公开(公告)号：US20030058426A1

公开(公告)日：2003-03-27

申请号：US09962963

申请日：2001-09-24

申请人： Nikon Corporation

发明人： Douglas C. Watson ,  Alton Hugh Phillips

IPC分类号： G03B027/60

CPC分类号： G03F7/70808 ,  G03B27/60 ,  G03F7/70833 ,  G03F7/709

摘要： A sliding seal system for providing a fluid seal that is slidable in two linear and one rotational degrees-of-freedom and that is flexible in one linear and two rotational degrees-of-freedom is disclosed. The sliding seal system includes a support member having a working surface arranged to provide a seal interface with a sealing surface on a first body. A flexible membrane is attached to the support member and coupled to a second body. A fluid supply system is provided to deliver a fluid to a region between the working surface of the support member and the sealing surface of the first body to provide buoyant flotation to the seal support member at the working surface. In a preferred embodiment, a fluid exhaust system is also provided to remove the fluid delivered by the fluid supply system. One particularly useful application of the described sliding seal system is in a photolithography system to provide a seal between an exposure apparatus and a wafer chamber.

公开(公告)号：US20020039516A1

公开(公告)日：2002-04-04

申请号：US09865968

申请日：2001-05-24

申请人： Nikon Corporation

发明人： Alton Hugh Phillips ,  Douglas Chandler Watson

IPC分类号： F16C011/00 ,  F16B012/44

CPC分类号： F16C11/12 ,  G03F7/70716 ,  H01J37/20 ,  H01J2237/0458 ,  H01J2237/20278 ,  H01J2237/3175 ,  Y10T403/32008 ,  Y10T403/32049 ,  Y10T403/32106 ,  Y10T403/45

摘要： A three-degree of motion joint comprising a translational joint, a first support member, a first rotational joint, and a second rotational joint. The translational joint allows a first component and a second component to move with respect to each other along the z-axis. The translational joint includes a first translational flexural member that connects a first member and a base member. The first support member is attached to the base member. The first rotational joint allows the first component and the second component to be moved with respect to each other in the nullx direction. The first rotational joint includes a first rotational flexural member that is attached to the first member. The second rotational joint allows the first component and second component to move with respect to each other in the nully direction. The second rotational joint includes a second rotational flexural member attached to the first support member.

摘要翻译： 一种三角运动关节，包括平移关节，第一支撑构件，第一旋转接头和第二旋转接头。 平移关节允许第一部件和第二部件沿z轴相对于彼此移动。 平移关节包括连接第一构件和基部构件的第一平移弯曲构件。 第一支撑构件附接到基座构件。 第一旋转接头允许第一部件和第二部件在＆lt; x＆gt; x方向上相对于彼此移动。 第一旋转接头包括附接到第一构件的第一旋转弯曲构件。 第二旋转接头允许第一部件和第二部件在＆amp; Y方向上相对于彼此移动。 第二旋转接头包括附接到第一支撑构件的第二旋转弯曲构件。

公开(公告)号：US20040004702A1

公开(公告)日：2004-01-08

申请号：US10611275

申请日：2003-06-30

申请人： Nikon Corporation

发明人： Alton Hugh Phillips ,  Hiroshi Sugimoto

IPC分类号： G03B027/42

CPC分类号： G03F7/709 ,  G03B17/045

摘要： A double bellows seal comprising a plurality of rings including first and second end rings, a middle ring, a first bellows, and a second bellows. The first bellows is formed from a flexible material that is sealingly connected between the first end ring and the middle ring, and it has a twist bias in a first rotational direction relative to an axis of the rings. The second bellows is formed from a flexible material that is sealingly connected between the second end ring and the middle ring. The second bellows has a twist bias in a second rotational direction relative to an axis of the rings that is opposite that of the first rotational direction.

摘要翻译： 包括多个环的双波纹管密封件，包括第一和第二端环，中间环，第一波纹管和第二波纹管。 第一波纹管由密封地连接在第一端环和中间环之间的柔性材料形成，并且其相对于环的轴线在第一旋转方向上具有扭曲偏压。 第二波纹管由密封地连接在第二端环和中间环之间的柔性材料形成。 第二波纹管相对于与第一旋转方向相反的环的轴线在第二旋转方向上具有扭曲偏压。

公开(公告)号：US20030035095A1

公开(公告)日：2003-02-20

申请号：US09932828

申请日：2001-08-16

申请人： Nikon Corporation

发明人： Alton Hugh Phillips ,  Hiroshi Sugimoto

IPC分类号： G03B027/58

CPC分类号： G03F7/709 ,  G03B17/045

摘要： A double bellows seal comprising a plurality of rings including first and second end rings, a middle ring, a first bellows, and a second bellows. The first bellows is formed from a flexible material that is sealingly connected between the first end ring and the middle ring, and it has a twist bias in a first rotational direction relative to an axis of the rings. The second bellows is formed from a flexible material that is sealingly connected between the second end ring and the middle ring. The second bellows has a twist bias in a second rotational direction relative to an axis of the rings that is opposite that of the first rotational direction.

摘要翻译： 包括多个环的双波纹管密封件，包括第一和第二端环，中间环，第一波纹管和第二波纹管。 第一波纹管由密封地连接在第一端环和中间环之间的柔性材料形成，并且其相对于环的轴线在第一旋转方向上具有扭曲偏压。 第二波纹管由密封地连接在第二端环和中间环之间的柔性材料形成。 第二波纹管相对于与第一旋转方向相反的环的轴线在第二旋转方向上具有扭曲偏压。