公开(公告)号：US20030175062A1

公开(公告)日：2003-09-18

申请号：US10377401

申请日：2003-02-28

申请人： NGK Insulators, Ltd.

发明人： Toshikatsu Kashiwaya ,  Kazuhiro Yamamoto ,  Masao Takahashi

IPC分类号： B41J005/00 ,  B41J002/00

CPC分类号： H01L41/1875 ,  H01L41/0805 ,  H01L41/0973 ,  Y10T29/42

摘要： A piezoelectric/electrostrictive device comprising, on a ceramic-made substrate, at least one piezoelectric/electrostrictive layer made of a piezoelectric/electrostrictive ceramic composition and at least one pair of electrodes electrically connected to the piezoelectric/electrostrictive layer, characterized in that the piezoelectric/electrostrictive layer is made of a piezoelectric/electrostrictive ceramic composition containing a PbMg1/3Nb2/3O3nullPbZrO3nullPbTiO3 system composition wherein part of Pb is substituted with at least one kind selected from Sr and La, as a major component and Ce in an amount of 0.01 to 0.50% by mass in terms of CeO2 and that the piezoelectric/electrostrictive layer is solidly attached to the substrate directly or via part of the electrodes. The piezoelectric/electrostrictive device is superior in transmission of oscillation between the substrate and the piezoelectric/electrostrictive layer, produces a large displacement, and hardly gives rise to dielectric breakdown or short circuit.

摘要翻译： 一种压电/电致伸缩器件，在陶瓷制的衬底上包括由压电/电致伸缩陶瓷组合物构成的至少一个压电/电致伸缩层和与压电/电致伸缩层电连接的至少一对电极，其特征在于，压电 /电致伸缩层由含有PbMg1 / 3Nb2 / 3O3-PbZrO3-PbTiO3体系组合物的压电/电致伸缩陶瓷组合物制成，其中Pb的一部分被选自Sr和La中的至少一种作为主要成分取代，Ce在 以CeO 2换算为0.01〜0.50质量％，并且压电/电致伸缩层直接或经由电极的一部分牢固地附着在基板上。 压电/电致伸缩器件在衬底和压电/电致伸缩层之间的振荡传输方面是优异的，产生大的位移，并且几乎不会引起介质击穿或短路。

公开(公告)号：US20040205948A1

公开(公告)日：2004-10-21

申请号：US10666879

申请日：2003-09-19

申请人： NGK Insulators, Ltd.

发明人： Toshikatsu Kashiwaya ,  Mutsumi Kitagawa

IPC分类号： H04R017/00 ,  H02N002/00

CPC分类号： H01L41/43 ,  H01L41/083 ,  H01L41/0973 ,  H01L41/1875 ,  Y10T29/42

摘要： A method for producing a piezoelectric element by superposing a piezoelectric material made of a piezoelectric ceramic composition containing a PbMg1/3Nb2/3O3nullPbZrO3nullPbTiO3 ternary system solid solution composition represented by the general formula Pbx(Mgy/3Nb2/3)aTibZrcO3 as a main component, and 0.05 to 10.0 mass % of NiO on a ceramic substrate or on an electrode formed on the ceramic substrate, and subjecting the superposed piezoelectric material to a thermal treatment in an atmosphere where 0.03-0.5 mg/cm3 (NiO conversion amount per unit volume of a space in a container) of an atmosphere-controlling material having the same composition as the piezoelectric material is coexisted.

