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1.发明授权公开(公告)号：US08823919B2
公开(公告)日：2014-09-02
申请号：US12946566
申请日：2010-11-15
申请人： Nina Vladimirovna Dziomkina , Roelof Frederik De Graaf , Marcus Adrianus Van De Kerkhof , Martinus Hendrikus Antonius Leenders , Paulus Martinus Maria Liebregts , Gerardus Martinus Antonius De Rooij , Martijn Houben , Vijay Kumar Badam , Johanna Antoinette Maria Sondag-Huethorst , Niek Elout De Kruijf
发明人： Nina Vladimirovna Dziomkina , Roelof Frederik De Graaf , Marcus Adrianus Van De Kerkhof , Martinus Hendrikus Antonius Leenders , Paulus Martinus Maria Liebregts , Gerardus Martinus Antonius De Rooij , Martijn Houben , Vijay Kumar Badam , Johanna Antoinette Maria Sondag-Huethorst , Niek Elout De Kruijf
CPC分类号： G03F7/70916 , B32B2307/71 , B32B2307/73 , B32B2405/00 , C09J7/385 , G03F7/70341 , G03F7/7095 , Y10T428/28 , Y10T428/2843 , Y10T428/2848 , Y10T428/2852
摘要： A member is provided to prevent immersion liquid ingress to a gap between components or to adhere to at least one component to provide a surface to a feature of an immersion system. The member has a plastic sealing portion that is adhered to the component(s). The plastic sealing portion is opaque to DUV radiation. It may be resistant to degradation through exposure to DUV radiation. It may have a liquid phobic coating or property.
摘要翻译： 提供一个构件以防止浸入液体进入部件之间的间隙或粘附到至少一个部件以提供浸入系统特征的表面。 该部件具有粘附到部件上的塑料密封部分。 塑料密封部分对于DUV辐射是不透明的。 它可能通过暴露于DUV辐射来抵抗降解。 它可能具有液体恐怖涂层或性质。
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2.发明授权公开(公告)号：US08659741B2
公开(公告)日：2014-02-25
申请号：US12946618
申请日：2010-11-15
申请人： Roelof Frederik De Graaf , Marcus Adrianus Van De Kerkhof , Martinus Hendrikus Antonius Leenders , Paulus Martinus Maria Liebregts , Gerardus Martinus Antonius De Rooij , Martijn Houben , Nina Vladimirovna Dziomkina , Johanna Antoinette Maria Sondag-Huethorst , Niek Elout De Kruijf , Vijay Kumar Badam
发明人： Roelof Frederik De Graaf , Marcus Adrianus Van De Kerkhof , Martinus Hendrikus Antonius Leenders , Paulus Martinus Maria Liebregts , Gerardus Martinus Antonius De Rooij , Martijn Houben , Nina Vladimirovna Dziomkina , Johanna Antoinette Maria Sondag-Huethorst , Niek Elout De Kruijf , Vijay Kumar Badam
CPC分类号： C09J7/0217 , B32B2307/546 , B32B2307/56 , B32B2307/71 , B32B2307/73 , B32B2405/00 , C09J7/21 , C09J7/385 , G03F7/70341 , G03F7/70808 , G03F7/70916 , G03F7/7095 , Y10T428/28 , Y10T428/2843 , Y10T428/2848 , Y10T428/2852
摘要： A sealing member is provided to prevent immersion liquid ingress to a gap between components. The sealing member has a plastic or polymer sealing portion that is adhered to the components forming the gap being sealed. The sealing member is constructed so as to reduce the force-coupling, in particular the time-related force-coupling, between the components being sealed.
