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公开(公告)号：US06809448B2
公开(公告)日：2004-10-26
申请号：US10258542
申请日：2002-10-25
申请人： Natsushi Suzuki , Hisashi Nara , Shunsuke Yoshioka , Toshimitsu Barada , Atsushi Ooyama , Toshiharu Nakazawa , Shinichi Sekiguchi , Hiroyuki Shinozaki
发明人： Natsushi Suzuki , Hisashi Nara , Shunsuke Yoshioka , Toshimitsu Barada , Atsushi Ooyama , Toshiharu Nakazawa , Shinichi Sekiguchi , Hiroyuki Shinozaki
IPC分类号： H02K502
CPC分类号： F16C32/0444 , F16C32/0459 , F16C32/0465 , F16C32/047 , F16C2300/42 , H01S3/0385 , H01S3/225 , H02K3/44 , H02K5/128 , H02K7/09
摘要： An excimer laser apparatus in which deterioration of the laser gas in the laser container can be suppressed, and damage to the magnetic bearings caused by the laser gas can be suppressed, and which can be reduced in size and operated efficiently, and has low power consumption. Each electromagnet (stator) (7-1) of a magnetic bearing (7) for supporting a rotary shaft (4) of a circulation fan 3 includes excitation coils. Each of the coils is arranged as one unit by embedding a coil body in a ceramic or glass type hardened material which is non-magnetic and has corrosion resistance against a laser gas. The excitation coils are attached to magnetic poles. Alternatively, coil wires (108b) of a radial magnetic bearing (108) can be isolated from a corrosive atmosphere by means of a separation wall (124) while projecting portions of cores (108b) extend through the separation wall (124) and are exposed toward a magnetic bearing rotor (108f).
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公开(公告)号：US06326712B1
公开(公告)日：2001-12-04
申请号：US09643950
申请日：2000-08-23
申请人： Toshiharu Nakazawa , Toshimitsu Barada , Atsushi Ooyama , Masafumi Inoue , Shinichi Sekiguchi , Hiroyuki Shinozaki
发明人： Toshiharu Nakazawa , Toshimitsu Barada , Atsushi Ooyama , Masafumi Inoue , Shinichi Sekiguchi , Hiroyuki Shinozaki
IPC分类号： F16C3204
CPC分类号： F16C32/0451 , F16C32/047 , F16C2300/42 , F16C2360/45
摘要： A magnetic bearing device has an electromagnet for levitating an object under electromagnetic forces, a displacement sensor for detecting the displacement of the levitated object, a controller for supplying a signal to the displacement sensor through a cable and a current to the electromagnet through a cable, and a protective plate of nonmagnetic metal material disposed between the displacement sensor and the levitated object. The controller includes a levitation control system having a noise removing filter for preventing an abnormal signal caused by the protective plate from being applied to the displacement sensor.
摘要翻译： 磁性轴承装置具有用于在电磁力下悬浮物体的电磁体，用于检测悬浮物体的位移的位移传感器，用于通过电缆将信号通过电缆和电流提供给电磁体的控制器， 以及设置在位移传感器和悬浮物体之间的非磁性金属材料的保护板。 该控制器包括具有用于防止由保护板引起的异常信号施加到位移传感器的噪声去除滤波器的悬浮控制系统。
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公开(公告)号：US06455966B1
公开(公告)日：2002-09-24
申请号：US09660292
申请日：2000-09-12
IPC分类号： H02K709
CPC分类号： F16C32/0444 , F16C32/0457
摘要： A magnetic bearing device for use with a motor-combined structure having magnetic bearings supporting a rotatable shaft out of contact therewith and a motor for rotating the rotatable shaft. A common power supply supplies electric power to the magnetic bearings and the motor, and a motor drive power supply limits variations of the electric power supplied to the motor to at most a predetermined level with respect to variations of electric power supplied to the common power supply.
