公开(公告)号：US20240361253A1

公开(公告)日：2024-10-31

申请号：US18595292

申请日：2024-03-04

Applicant: NOVA LTD.

Inventor： Gilad BARAK ,  DANNY GROSSMAN ,  Dror SHAFIR ,  YOAV BERLATZKY ,  Yanir HAINICK

IPC: G01N21/956 ,  G01B9/02001 ,  G01B9/02015 ,  G01B9/02055 ,  G01B9/0209 ,  G01B11/06 ,  G01J3/453 ,  G01N21/88

CPC classification number: G01N21/956 ,  G01B9/02007 ,  G01B9/02032 ,  G01B9/02072 ,  G01B9/0209 ,  G01B11/0675 ,  G01J3/4535 ,  G01N21/8806 ,  G01B2210/56 ,  G01B2290/70 ,  G01N2021/8848

Abstract: A measurement system for use in measuring parameters of a patterned sample, the system including a broadband light source, an optical system configured as an interferometric system, a detection unit, and a control unit, where the interferometric system defines illumination and detection channels having a sample arm and a reference arm having a reference reflector, and is configured for inducing an optical path difference between the sample and reference arms, the detection unit for detecting a combined light beam formed by a light beam reflected from the reflector and a light beam propagating from a sample's support, and generating measured data indicative of spectral interference pattern formed by spectral interference signatures, and the control unit for receiving the measured data and applying a model-based processing to the spectral interference pattern for determining one or more parameters of the pattern in the sample.