摘要翻译： 通过将由通式Pbx（Mgy / 3Nb2 / 3）aTibZrcO3表示的PbMg1 / 3Nb2 / 3O3-PbZrO3-PbTiO3三元体系固溶体组合物的压电陶瓷组合物制成的压电材料叠加起来制造压电元件的方法为 主成分，在陶瓷基板上或形成在陶瓷基板上的电极上的NiO为0.05〜10.0质量％，在0.03-0.5mg / cm 3（NiO）的气氛中对叠加的压电材料进行热处理 具有与压电材料相同组成的气氛控制材料的容器内的空间的单位体积的转换量）共存。

公开(公告)号：US20020056827A1

公开(公告)日：2002-05-16

申请号：US09953674

申请日：2001-09-17

申请人： NGK Insulators, Ltd

发明人： Toshikatsu Kashiwaya

IPC分类号： H04R017/00

CPC分类号： H01L41/0805 ,  C04B35/493 ,  C04B35/499 ,  C04B2235/3206 ,  C04B2235/3208 ,  C04B2235/3213 ,  C04B2235/3215 ,  C04B2235/3227 ,  C04B2235/3244 ,  C04B2235/3251 ,  C04B2235/3279 ,  C04B2235/768 ,  C04B2235/77 ,  C04B2235/786 ,  H01L41/0973 ,  H01L41/1875 ,  H01L41/314 ,  H01L41/43 ,  Y10T29/42

摘要： A piezoelectric element includes a ceramic substrate, a piezoelectric(s) made of a ceramic composition composed mainly of a PbMgnullNbnullO3nullPbZrO3nullPbTiO3 ternary system solid solution composition represented by the following general formula (1) and containing 0.05 to 10.0% by weight, based on the ceramic composition, of NiO, and electrodes electrically connected to the piezoelectric. The piezoelectric is solidly attached to the ceramic substrate directly or via part or all of the electrodes: Pbx(Mg{fraction (y/3)}Nbnull)aTibZrcO3nullnull(1) wherein 0.95nullxnull1.05; 0.8nullynull1.0; a, b and c are decimals falling in a range surrounded by (a,b,c)null(0.550, 0.425, 0.025), (0.550, 0.325, 0.125), (0.375, 0.325, 0.300), (0.100, 0.425, 0.475), (0.100, 0.475, 0.425) and (0.375, 0.425, 0.200), and anullbnullcnull1.000; and a process for producing such a piezoelectric element. This piezoelectric element has very high piezoelectric properties, is superior in vibration transmittability between ceramic substrate and piezoelectric, and can provide an actuator or sensor of small size and high integration.

摘要翻译： 压电元件包括​​陶瓷基板，主要由以下通式（1）表示的含有0.05〜10.0重量％的PbMg 3 Nb 3 O 3 -PbZrO 3 -PbTiO 3三元体系固溶体组成的陶瓷组合物的压电体， 基于陶瓷组成，NiO和与压电体电连接的电极。 压电体直接或通过部分或全部电极牢固地附着到陶瓷衬底上：在线配方> Pbx（Mg {fraction（y / 3）}Nb⅔）aTibZrcO3（1 ）其中0.95 <= x <= 1.05; 0.8 <= y <= 1.0; （a，b，c）=（0.550,0.425,0.025），（0.550,0.325,0.125），（0.375,0.325,0.300），（0.100,0.425， 0.475），（0.100,0.475,0.425）和（0.375,0.425,0.200）和a + b + c = 1.000; 以及制造这种压电元件的方法。 该压电元件具有非常高的压电性能，陶瓷基板和压电体之间的振动传递性优异，并且可以提供小尺寸和高集成度的致动器或传感器。

公开(公告)号：US20030198745A1

公开(公告)日：2003-10-23

申请号：US10428216

申请日：2003-05-02

申请人： NGK Insulators, Ltd.