摘要翻译： 一种用于具有支撑与其不接触的可旋转轴的磁性轴承的电动机组合结构的磁性轴承装置和用于旋转可旋转轴的电动机。 公共电源向磁性轴承和电动机供给电力，并且电动机驱动电源相对于向公共电源供给的电力的变化而将提供给电动机的电力的变化限制在至多预定水平 。
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公开(公告)号：US06519273B2
公开(公告)日：2003-02-11
申请号：US09785304
申请日：2001-02-20
申请人： Shinichi Sekiguchi , Hiroyuki Shinozaki , Shunichi Aiyoshizawa , Toshimitsu Barada , Atsushi Ooyama
发明人： Shinichi Sekiguchi , Hiroyuki Shinozaki , Shunichi Aiyoshizawa , Toshimitsu Barada , Atsushi Ooyama
IPC分类号： H01S322
CPC分类号： F16C32/0465 , F16C32/0459 , F16C32/0468 , F16C32/047 , F16C2300/42
摘要： A magnetic bearing enables to rotatably support a levitated body non-contactingly disposed in a hermetically sealed container filled with a gaseous process substance of a corrosive nature, while without contaminating the gaseous environment and suffering from corrosion. The magnetic bearing has an electromagnet for supporting a levitated body, a displacement sensor for detecting a levitated position of the levitated body, and a controller for supplying signals and excitation currents to the displacement sensor and the electromagnet through cables. An electromagnet target of the magnetic bearing that generates variations in magnetic fields due to rotation of the levitated body, is constructed of a single piece of ferromagnetic material, and is provided with an electrical insulation structure oriented parallel to magnetic fluxes generated by the electromagnet.
摘要翻译： 磁性轴承能够可旋转地支撑非接触地设置在填充有腐蚀性气体处理物质的气密密封容器中的悬浮体，同时不污染气体环境并遭受腐蚀。 磁性轴承具有用于支撑悬浮体的电磁体，用于检测悬浮体的悬浮位置的位移传感器，以及通过电缆向位移传感器和电磁体提供信号和激励电流的控制器。 磁悬浮轴承的电磁铁靶由于悬浮体的旋转产生磁场的变化，由单片铁磁材料构成，并具有与电磁铁产生的磁通平行取向的电绝缘结构。
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公开(公告)号：US06464472B1
公开(公告)日：2002-10-15
申请号：US09622367
申请日：2000-08-16
申请人： Shinichi Sekiguchi , Hiroyuki Shinozaki , Toshimitsu Barada , Toshiharu Nakazawa , Takeshi Kawamura
发明人： Shinichi Sekiguchi , Hiroyuki Shinozaki , Toshimitsu Barada , Toshiharu Nakazawa , Takeshi Kawamura
IPC分类号： F04B1700
CPC分类号： F04D29/058 , F04D25/06 , F16C32/047 , F16C32/0474 , F16C2300/42 , F16C2360/44
摘要： A circulation fan apparatus including a hermetic vessel 1 containing a corrosive process gas therein, and a circulation fan 2 installed in the hermetic vessel, rotors 2-1, 2-2 of the circulation fan are rotatably supported by bearings, wherein the bearings comprises control-type radial magnetic bearings 4, 5 and at least control-type axial magnetic bearing 6, 7, displacement sensor targets 4-1, 5-1, 6-1, and 7-1 and rotor-side magnetic poles 4-2, 5-2, 6-2, and 7-2 of radial magnetic bearings 4 and 5 and axial magnetic bearings 6 and 7 are fixed to the rotors 2-1 and 2-2 of the circulation fan 2 and are disposed in the hermetic space communicating with the hermetic vessel, and displacement sensors 4-3, 5-3, 6-3, and 7-3 and stator-side magnetic poles 4-4, 5-4, 6-4, and 7-4 opposing the displacement sensor targets and rotor-side magnetic poles are disposed outside of the hermetic vessel with cans 14, 15, 17, and 18 interposed therebetween, whereby even when the circulation fan 2 is rotated at a high speed and under a high load, the process gas is not contaminated, ensuring maintenance-free operation, and furthermore, an installation space can be reduced.
摘要翻译： 一种循环风扇装置，包括其中含有腐蚀性工艺气体的密封容器1和安装在密封容器中的循环风扇2，循环风扇的转子2-1,2-2由轴承可旋转地支撑，其中轴承包括控制 型径向磁轴承4,5和至少控制型轴向磁轴承6,7位移传感器目标4-1,5-1,6-1和7-1以及转子侧磁极4-2， 径向磁轴承4和5以及轴向磁轴承6和7的5-2,6-2和7-2固定在循环风扇2的转子2-1和2-2上，并设置在密封空间 与密封容器连通，以及位移传感器4-3,5-3,6-3和7-3以及与位移相反的定子侧磁极4-4,5-4,6-4和7-4 传感器靶和转子侧磁极设置在密封容器的外侧，其间插入有罐14,15,17和18，由此即使循环风扇2是旋转 在高速和高负载下，处理气体不被污染，确保免维护操作，此外，可以减少安装空间。
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公开(公告)号：US06366039B1
公开(公告)日：2002-04-02
申请号：US09553466
申请日：2000-04-19
IPC分类号： H01S302
CPC分类号： F16C32/047 , H01S3/036 , H01S3/225
摘要： An excimer laser device which is capable of keeping the rotational speed of a fan constant and uniformizing a laser gas flow between main discharge electrodes even when the pressure of a laser gas filled in a casing varies. The excimer laser device includes a casing filled with a laser gas; a pair of main discharge electrodes disposed in the casing for producing an electric discharge to discharge-pump the laser gas at a high repetition rate; a fan for producing a high-speed laser gas flow between the main discharge electrodes; bearings, the fan having a rotatable shaft rotatably supported by the bearings; a motor for actuating the fan; a rotational speed detecting device for detecting a rotational speed of the fan; and control device for controlling at least one of a voltage and a frequency to be supplied to the motor based on the rotational speed of the fan detected by the rotational speed detecting device, thereby to control the rotational speed of the fan at a constant level.
