公开(公告)号：US06588232B1

公开(公告)日：2003-07-08

申请号：US09867525

申请日：2001-05-31

申请人： Naoki Suzuki ,  Noriyuki Hirata ,  Masatoshi Shimizu ,  Takuo Higashijima ,  Hiroaki Takahashi ,  Yoshiaki Komatsubara

发明人： Naoki Suzuki ,  Noriyuki Hirata ,  Masatoshi Shimizu ,  Takuo Higashijima ,  Hiroaki Takahashi ,  Yoshiaki Komatsubara

IPC分类号： C03B2502

CPC分类号： H01L21/67161 ,  H01L21/67167 ,  H01L21/67173 ,  H01L21/67196 ,  H01L21/67236 ,  H01L21/67259 ,  H01L21/67727 ,  H01L21/67736 ,  H01L21/67745 ,  H01L21/67778 ,  H01L21/681 ,  H01L21/68707

摘要： A film forming device in a substrate manufacturing apparatus a stage section on which a cassette storing a plurality of glass substrates is mounted. A treatment section for subjecting the substrate to a predetermined treatment is arranged to oppose the stage section. A washing section for washing the substrate is arranged near the stage section and the treatment section and deviated from a space between the stage section and the treatment section in a second direction crossing a first direction passing through the stage section and the treatment section. A transfer robot is arranged between the stage section and the treatment section. The transfer robot transfers the substrate between the stage section, treatment section, and washing section and loads the substrate, washed in the washing section, directly into the treatment section.

摘要翻译： 一种基板制造装置中的成膜装置，安装有存储多个玻璃基板的盒的台部。 将基板进行预定处理的处理部配置成与台部相对。 用于洗涤基板的清洗部分布置在台阶部分和处理部分附近，并且在与通过台阶部分和处理部分的第一方向交叉的第二方向上偏离了台部分与处理部分之间的空间。 传送机器人布置在舞台部分和治疗部分之间。 传送机器人在台架部分，处理部分和清洗部分之间传送基板，并且将洗涤部分中洗涤的基板直接装入处理部分。

公开(公告)号：US06270619B1

公开(公告)日：2001-08-07

申请号：US09229581

申请日：1999-01-13

申请人： Naoki Suzuki ,  Noriyuki Hirata ,  Masatoshi Shimizu ,  Takuo Higashijima ,  Hiroaki Takahashi ,  Yoshiaki Komatsubara

发明人： Naoki Suzuki ,  Noriyuki Hirata ,  Masatoshi Shimizu ,  Takuo Higashijima ,  Hiroaki Takahashi ,  Yoshiaki Komatsubara

IPC分类号： H01L2100

CPC分类号： H01L21/67161 ,  H01L21/67167 ,  H01L21/67173 ,  H01L21/67196 ,  H01L21/67236 ,  H01L21/67259 ,  H01L21/67727 ,  H01L21/67736 ,  H01L21/67745 ,  H01L21/67778 ,  H01L21/681 ,  H01L21/68707

摘要： A film forming device in a substrate manufacturing apparatus a stage section on which a cassette storing a plurality of glass substrates is mounted. A treatment section for subjecting the substrate to a predetermined treatment is arranged to oppose the stage section. A washing section for washing the substrate is arranged near the stage section and the treatment section and deviated from a space between the stage section and the treatment section in a second direction crossing a first direction passing through the stage section and the treatment section. A transfer robot is arranged between the stage section and the treatment section. The transfer robot transfers the substrate between the stage section, treatment section, and washing section and loads the substrate, washed in the washing section, directly into the treatment section.

摘要翻译： 一种基板制造装置中的成膜装置，安装有存储多个玻璃基板的盒的台部。 将基板进行预定处理的处理部配置成与台部相对。 用于洗涤基板的清洗部分布置在台阶部分和处理部分附近，并且在与通过台阶部分和处理部分的第一方向交叉的第二方向上偏离了台部分与处理部分之间的空间。 传送机器人布置在舞台部分和治疗部分之间。 传送机器人在台架部分，处理部分和清洗部分之间传送基板，并且将洗涤部分中洗涤的基板直接装入处理部分。