quantity measuring apparatus and a static-electricity-quantity measuring method are optimum for a manufacturing site under a difficult-to-measure situation and measure the quantity of static electricity of electronic parts, machine parts, etc. simply with high accuracy. A static-electricity-quantity measuring apparatus of the present invention has: a receiving unit which receives virtual electromagnetic waves generated by vibrations applied to a measured object; a measuring unit which measures at least one of the intensity, frequency, and phase of the virtual electromagnetic waves received by the receiving unit; and a calculating unit which calculates the quantity of static electricity of the measured object based on the measurement result of the measuring unit.

    Abstract translation: 静电量测量装置和静电量测量方法在难以测量的情况下对于制造场地是最佳的,并且仅测量电子部件,机器部件等的静电量 准确性。 本发明的静电量测量装置具有:接收单元,其接收由施加到测量对象的振动产生的虚拟电磁波; 测量单元,其测量由所述接收单元接收的所述虚拟电磁波的强度,频率和相位中的至少一个; 以及计算单元,其基于测量单元的测量结果来计算被测物体的静电量。

    Static electricity distribution measuring device

    公开(公告)号:US10718803B2

    公开(公告)日:2020-07-21

    申请号:US16092540

    申请日:2017-02-27

    Inventor: Kazuya Kikunaga

    Abstract: With prior art static electricity distribution measuring devices, there has been the problem that it has not been possible to measure the amount of electrostatic charge over a wide range at high spatial resolution and quickly.In the present invention, there are provided: a detection unit 20 in which a plurality of sensors, provided upon a surface, move relatively along the surface of an electrostatically charged subject 100 to be measured, and detect potential changes generated by the distance to the surface of the measurement subject being changed; a reference distance measuring unit that measures the distance between the surface of the measurement subject and the surface of the detection unit; a distance adjustment unit that adjusts that distance so that it becomes a reference distance that is determined in advance; and a vibrating unit that causes the distance between the surface of the measurement subject and the surface of the detection unit to change upon a predetermined cycle.

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