摘要翻译： 即使在填充在壳体中的激光气体的压力变化的情况下，能够使风扇的旋转速度恒定并使主放电电极之间的激光气流均匀化的准分子激光装置。 准分子激光装置包括填充有激光气体的壳体; 一对主放电电极，设置在壳体中，用于产生放电，以高重复率对激光气体进行泵浦; 用于在主放电电极之间产生高速激光气流的风扇; 所述风扇具有由所述轴承可旋转地支撑的可旋转轴; 用于致动风扇的电动机; 用于检测风扇的转速的转速检测装置; 以及控制装置，用于根据由转速检测装置检测到的风扇的转速来控制要提供给电动机的电压和频率中的至少一个，从而将风扇的转速控制在恒定水平。
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公开(公告)号：US06539043B1
公开(公告)日：2003-03-25
申请号：US09856138
申请日：2001-05-29
IPC分类号： H01S322
CPC分类号： F16C32/047 , H01S3/036 , H01S3/225
摘要： The present invention provides a discharge-pumped excimer laser device which includes a laser chamber filled with a laser gas that is deteriorated to a small extent, magnetic bearings and a motor that are resistant to the entry of dust particles, and parts that are held in contact with the laser gas and suffer little damage, and has a long service life. The discharge-pumped excimer laser device according to the present invention has a laser chamber (1) filled with a laserigas and housing at least a pair of main discharge electrodes (2, 2) for producing an electric discharge to be able to oscillate a laser beam, housings (6, 7) joined to opposite sides of the laser chamber (1), a cross flow fan (3) having opposite ends rotatably supported by magnetic bearings (8, 9, 10, 11) accommodated in the housings (6, 7), for producing a high-speed laser gas flow between the main discharge electrodes (2, 2), a motor (12) accommodated in the housing (7) for rotating the cross flow fan (3), laser gas flow passages (61, 62) extending through gaps between rotor side and stator side of the magnetic bearings (8, 9, 10, 11) and the motor (12) over an axial entire length of the housings (6, 7), and communicating with an interior of the laser chamber (1), a laser gas introduction passage (60) extending from the interior of the laser chamber (1) and communicating with the laser gas flow passages (61, 62), and filters (20, 20) disposed in the laser gas introduction passage (60).
摘要翻译： 本发明提供了一种排出泵浦的准分子激光装置，其包括填充有少量劣化的激光气体的激光室，磁性轴承和抵抗灰尘颗粒进入的电动机以及保持在 与激光气体接触，损伤小，使用寿命长。本发明的排出泵浦准分子激光装置具有填充有激光的激光室（1），并容纳至少一对主放电电极 （2,2），用于产生能够振荡激光束的放电，与激光室（1）的相对侧接合的壳体（6,7），具有相对端部的交叉流动风扇（3），其可旋转地支撑在 容纳在壳体（6,7）中的磁性轴承（8,9,10,11），用于在主放电电极（2,2）之间产生高速激光气流，容纳在壳体 （7），用于旋转横流风扇（3），激光气体 在所述壳体（6,7）的轴向整个长度上延伸穿过所述磁性轴承（8,9,10,11）和所述电动机（12）的转子侧和定子侧之间的间隙的流动通道（61,62），以及 与所述激光室（1）的内部连通，从所述激光室（1）的内部延伸并与所述激光气体流路（61,62）连通的激光气体导入通路（60） 20）设置在激光气体导入通路（60）中。
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公开(公告)号：US06603787B1
公开(公告)日：2003-08-05
申请号：US09576208
申请日：2000-05-23
IPC分类号： H01S3225
CPC分类号： F16C32/047 , H01S3/03 , H01S3/036 , H01S3/225
摘要： A discharge-pumped excimer laser device has a casing, a pair main discharge electrodes, a cross-flow fan for producing a high-speed laser gas flow between the main discharge electrodes, the cross-flow fan having a rotatable shaft projecting from opposite ends thereof, magnetic bearings, the rotatable shaft being rotatably supported by the bearings, protective bearings for supporting the rotatable shaft when the magnetic bearings are not in operation, and a motor for actuating the cross-flow fan. The magnetic bearings include radial magnetic bearings disposed on the opposite ends of the rotatable shaft. One of the radial magnetic bearings which is disposed closely to the motor has a bearing rigidity greater than the bearing rigidity of the magnetic bearing that is disposed remotely from the motor.
