公开(公告)号：US20050219674A1

公开(公告)日：2005-10-06

申请号：US11135518

申请日：2005-05-24

申请人： Nobuaki Asai ,  Shoji Yamada

发明人： Nobuaki Asai ,  Shoji Yamada

IPC分类号： G02B26/08 ,  G02B26/10

CPC分类号： G02B26/0833 ,  G02B26/0841 ,  G02B26/105

摘要： An optical scanning apparatus for optical scan that oscillates at least partially an oscillating body having a reflective mirror portion, to thereby modulate a direction in which the reflective mirror portion causes incident light thereon to be reflected off, is disclosed, the oscillating body comprising: a first spring portion, coupled to the reflective mirror portion, and excited to generate a torsional oscillation of the first spring portion; and a plurality of second spring portions, coupled to the first spring portion, and coupled to a fixed frame portion of the oscillating body in a bifurcation manner with a bifurcation spacing of the plurality of second spring portions being larger than a width of the first spring portion, the plurality of second spring portions being excited to generate flexural and torsional oscillations thereof.

摘要翻译： 公开了一种用于光学扫描的光学扫描装置，其至少部分地振荡具有反射镜部分的振荡体，从而调制反射镜部分使入射光在其上被反射的方向，该摆动体包括： 第一弹簧部分，耦合到反射镜部分，并被激发以产生第一弹簧部分的扭转振荡; 以及耦合到所述第一弹簧部分并且以分叉方式联接到所述振动体的固定框架部分的多个第二弹簧部分，所述多个第二弹簧部分的分叉间隔大于所述第一弹簧的宽度 多个第二弹簧部分被激励以产生其弯曲和扭转振荡。

公开(公告)号：US07446911B2

公开(公告)日：2008-11-04

申请号：US11135518

申请日：2005-05-24

申请人： Nobuaki Asai ,  Shoji Yamada

发明人： Nobuaki Asai ,  Shoji Yamada

IPC分类号： H04N1/04 ,  H04N1/46 ,  G02B26/08

CPC分类号： G02B26/0833 ,  G02B26/0841 ,  G02B26/105

摘要： An optical scanning apparatus for optical scan that oscillates at least partially an oscillating body having a reflective mirror portion, to thereby modulate a direction in which the reflective mirror portion causes incident light thereon to be reflected off, is disclosed, the oscillating body comprising: a first spring portion, coupled to the reflective mirror portion, and excited to generate a torsional oscillation of the first spring portion; and a plurality of second spring portions, coupled to the first spring portion, and coupled to a fixed frame portion of the oscillating body in a bifurcation manner with a bifurcation spacing of the plurality of second spring portions being larger than a width of the first spring portion, the plurality of second spring portions being excited to generate flexural and torsional oscillations thereof.

摘要翻译： 公开了一种用于光学扫描的光学扫描装置，其至少部分地振荡具有反射镜部分的振荡体，从而调制反射镜部分使入射光在其上被反射的方向，该摆动体包括： 第一弹簧部分，耦合到反射镜部分，并被激发以产生第一弹簧部分的扭转振荡; 以及耦合到所述第一弹簧部分并且以分叉方式联接到所述振动体的固定框架部分的多个第二弹簧部分，所述多个第二弹簧部分的分叉间隔大于所述第一弹簧的宽度 多个第二弹簧部分被激励以产生其弯曲和扭转振荡。

公开(公告)号：US07639413B2

公开(公告)日：2009-12-29

申请号：US11526734

申请日：2006-09-26

申请人： Yasuo Nishikawa ,  Nobuaki Asai

发明人： Yasuo Nishikawa ,  Nobuaki Asai

IPC分类号： G02B26/08

CPC分类号： G02B7/1821 ,  B81B3/0094 ,  B81B2203/0109 ,  G02B26/105 ,  H04N1/113

摘要： An apparatus for use in optical scanning is disclosed which vibrates at least a part of a vibrating body having a light-reflective surface, to thereby allow light, upon entry, to be reflected from the light-reflective surface in varying directions. The vibrating body includes: (a) a reflective mirror having the light-reflective surface; and (b) an integral spring extending from the reflective mirror and being excited to generate at least a torsional vibration. The vibrating body has vibrational characteristics in which whether or not a resonant frequency of the torsional vibration and a resonant frequency of a disturbing vibration are equal to each other depends upon a shape-defining parameter for defining a shape of the integral spring extending lengthwise. The shape-defining parameter is pre-set to fall within a range allowing the resonant frequency of the torsional vibration and the resonant frequency of the disturbing vibration to be different from each other.

