OPTICAL MODULE MOUNTED WITH WDM FILTER
    2.
    发明申请
    OPTICAL MODULE MOUNTED WITH WDM FILTER 有权
    光学模块安装WDM过滤器

    公开(公告)号:US20100002987A1

    公开(公告)日:2010-01-07

    申请号:US12494890

    申请日:2009-06-30

    摘要: A filter element includes a first glass substrate having a pair of parallel surfaces and a band pass filter arranged on one of the parallel surfaces, a pair of single-crystal substrates (Si wafers) each including a primary surface formed with a depression having an inclined surface with respect to the primary surface occupying at least one half of the opening of the depression, and a second glass substrate having an optical element. The primary surfaces of the single-crystal substrate pair are bonded to a pair of the surfaces of the glass substrate. The depressions are faced through the glass substrate and surround the band pass filter. By this configuration, the filter element can be mass produced with a high accuracy and a low cost by the wafer-level process.

    摘要翻译: 过滤元件包括具有一对平行表面的第一玻璃基板和布置在一个平行表面上的带通滤波器,一对单晶基板(Si晶片),每个单晶基板包括形成有具有倾斜的凹陷的主表面 相对于占据凹部的开口的至少一半的主表面的表面,以及具有光学元件的第二玻璃基板。 单晶衬底对的主表面被接合到玻璃衬底的一对表面上。 凹陷面向玻璃基板并围绕带通滤光片。 通过这种构造,可以通过晶片级处理以高精度和低成本大量生产过滤元件。