发明人： Toshikatsu Kashiwaya ,  Mutsumi Kitagawa

IPC分类号： B05D001/40 ,  B32B009/00

CPC分类号： H01L41/0805 ,  H01L41/083 ,  H01L41/0973 ,  H01L41/1875 ,  H01L41/314 ,  H01L41/43

摘要： A piezoelectric element includes: a ceramic substrate, an electrode, and a piezoelectric portion made of a piezoelectric ceramic composition containing a Pb(Mg, Ni)1/3Nb2/3O3nullPbZrO3nullPbTiO3 ternary system solid solution composition being represented by the following general formula (1) as a main component: Pbxnull(Mg1nullyNiy)1/3nullaNb2/3nullbTicZrdO3nullnull(1) wherein 0.95nullxnull1.05; 0.05nullynull0.20; 0.90nullanull1.10; b, c and d are decimals falling in a range surrounded by (b,c,d)null(0.550, 0.425, 0.025), (0.550, 0.325, 0.125), (0.375, 0.325, 0.300), (0.100, 0.425, 0.475), (0.100, 0.475, 0.425) and (0.375, 0.425, 0.200) in the coordinates with coordinate axes of said b, c and d, and bnullcnulldnull1.000. The electrode is electrically connected to the piezoelectric portion, and the piezoelectric portion is solidly attached to the ceramic substrate directly or via the electrode.

摘要翻译： 压电元件包括​​：由包含Pb（Mg，Ni）1 / 3Nb2 / 3O3-PbZrO3-PbTiO3三元体系固溶体组合物的压电陶瓷组合物制成的陶瓷基板，电极和压电部件，其由以下一般表示 式（1）作为主要成分：Pbx {（Mg1-yNiy）1 / 3xaNb2 / 3} bTicZrdO3（1）其中0.95 <= x <= 1.05; 0.05 <= y <= 0.20; 0.90 <= a <= 1.10; b，c和d分别为（b，c，d）=（0.550,0.425,0.025），（0.550,0.325,0.125），（0.375,0.325,0.300），（0.100,0.425， 0.475），（0.100,0.475,0.425）和（0.375,0.425,0.200）在坐标轴上的坐标，b + c + d = 1.000。 电极电连接到压电部分，并且压电部分直接或经由电极牢固地附接到陶瓷衬底。

公开(公告)号：US20010022487A1

公开(公告)日：2001-09-20

申请号：US09861738

申请日：2001-05-21

申请人： NGK Insulators, Ltd.

发明人： Yukihisa Takeuchi ,  Toshikatsu Kashiwaya ,  Nobuo Takahashi

IPC分类号： H01L041/04 ,  H02N002/00 ,  H04R017/00

CPC分类号： H01L41/1875 ,  H01H1/0036 ,  H01H57/00 ,  H01H2001/0042 ,  H01H2057/006 ,  H01L41/0973 ,  H01L41/098 ,  H01L41/314 ,  Y10T29/42

摘要： A ceramic element comprises a main actuator element 26 having an anti-ferroelectric film 22 and a pair of electrodes 24a, 24b formed on a first principal surface (front surface) of the anti-ferroelectric film 22, a vibrating section 18 for supporting the main actuator element 26, and a fixed section 20 for supporting the vibrating section 18 in a vibrating manner. The anti-ferroelectric film 22 after polarization has a region Zt in which its average dielectric constant is increased in an analog manner in accordance with a voltage V applied to the pair of electrodes 24a, 24b. Specifically, an expression of p/tnull2.5 is satisfied provided that an average film thickness of the anti-ferroelectric film 22 is t, and a pitch between the pair of electrodes 24a, 24b is p. Accordingly, the mechanical displacement amount is changed in an analog manner in accordance with the applied voltage, making it possible to maintain a displacement amount equivalent to that obtained during application of a driving voltage, in a no voltage-loaded state after completion of application of the driving voltage.

摘要翻译： 陶瓷元件包括具有抗铁电体膜22的主致动器元件26和形成在反铁电体膜22的第一主表面（前表面）上的一对电极24a，24b，用于支撑主铁芯的振动部分18 致动器元件26和用于以振动方式支撑振动部分18的固定部分20。 偏振后的反铁电体膜22具有根据施加到一对电极24a，24b的电压V的模拟方式增加平均介电常数的区域Zt。 具体地，如果反铁电体膜22的平均膜厚为t，并且一对电极24a，24b之间的间距为p，则p / t <= 2.5的表达式被满足。 因此，机械位移量根据所施加的电压以模拟方式改变，使得可以在完成施加之后的无电压负载状态下保持与施加驱动电压期间获得的位移量相当的位移量 的驱动电压。

公开(公告)号：US20030170381A1

公开(公告)日：2003-09-11

申请号：US10354647

申请日：2003-01-30

申请人： NGK Insulators, Ltd.

