公开(公告)号：US11490464B2

公开(公告)日：2022-11-01

申请号：US16598100

申请日：2019-10-10

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko Hanamachi ,  Kenji Sekiya ,  Go Takahara ,  Naoya Aikawa ,  Yuta Kisara ,  Arata Tatsumi

IPC: H05B3/18 ,  H05B3/28 ,  H05B3/30 ,  H05B3/48 ,  H01C1/03 ,  H05B3/10 ,  H01L21/67

Abstract: A heather unit including a small diameter sheath heater with improved reliability is provided. The heater unit includes a first substrate having a first joint surface and a second substrate having a second joint surface being joined together, a groove arranged on at least one of the first joint surface or the second joint surface, and a sheath heater arranged inside the groove. The sheath heater includes a metal sheath, a heating wire having a band shape, the heating wire arranged with a space within the metal sheath so as to rotate with respect to an axis direction of the metal sheath, an insulating material arranged in the space, and connection terminals arranged at one end of the metal sheath, the connection terminals electrically connected with both ends of the heating wire respectively.

公开(公告)号：US20220157579A1

公开(公告)日：2022-05-19

申请号：US17592766

申请日：2022-02-04

Applicant: NHK SPRING CO., LTD.

Inventor： Naoya Kida ,  Arata Tatsumi ,  Kenji Sekiya ,  Naoya Aikawa ,  Masaya Takanashi

IPC: H01J37/32 ,  C23C16/46 ,  C23C16/458 ,  C23C16/44 ,  C23C14/34 ,  C23C14/50 ,  C23C14/24 ,  H05B3/28 ,  H05B1/02

Abstract: Disclosed is a stage including a shaft, a first supporting plate over the shaft, a heater arranged in a trench formed in the first supporting plate, and a gas-supplying tube arranged in the shaft and configured to blow a gas to the first supporting plate. The first supporting plate may have a disk shape, and a cross section of the gas-supplying tube parallel to a surface of the first supporting plate may overlap a center of the disk shape. The first supporting plate may be configured to block the gas so that the gas is not released to a chamber in which the stage is arranged.

公开(公告)号：US11477858B2

公开(公告)日：2022-10-18

申请号：US16653094

申请日：2019-10-15

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko Hanamachi ,  Kenji Sekiya ,  Daisuke Hashimoto ,  Satoshi Hirano ,  Masaru Takimoto ,  Go Takahara ,  Yoshihito Araki ,  Arata Tatsumi ,  Takashi Kawasaki ,  Yuki Toyama ,  Satoshi Anzai

IPC: H05B3/10 ,  H05B3/18 ,  H05B3/48 ,  H05B3/74 ,  H05B3/03

Abstract: A small diameter sheath heater with improved reliability is provided. The sheath heater according to one embodiment of the present invention includes a metal sheath, a heating wire having a band shape, the heating wire arranged with a gap within the metal sheath so as to rotate with respect to an axis direction of the metal sheath, an insulating material arranged in the gap, and connection terminals arranged at one end of the metal sheath, the connection terminals electrically connected with both ends of the heating wire respectively.

公开(公告)号：US12211710B2

公开(公告)日：2025-01-28

申请号：US17219316

申请日：2021-03-31

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko Hanamachi ,  Arata Tatsumi ,  Kenji Sekiya ,  Naoya Aikawa ,  Masaya Takanashi

IPC: H01J37/32 ,  C23C16/458 ,  C23C16/46 ,  H01J37/34 ,  H01L21/67 ,  H01L21/687 ,  H05B3/28

Abstract: Disclosed is a stage including a first supporting plate, a second supporting plate under the first supporting plate, a shaft under the second supporting plate and overlapping with the first supporting plate and the second supporting plate, and at least one sheath heater passing through the second supporting plate. The at least one sheath heater is arranged so as to extend on a first surface and a second surface which are parallel to an upper surface of the second supporting plate and which are different in distance from the first supporting plate from each other.

公开(公告)号：US12000737B2

公开(公告)日：2024-06-04

申请号：US17590780

申请日：2022-02-01

Applicant: NHK SPRING CO., LTD.

Inventor： Naoya Kida ,  Arata Tatsumi ,  Kenji Sekiya ,  Naoya Aikawa ,  Masaya Takanashi

IPC: G01K7/06 ,  G01K7/14 ,  H10N10/00 ,  H10N10/10 ,  H10N10/80 ,  G05D23/22

CPC classification number: G01K7/06 ,  H10N10/00 ,  H10N10/10 ,  H10N10/80 ,  G01K7/14 ,  G05D23/22

Abstract: A temperature sensor includes a block body, a first thermocouple, and a second thermocouple. The first thermocouple includes a first strand, a second strand, a first insulator surrounding the first strand and the second strand, and a first metal sheath surrounding the first insulator. The second thermocouple includes a third strand, a fourth strand, a second insulator surrounding the third strand and the fourth strand, and a second metal sheath surrounding the second insulator. An end portion of each of the first thermocouple and the second thermocouple is buried in the block body.