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公开(公告)号：US20100053603A1
公开(公告)日：2010-03-04
申请号：US12588877
申请日：2009-10-30
IPC分类号： G01N21/88
CPC分类号： G01B11/30 , G01N21/9503 , H01L22/12
摘要： A surface inspection apparatus includes an illuminating part illuminating an edge part of a substrate from a direction deviated from a direction of normal line of the edge part by an angle being predetermined, the edge part being inclined and the substrate being an inspection target, an imaging optics forming an image from a diffracted light from a captured area of the edge part as a dark field image, an imaging part capturing the dark field image obtained by the imaging optics, and a detecting part detecting a defect based on whether or not a striated image appears on the dark field image corresponding to the edge part obtained by the imaging part.
摘要翻译： 表面检查装置包括：照射部，其从与边缘部的法线方向偏离预定角度的方向照射基板的边缘部，所述边缘部倾斜，基板为检查对象，成像 从作为暗视野图像的边缘部分的捕获区域的衍射光形成图像的光学器件，捕获由成像光学部件获得的暗视场图像的成像部件，以及基于条纹的检测部件检测缺陷的检测部件 图像出现在对应于由成像部分获得的边缘部分的暗视场图像上。
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公开(公告)号：US07800748B2
公开(公告)日：2010-09-21
申请号：US12292010
申请日：2008-11-10
申请人： Naoshi Sakaguchi
发明人： Naoshi Sakaguchi
IPC分类号： G01N21/00
CPC分类号： G01N21/9506 , G01N21/9503 , G01N2021/8825
摘要： An edge inspection apparatus includes: an illumination means 5 that illuminates an edge of a flat subject with diffused light from a position other than directly above or directly below a surface or a reverse surface of the subject; an imaging means 4 that takes an image of the edge from a position in a direction perpendicular to a plane parallel to the surface or the reverse surface of the subject at the same time; and an inspection means 7 that inspects conditions of a portion of the edge, which is inclined with respect to the surface or the reverse surface using the image obtained by the imaging means.
摘要翻译： 边缘检查装置包括：照射装置5，其利用来自除了被摄体的表面或反面之前或正下方的位置的扩散光照亮平面物体的边缘; 成像装置4，其从垂直于与被检体的表面或反面的平面平行的方向的位置同时拍摄边缘的图像; 以及检查装置7，其使用由成像装置获得的图像来检查相对于表面或反面的倾斜的边缘的一部分的状况。
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公开(公告)号：US10828694B2
公开(公告)日：2020-11-10
申请号：US15776191
申请日：2016-11-18
申请人： Daisuke Serino , Fumio Kawahara , Yuzo Matsuda , Tetsushi Yamaguchi , Hiroshi Kawahara , Sakayuki Ishikawa , Takuto Takahashi , Naoshi Sakaguchi , Hiroyuki Kayaba , Takahiro Michimoto
发明人： Daisuke Serino , Fumio Kawahara , Yuzo Matsuda , Tetsushi Yamaguchi , Hiroshi Kawahara , Sakayuki Ishikawa , Takuto Takahashi , Naoshi Sakaguchi , Hiroyuki Kayaba , Takahiro Michimoto
摘要： A casting device in which refrigerant is pressure-fed to a cooling passage formed in a die, leakage of refrigerant in the die can be reliably detected in a short time without a significant modification applied to the conventional device. A casting device includes a pressure-feed device that pressure-feeds refrigerant to a cooling passage formed in a die, and a release agent coating applicator that applies a release agent to the die, and further includes a unit that mixes a fluorescent agent into the refrigerant (fluorescent agent tank), a unit that irradiates the die surface of the die with black light while the refrigerant containing the fluorescent agent mixed therein is pressure-fed to the die, and an imaging device that captures an image of the die surface. The imaging device is integrally assembled with the release agent coating applicator.
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公开(公告)号：US20110109738A1
公开(公告)日：2011-05-12
申请号：US12916062
申请日：2010-10-29
IPC分类号： H04N7/18
CPC分类号： G01N21/9501 , G01B11/02 , G01N21/9503 , H01L21/67288 , H01L22/12
摘要： An observation device (1) for observing a portion near the end of a wafer (10), comprising an imaging section (40) for imaging an image near the end of a wafer (10) from the extending direction of the wafer (10), and an image processing section (50) for detecting the edge of a film formed on the surface of the wafer (10) is further provided, as an illumination section for illuminating a portion near the end of a wafer (10), with an epi-illumination source (48) for illuminating a portion near the end of a wafer (10) via an observation optical system (41), and a diffusion illumination source (31) arranged to face the surface of the wafer (10) and illuminate a portion near the end of a wafer (10) using diffused light.
摘要翻译： 一种用于观察晶片端部附近的部分的观察装置（1），包括：用于从晶片（10）的延伸方向靠近晶片（10）的端部附近成像的成像部分（40） 还设置有用于检测形成在晶片（10）的表面上的膜的边缘的图像处理部（50），作为用于照亮晶片（10）端部附近的部分的照明部分， 用于经由观察光学系统（41）照射晶片（10）的端部附近的部分的外照射源（48）和布置成面对晶片（10）表面的扩散照明源（31） 使用漫射光在晶片（10）的端部附近的部分。
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公开(公告)号：US20090086196A1
公开(公告)日：2009-04-02
申请号：US12292010
申请日：2008-11-10
申请人： Naoshi Sakaguchi
发明人： Naoshi Sakaguchi
IPC分类号： G01N21/88
CPC分类号： G01N21/9506 , G01N21/9503 , G01N2021/8825
摘要： An edge inspection apparatus includes: an illumination means 5 that illuminates an edge of a flat subject with diffused light from a position other than directly above or directly below a surface or a reverse surface of the subject; an imaging means 4 that takes an image of the edge from a position in a direction perpendicular to a plane parallel to the surface or the reverse surface of the subject at the same time; and an inspection means 7 that inspects conditions of a portion of the edge, which is inclined with respect to the surface or the reverse surface using the image obtained by the imaging means.
摘要翻译： 边缘检查装置包括：照射装置5，其利用来自除了被摄体的表面或反面之前或正下方的位置的扩散光照亮平面物体的边缘; 成像装置4，其从垂直于与被检体的表面或反面的平面平行的方向的位置同时拍摄边缘的图像; 以及检查装置7，其使用由成像装置获得的图像来检查相对于表面或反面的倾斜的边缘的一部分的状况。
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