发明人： Toshikatsu Kashiwaya

IPC分类号： B05D005/12 ,  B05D003/02

CPC分类号： H01L41/0805 ,  C04B35/493 ,  C04B35/499 ,  C04B2235/3206 ,  C04B2235/3208 ,  C04B2235/3213 ,  C04B2235/3215 ,  C04B2235/3227 ,  C04B2235/3244 ,  C04B2235/3251 ,  C04B2235/3279 ,  C04B2235/768 ,  C04B2235/77 ,  C04B2235/786 ,  H01L41/0973 ,  H01L41/1875 ,  H01L41/314 ,  H01L41/43 ,  Y10T29/42

摘要： A piezoelectric element includes a ceramic substrate, a piezoelectric ceramic composition composed mainly of a PbMg1/3Nb2/3O3nullPbZrO3nullPbTiO3 ternary system solid solution composition containing 0.05 to 10.0% by weight NiO, based on the ceramic composition. Electrodes are electrically connected to the piezoelectric. The piezoelectric is solidly attached to the ceramic substrate directly or via part of or all of the electrodes. The piezoelectric ceramic composition is represented by the following general formula: Pbx(Mgy/3Nb2/3)aTibZrcO3, wherein 0.95nullxnull1.05; 0.8nullynull1.0; a, b and c are decimals falling in a range surrounded by (a,b,c)null(0.550, 0.425, 0.025), (0.550, 0.325, 0.125), (0.375, 0.325, 0.300), (0.100, 0.425, 0.475), (0.100, 0.475, 0.425) and (0.375, 0.425, 0.200), and anullbnullcnull1.000. This piezoelectric element has very high piezoelectric properties, is superior in vibration transmittability between ceramic substrate and piezoelectric, and can provide an actuator or sensor of small size and high integration.

摘要翻译： 压电元件包括​​陶瓷基板，主要由基于陶瓷组合物的含有0.05至10.0重量％NiO的PbMg1 / 3Nb2 / 3O3-PbZrO3-PbTiO3三元体系固溶体组合物组成的压电陶瓷组合物。 电极与压电电连接。 压电体直接或通过部分或全部电极牢固地附接到陶瓷衬底。 压电陶瓷组合物由以下通式表示：Pbx（Mgy / 3Nb2 / 3）aTibZrcO3，其中0.95 <= x <= 1.05; 0.8 <= y <= 1.0; （a，b，c）=（0.550,0.425,0.025），（0.550,0.325,0.125），（0.375,0.325,0.300），（0.100,0.425， 0.475），（0.100,0.475,0.425）和（0.375,0.425,0.200）和a + b + c = 1.000。 该压电元件具有非常高的压电性能，陶瓷基板和压电体之间的振动传递性优异，并且可以提供小尺寸和高集成度的致动器或传感器。

公开(公告)号：US20030072972A1

公开(公告)日：2003-04-17

申请号：US10072294

申请日：2002-02-07

申请人： NGK Insulators, Ltd.