摘要翻译： 提供密封构件以防止浸入液体进入部件之间的间隙。 密封构件具有粘附到形成被密封的间隙的部件的塑料或聚合物密封部分。 密封构件被构造成减少被密封的部件之间的力耦合，特别是与时间有关的力耦合。
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3.发明申请公开(公告)号：US20110116060A1
公开(公告)日：2011-05-19
申请号：US12946566
申请日：2010-11-15
申请人： Nina Vladimirovna Dziomkina , Roelof Frederik De Graaf , Marcus Adrianus Van De Kerkhof , Martinus Hendrikus Antonius Leenders , Paulus Martinus Maria Liebregts , Gerardus Martinus Antonius De Rooij , Martijn Houben , Vijay Kumar Badam , Johanna Antoinette Maria Sondag-Huethorst , Niek Elout De Kruijf
发明人： Nina Vladimirovna Dziomkina , Roelof Frederik De Graaf , Marcus Adrianus Van De Kerkhof , Martinus Hendrikus Antonius Leenders , Paulus Martinus Maria Liebregts , Gerardus Martinus Antonius De Rooij , Martijn Houben , Vijay Kumar Badam , Johanna Antoinette Maria Sondag-Huethorst , Niek Elout De Kruijf
CPC分类号： G03F7/70916 , B32B2307/71 , B32B2307/73 , B32B2405/00 , C09J7/385 , G03F7/70341 , G03F7/7095 , Y10T428/28 , Y10T428/2843 , Y10T428/2848 , Y10T428/2852
摘要： A member is provided to prevent immersion liquid ingress to a gap between components or to adhere to at least one component to provide a surface to a feature of an immersion system. The member has a plastic sealing portion that is adhered to the component(s). The plastic sealing portion is opaque to DUV radiation. It may be resistant to degradation through exposure to DUV radiation. It may have a liquid phobic coating or property.
摘要翻译： 提供一个构件以防止浸入液体进入部件之间的间隙或粘附到至少一个部件以提供浸入系统特征的表面。 该部件具有粘附到部件上的塑料密封部分。 塑料密封部分对于DUV辐射是不透明的。 它可能通过暴露于DUV辐射来抵抗降解。 它可能具有液体恐怖涂层或性质。
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4.发明申请公开(公告)号：US20110199592A1
公开(公告)日：2011-08-18
申请号：US12946618
申请日：2010-11-15
申请人： Roelof Frederik De Graff , Marcus Adrianus Van De Kerkhof , Martinus Hendrikus Antonius Leenders , Paulus Martinus Maria Liebregts , Gerardus Martinus Antonius De Rooij , Martijn Houben , Nina Vladimirovna Dziomkina , Johanna Antoinette Maria Sondag-Huethorst , Niek Elout De Kruijf , Vijay Kumar Badam
发明人： Roelof Frederik De Graff , Marcus Adrianus Van De Kerkhof , Martinus Hendrikus Antonius Leenders , Paulus Martinus Maria Liebregts , Gerardus Martinus Antonius De Rooij , Martijn Houben , Nina Vladimirovna Dziomkina , Johanna Antoinette Maria Sondag-Huethorst , Niek Elout De Kruijf , Vijay Kumar Badam
CPC分类号： C09J7/0217 , B32B2307/546 , B32B2307/56 , B32B2307/71 , B32B2307/73 , B32B2405/00 , C09J7/21 , C09J7/385 , G03F7/70341 , G03F7/70808 , G03F7/70916 , G03F7/7095 , Y10T428/28 , Y10T428/2843 , Y10T428/2848 , Y10T428/2852
摘要： A sealing member is provided to prevent immersion liquid ingress to a gap between components. The sealing member has a plastic or polymer sealing portion that is adhered to the components forming the gap being sealed. The sealing member is constructed so as to reduce the force-coupling, in particular the time-related force-coupling, between the components being sealed.
摘要翻译： 提供密封构件以防止浸入液体进入部件之间的间隙。 密封构件具有粘附到形成被密封的间隙的部件的塑料或聚合物密封部分。 密封构件被构造成减少被密封的部件之间的力耦合，特别是与时间有关的力耦合。
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