ACTIVE MONITORING OF MULTI-LASER SYSTEMS
    4.
    发明申请
    ACTIVE MONITORING OF MULTI-LASER SYSTEMS 审中-公开
    多激光系统的主动监测

    公开(公告)号:US20160209267A1

    公开(公告)日:2016-07-21

    申请号:US15079664

    申请日:2016-03-24

    申请人: nLIGHT, Inc.

    摘要: A monitoring system for a multi-laser module includes detectors corresponding to each laser and situated to receive a portion of the associated laser beam uncombined with other beams. Laser characteristics are measured and stored, and in operation are used to identify device failures. A comparator receives a reference value and compares the reference value with a current operational value. If the current value is less that the reference value, a possible failure is indicated. Signal cross-coupling among the detectors is also used to identify undesirable scattering that can be associated with surface contamination or device failure.

    摘要翻译: 用于多激光模块的监视系统包括对应于每个激光器并且被定位成接收未与其它光束组合的相关激光束的一部分的检测器。 激光特性被测量和存储,并且在操作中用于识别设备故障。 比较器接收参考值并将参考值与当前操作值进行比较。 如果当前值小于参考值,则指示可能的故障。 检测器之间的信号交叉耦合也用于识别可能与表面污染或器件故障相关的不期望的散射。

    Scanner drift compensation for laser material processing

    公开(公告)号:US11498155B2

    公开(公告)日:2022-11-15

    申请号:US16745242

    申请日:2020-01-16

    申请人: nLIGHT, Inc.

    IPC分类号: B23K26/03

    摘要: A scanned optical beam is divided so as to form a set of scanned subbeams. To compensate for scan errors, a portion of at least one subbeam is detected and a scan error estimated based on the detected portion. A beam scanner is controlled according to the estimated error so as to adjust a propagation direction of some or all of the set of scanned subbeams. The scanned subbeams with adjusted propagation directions are received by an f-theta lens and directed to a work piece. In typical examples, the portion of the at least one subbeam that is detected is obtained from the set of scanned subbeams prior to incidence of the scanned subbeams to the f-theta lens.

    Short pulse fiber laser for LTPS crystallization

    公开(公告)号:US10957541B2

    公开(公告)日:2021-03-23

    申请号:US16598210

    申请日:2019-10-10

    申请人: nLIGHT, Inc.

    摘要: Laser pulses from pulsed fiber lasers are directed to an amorphous silicon layer to produce a polysilicon layer comprising a disordered arrangement of crystalline regions by repeated melting and recrystallization. Laser pulse durations of about 0.5 to 5 ns at wavelength range between about 500 nm and 1000 nm, at repetition rates of 10 kHz to 10 MHz can be used. Line beam intensity uniformity can be improved by spectrally broadening the laser pulses by Raman scattering in a multimode fiber or by applying varying phase delays to different portions of a beam formed with the laser pulses to reduce beam coherence.

    SCANNER DRIFT COMPENSATION FOR LASER MATERIAL PROCESSING

    公开(公告)号:US20200147719A1

    公开(公告)日:2020-05-14

    申请号:US16745242

    申请日:2020-01-16

    申请人: nLIGHT, Inc.

    IPC分类号: B23K26/03

    摘要: A scanned optical beam is divided so as to form a set of scanned subbeams. To compensate for scan errors, a portion of at least one subbeam is detected and a scan error estimated based on the detected portion. A beam scanner is controlled according to the estimated error so as to adjust a propagation direction of some or all of the set of scanned subbeams. The scanned subbeams with adjusted propagation directions are received by an f-theta lens and directed to a work piece. In typical examples, the portion of the at least one subbeam that is detected is obtained from the set of scanned subbeams prior to incidence of the scanned subbeams to the f-theta lens.