发明人： Toshikatsu Kashiwaya ,  Mutsumi Kitagawa

IPC分类号： B32B018/00

CPC分类号： H01L41/0805 ,  H01L41/083 ,  H01L41/0973 ,  H01L41/1875 ,  H01L41/314 ,  H01L41/43

摘要： A piezoelectric element includes: a ceramic substrate, a piezoelectric portion made of a piezoelectric ceramic composition containing a Pb(Mg, Ni)nullNbnullO3nullPbZrO3nullPbTiO3 ternary system solid solution composition being represented by the following general formula (1) as a main, and an electrode. The electrode is electrically connected to the piezoelectric portion, and the piezoelectric portion is solidly attached to the ceramic substrate directly or via the electrode.Pbxnull(Mg1-yNiy)nullnullaNbnullnullbTicZrdO3nullnull(1)wherein 0.95nullxnull1.05; 0.05nullynull0.20; 0.90nullanull1.10; b, c and d are decimals falling in a range surrounded by (b,c,d)null(0.550, 0.425, 0.025), (0.550, 0.325, 0.125), (0.375, 0.325, 0.300), (0.100, 0.425, 0.475), (0.100, 0.475, 0.425) and (0.375, 0.425, 0.200) in the coordinates with coordinate axes of said b, c and d, and bnullcnulldnull1.000.

摘要翻译： 压电元件包括​​：陶瓷基板，由含有由以下通式（1）表示的Pb（Mg，Ni）1 / 3Nb2 / 3O3-PbZrO3-PbTiO3三元体系固溶体组合物的压电陶瓷组合物制成的压电部分， 作为主要和电极。 电极与压电部分电连接，压电部分直接或经由电极固定在陶瓷衬底上.Pbx {（Mg1-yNiy）1 / 3xaNb2 / 3} bTicZrdO3（1）其中0.95 <= x < = 1.05; 0.05 <= y <= 0.20; 0.90 <= a <= 1.10; b，c和d分别为（b，c，d）=（0.550,0.425,0.025），（0.550,0.325,0.125），（0.375,0.325,0.300），（0.100,0.425， 0.475），（0.100,0.475,0.425）和（0.375,0.425,0.200）在坐标轴上的坐标，b + c + d = 1.000。

公开(公告)号：US20030067251A1

公开(公告)日：2003-04-10

申请号：US10072297

申请日：2002-02-07

申请人： NGK Insulators, Ltd.

发明人： Toshikatsu Kashiwaya ,  Mutsumi Kitagawa

IPC分类号： H01L041/187

CPC分类号： H01L41/43 ,  H01L41/083 ,  H01L41/0973 ,  H01L41/1875 ,  Y10T29/42

摘要： A piezoelectric element comprising: a ceramic substrate, a piezoelectric portion made of a piezoelectric ceramic composition containing a PbMg1/3Nb2/3OnullPbZrO3nullPbTiO3 ternary system solid solution composition having an average particle diameter of 1-10 nullm with a maximum particle diameter being 5 times as large as the average particle diameter or less and being represented by the following general formula (1) as a main component and 0.05 to 10.0 mass % of NiO, and an electrode. The electrode is electrically connected to the piezoelectric portion, and the piezoelectric portion is solidly attached to the ceramic substrate directly or via the electrode.Pbx(Mgy/3Nb2/3)aTibZrcO3nullnull(1)wherein 0.95nullxnull1.05; 0.8nullynull1.0: a, b and c are decimals falling in a range surrounded by (a, b, c)null(0.550, 0.425, 0.025), (0.550, 0.325, 0.125), (0.375, 0.325, 0.300), (0.100, 0.425, 0.475), (0.100, 0.475, 0.425) and (0.375, 0.425, 0.200) in the coordinates with coordinate axes of the a, b and c, and anullbnullcnull1.00.

摘要翻译： 一种压电元件，包括：陶瓷基板，由包含平均粒径为1-10μm的PbMg1 / 3Nb2 / 3O-PbZrO3-PbTiO3三元体系固溶体组合物的压电陶瓷组合物制成的压电部件，最大粒径为 平均粒径的5倍以下，由以下通式（1）表示为主成分，0.05〜10.0质量％的NiO和电极。 电极电连接到压电部分，并且压电部分直接或经由电极固定到陶瓷衬底上.Pbx（Mgy / 3Nb2 / 3）aTibZrcO3（1）其中0.95 <= x <= 1.05; （a，b，c）=（0.550,0.425,0.025），（0.550,0.325,0.125），（0.375,0.325， 0.300），（0.100,0.425,0.475），（0.100,0.475,0.425）和（0.375,0.425,0.200）在坐标轴上的坐标，a + b + c = 1.00。

公开(公告)号：US20040189152A1

公开(公告)日：2004-09-30

申请号：US10797991

申请日：2004-03-11

申请人： NGK Insulators, Ltd.