摘要翻译： 排出泵浦准分子激光装置具有壳体，一对主放电电极，用于在主放电电极之间产生高速激光气流的横流风扇，所述横流风扇具有从相对端突出的可旋转轴 磁轴承，可旋转轴由轴承可旋转地支撑，当磁轴承不运行时用于支撑可旋转轴的保护轴承，以及用于致动横流风扇的电动机。 磁性轴承包括设置在可旋转轴的相对端上的径向磁轴承。 靠近电机设置的径向磁轴承之一具有大于远离电动机的磁性轴承的轴承刚性的轴承刚度。
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公开(公告)号：US06785314B2
公开(公告)日：2004-08-31
申请号：US09876032
申请日：2001-06-08
申请人： Atushi Ooyama , Shinichi Sekiguchi , Hiroyuki Shinozaki , Toshimitsu Barada , Toshiharu Nakazawa
发明人： Atushi Ooyama , Shinichi Sekiguchi , Hiroyuki Shinozaki , Toshimitsu Barada , Toshiharu Nakazawa
IPC分类号： H01S309
CPC分类号： F16C32/0444 , F16C32/0489 , H01S3/036 , H01S3/225
摘要： There is provided an electric discharge gas laser comprising a housing, a rotating fan, a bearing device and a control. The housing contains a laser gas. The rotating fan is provided in the housing to circulate the gas in the housing. The bearing device magnetically supports a rotating shaft. The bearing device is provided with a sensor device comprising a sensor and a signal processor. The sensor senses the position of the rotating shaft to generate signals indicating the position of the rotating shaft. The signal processor receives and processes the signals delivered from the sensor to output processed signals. The control is separated from the bearing device and is functionally associated with the bearing device to receive the processed signal from the sensor device for controlling the bearing device on the basis of the processed signals.
摘要翻译： 提供一种放电气体激光器，其包括壳体，旋转风扇，轴承装置和控制装置。 外壳包含激光气体。 旋转风扇设置在壳体中以使气体在壳体中循环。 轴承装置磁性地支撑旋转轴。 轴承装置设置有包括传感器和信号处理器的传感器装置。 传感器感测旋转轴的位置以产生指示旋转轴的位置的信号。 信号处理器接收并处理从传感器传送的信号以输出处理的信号。 该控制与轴承装置分离，并且在功能上与轴承装置相关联，以接收来自传感器装置的经处理的信号，用于根据经处理的信号控制轴承装置。
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公开(公告)号：US06404794B1
公开(公告)日：2002-06-11
申请号：US09676779
申请日：2000-10-02
IPC分类号： H01S322
CPC分类号： F16C32/0444 , F16C32/047 , F16C32/0493 , F16C32/0497 , F16C2380/26 , H01S3/036 , H01S3/225 , H02K7/09
摘要： An excimer laser apparatus comprises a container sealing a laser gas including a halogen gas therein, a pair of discharge electrodes disposed in the container for inducing an electric discharge capable of oscillating a laser light, and a circulating fan with a shaft for producing a high-speed laser gas stream between a pair of the discharge electrodes. Both ends of the shaft are rotatably supported by rotor-stator mechanisms, or one end of the shaft is rotatably supported by a rotor-stator mechanism, and the other end of the shaft is supported by a magnetic bearing. The rotor-stator mechanism comprises a rotor attached to the shaft of the circulating fan, a stator provided at a position opposed to the rotor, an electric motor winding provided in the stator for applying torque to the rotor, and a position control winding provided in the stator for producing a magnetic force to levitate and support the rotor.
摘要翻译： 准分子激光装置包括：密封包含卤素气体的激光气体的容器，设置在容器内的一对放电电极，用于引起能够振荡激光的放电;以及循环风扇， 一对放电电极之间的高速激光气流。 轴的两端由转子 - 定子机构可旋转地支撑，或者轴的一端由转子 - 定子机构可旋转地支撑，并且轴的另一端由磁轴承支撑。 转子 - 定子机构包括附接到循环风扇的轴的转子，设置在与转子相对的位置的定子，设置在定子中的用于向转子施加扭矩的电动机绕组以及设置在转子中的位置控制绕组 用于产生用于悬浮和支撑转子的磁力的定子。
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