METHOD OF MANUFACTURING SEMICONDUCTOR ELEMENT
    2.
    发明申请
    METHOD OF MANUFACTURING SEMICONDUCTOR ELEMENT 审中-公开
    制造半导体元件的方法

    公开(公告)号:US20140004683A1

    公开(公告)日:2014-01-02

    申请号:US13924420

    申请日:2013-06-21

    Abstract: A method of manufacturing a semiconductor element is provided. The method includes the steps of: bonding a substrate for transferring and a functional layer that is formed on a substrate for forming a functional layer with a temporary fixing layer interposed therebetween; removing the substrate for forming a functional layer to expose the functional layer; bonding a final substrate to the exposed functional layer; and separating the temporary fixing layer and the substrate for transferring from the functional layer, wherein the temporary fixing layer has (A) a specific shear adhering strength or has (B) a specific weight loss rate.

    Abstract translation: 提供一种制造半导体元件的方法。 该方法包括以下步骤:将用于转印的基板和形成在用于形成功能层的基板上形成的功能层与其间插入临时固定层的方法相结合; 去除用于形成功能层的基板以暴露功能层; 将最终的基底粘合到暴露的功能层; 并且从功能层分离临时固定层和用于转移的基板,其中临时固定层具有(A)特定的剪切粘合强度或具有(B)比重损失率。

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