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公开(公告)号：US10276410B2
公开(公告)日：2019-04-30
申请号：US13667512
申请日：2012-11-02
Applicant: NHK SPRING CO., LTD.
Inventor： Toshihiro Tachikawa , Junichi Miyahara , Kazuhiro Yonekura , Toshihiko Hanamachi , Go Takahara , Jun Futakuchiya , Daisuke Hashimoto
IPC: H01L21/683 , H05B3/68 , H01L21/67 , H01L21/687
Abstract: A substrate support device formed of a metal and having a high withstand voltage and a high thermal resistance is provided. A substrate support device according to the present invention includes a plate section formed of a metal; a shaft section connected to the plate section and formed of a metal; a heating element provided in the plate section; and an insulating film formed on a first surface of the plate section, the first surface opposite to the shaft section, by ceramic thermal spraying. The substrate support device may further include an insulating film formed on a second surface of the plate section which intersects the first surface of the plate section approximately perpendicularly.
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公开(公告)号：US20130134148A1
公开(公告)日：2013-05-30
申请号：US13667512
申请日：2012-11-02
Applicant: NHK Spring Co., Ltd.
Inventor： Toshihiro TACHIKAWA , Junichi Miyahara , Kazuhiro Yonekura , Toshihiko Hanamachi , Go Takahara , Jun Futakuchiya , Daisuke Hashimoto
IPC: H01L21/683 , H05B3/68
CPC classification number: H01L21/67103 , H01L21/67109 , H01L21/68735 , H01L21/68785
Abstract: A substrate support device formed of a metal and having a high withstand voltage and a high thermal resistance is provided. A substrate support device according to the present invention includes a plate section formed of a metal; a shaft section connected to the plate section and formed of a metal; a heating element provided in the plate section; and an insulating film formed on a first surface of the plate section, the first surface opposite to the shaft section, by ceramic thermal spraying. The substrate support device may further include an insulating film formed on a second surface of the plate section which intersects the first surface of the plate section approximately perpendicularly.
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公开(公告)号：US11477858B2
公开(公告)日：2022-10-18
申请号：US16653094
申请日：2019-10-15
Applicant: NHK SPRING CO., LTD.
Inventor： Toshihiko Hanamachi , Kenji Sekiya , Daisuke Hashimoto , Satoshi Hirano , Masaru Takimoto , Go Takahara , Yoshihito Araki , Arata Tatsumi , Takashi Kawasaki , Yuki Toyama , Satoshi Anzai
Abstract: A small diameter sheath heater with improved reliability is provided. The sheath heater according to one embodiment of the present invention includes a metal sheath, a heating wire having a band shape, the heating wire arranged with a gap within the metal sheath so as to rotate with respect to an axis direction of the metal sheath, an insulating material arranged in the gap, and connection terminals arranged at one end of the metal sheath, the connection terminals electrically connected with both ends of the heating wire respectively.
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公开(公告)号：US09551071B2
公开(公告)日：2017-01-24
申请号：US14845865
申请日：2015-09-04
Applicant: NHK SPRING CO., LTD.
Inventor： Toshihiko Hanamachi , Daisuke Hashimoto , Yasuaki Ishioka
IPC: C23C16/458 , H01L21/67 , H01L21/687 , C23C16/46 , B05C21/00
CPC classification number: C23C16/4586 , B05C21/00 , C23C16/463 , H01L21/67109 , H01L21/68785 , H01L21/68792
Abstract: A substrate support device includes a plate portion including a heater plate that includes a heating element provided in the heater plate, and also including a first cooling plate provided on a bottom surface of the heater plate and having a first flow path, and a second cooling plate provided on a top surface of the heater plate and having a second flow path; and a shaft portion supporting the plate portion and including a line connected to the heating element to supply an electric current to the heating element, and a tube supplying a coolant to the first cooling plate and the second cooling plate, the line and the tube being provided inside the shaft portion.
Abstract translation: 基板支撑装置包括板部，该板部包括加热板，该加热板包括设置在加热板中的加热元件，并且还包括设置在加热板的底面上并具有第一流路的第一冷却板， 设置在加热器板的顶表面上并具有第二流路; 以及轴部，其支撑所述板部，并且包括连接到所述加热元件的线以向所述加热元件供应电流;以及管向所述第一冷却板和所述第二冷却板供应冷却剂的管，所述管和管为 设置在轴部内。
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