发明人： Toshikatsu Kashiwaya

IPC分类号： H01L041/187

CPC分类号： H01L41/1875 ,  H01L41/0973 ,  H01L41/098

摘要： There is provided a piezoelectric/electrostrictive film type device comprising: a substrate formed of a ceramic, at least one piezoelectric/electrostrictive portion formed of a piezoelectric/electrostrictive porcelain composition on the substrate, and at least one pair of electrodes on the substrate, electrically connected to the piezoelectric/electrostrictive portion and including a positive electrode and a negative electrode. The piezoelectric/electrostrictive porcelain composition contains a PbMg1/3Nb2/3O3nullPbZrO3nullPbTiO3 ternary solid solution system composition as a major component, and contains 0.05 to 3.0 wt % of NiO, and contains 2.0 to 22.0 mol % of Si with respect to the total number of moles of Mg and Ni. The piezoelectric/electrostrictive portion is solidly attached onto the substrate directly or via the positive electrode or the negative electrode.

摘要翻译： 提供了一种压电/电致伸缩膜型器件，包括：由陶瓷形成的衬底，在衬底上由压电/电致伸缩瓷组合物形成的至少一个压电/电致伸缩部分，以及衬底上的至少一对电极， 连接到压电/电致伸缩部分并且包括正极和负极。 压电/电致伸缩瓷组合物含有作为主要成分的PbMg1 / 3Nb2 / 3O3-PbZrO3-PbTiO3三元固溶体系组合物，含有0.05〜3.0重量％的NiO，相对于含有2.0〜22.0摩尔％的Si Mg和Ni的总摩尔数。 压电/电致伸缩部分直接或通过正电极或负电极固定在基板上。

公开(公告)号：US20040051422A1

公开(公告)日：2004-03-18

申请号：US10359039

申请日：2003-02-05

申请人： NGK Insulators, Ltd.

发明人： Toshikatsu Kashiwaya ,  Mutsumi Kitagawa

IPC分类号： H01L041/04

CPC分类号： H01L41/0805 ,  H01L41/0831 ,  H01L41/0973 ,  H01L41/1875 ,  Y10T29/42 ,  Y10T29/435 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49131 ,  Y10T29/49151

摘要： A multi-layered piezoelectric device has, on a ceramic-made substrate, a plurality of piezoelectric portions and a plurality of electrodes electrically connected to the piezoelectric portions, in layers, wherein a first piezoelectric portion is made of a piezoelectric ceramic composition containing Ni in an amount of 0.08 to 0.31% by mass (in terms of NiO), second and upper piezoelectric portions are made of a piezoelectric ceramic composition of higher Ni content than in the first piezoelectric portion, and an electrode is provided at least between the first piezoelectric portion and the second piezoelectric portion. This multi-layered piezoelectric device has a very high piezoelectric characteristic, is superior in transmission of oscillation between ceramic substrate and piezoelectric portions, and can be suitably used in actuators, sensors, etc.

摘要翻译： 多层压电元件在陶瓷制的基板上具有多层压电部和与该压电部电连接的多个电极，其中，第一压电体由含有Ni的压电陶瓷组合物构成 0.08〜0.31质量％（以NiO表示），第二压电部分和上部压电部分由Ni含量高于第一压电部分的压电陶瓷组合物制成，并且电极至少设置在第一压电 部分和第二压电部分。 该多层压电元件具有非常高的压电特性，陶瓷基板与压电部之间的振荡传输性优异，可适用于致动器，传感器等。