摘要翻译： 公开了一种用于光学扫描的装置，其振动具有光反射表面的振动体的至少一部分，从而允许入射时的光在变化的方向上从光反射表面反射。 振动体包括：（a）具有光反射表面的反射镜; 和（b）从反射镜延伸并被激发以产生至少扭转振动的整体弹簧。 振动体具有振动特性，其中扭转振动的共振频率和干扰振动的共振频率是否彼此相等取决于用于限定纵向延伸的整体弹簧的形状的形状限定参数。 形状定义参数被预先设定为允许扭转振动的共振频率和扰动振动的共振频率彼此不同的范围。

公开(公告)号：US07554715B2

公开(公告)日：2009-06-30

申请号：US11605953

申请日：2006-11-30

申请人： Nobuaki Asai ,  Yasuo Nishikawa

发明人： Nobuaki Asai ,  Yasuo Nishikawa

IPC分类号： G02B26/00

CPC分类号： H04N3/08 ,  H04N9/3129

摘要： A mirror driver is disclosed which includes: a mirror having a reflective surface reflecting incident light thereon; a pair of mechanical beams diametrically opposed to each other with the mirror inbetween as viewed along a reference line parallel to the reflective surface; an actuator imparting bending motions to the pair of beams, respectively; and a pair of joints integrally coupling the pair of beams and the mirror to each other, with less rigidity to resist deformation than rigidity of the pair of beams and the mirror, for allowing conversion of the bending motions of the pair of beams into a rigid-body motion of the mirror without inducing an angular oscillation about the reference line.

摘要翻译： 公开了一种镜驱动器，其包括：具有反射入射光的反射表面的反射镜; 一对机械梁，其沿着与反射表面平行的参考线观察，彼此径向相对，反射镜在其间; 致动器分别向所述一对梁施加弯曲运动; 以及一对接头，将一对梁和反射镜彼此整体地联接，具有较小的刚性以抵抗变形，而不是一对梁和反射镜的刚度，用于允许将该对梁的弯曲运动转换成刚性 - 不会引起围绕参考线的角振荡的镜子运动。

公开(公告)号：US20090079054A1

公开(公告)日：2009-03-26

申请号：US12232688

申请日：2008-09-23

申请人： Nobuaki Asai

发明人： Nobuaki Asai

IPC分类号： H01L23/26 ,  H01L21/50

CPC分类号： H01L23/26 ,  B81B7/0038 ,  B81B7/007 ,  H01L23/055 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/13091 ,  H01L2924/1461 ,  H01L2924/00014 ,  H01L2924/00

摘要： A semiconductor device includes a package defining an enclosed inner space, a semiconductor chip having a movable portion on one side and housed in the closed inner space of the package, and a catching member located in the closed inner space of the package to catch and hold a foreign matter suspended in an atmosphere in the closed inner space of the package.

摘要翻译： 半导体器件包括限定封闭的内部空间的封装，在一侧具有可移动部分并且容纳在封装的封闭内部空间中的半导体芯片，以及位于封装的封闭内部空间中的捕获构件，以捕获和保持 悬浮在包装的封闭内部空间中的气氛中的异物。

公开(公告)号：US07793404B2

公开(公告)日：2010-09-14

申请号：US11727840

申请日：2007-03-28

申请人： Kenichi Murakami ,  Nobuaki Asai

发明人： Kenichi Murakami ,  Nobuaki Asai

IPC分类号： H04R31/00

CPC分类号： H03H9/02259 ,  G02B26/0858 ,  H03H3/0077 ,  H03H9/2494 ,  H03H2009/02519 ,  Y10T29/42 ,  Y10T29/435 ,  Y10T29/49004 ,  Y10T29/49005 ,  Y10T29/4908

摘要： A resonant-oscillating-device fabrication method for integrally forming a structure comprising a support, a beam vibratably extending from the support, and an oscillating element which is supported by the beam so as to oscillate in resonance with the vibration of the beam at a desired resonant frequency, by using a substrate. The resonant-oscillating-device fabrication method having a thickness measurement step of measuring the thickness of the substrate, an etching condition determination step of determining conditions of etching a portion forming the beam in the substrate to provide the desired resonant frequency, in accordance with the thickness of the substrate measured in the thickness measurement step, and an etching step of etching the substrate in accordance with the etching conditions.

摘要翻译： 一种用于整体地形成结构的共振振荡器件制造方法，该结构包括支撑件，从支撑件可振动地延伸的梁和由梁支撑的振荡元件，以便以期望的波束与梁的振动共振地振荡 谐振频率。 所述谐振振荡器件制造方法具有测量所述衬底厚度的厚度测量步骤，蚀刻条件确定步骤，根据所述蚀刻条件确定步骤，确定蚀刻形成所述衬底中的所述光束的部分以提供期望的谐振频率的条件 在厚度测量步骤中测量的衬底的厚度，以及根据蚀刻条件蚀刻衬底的蚀刻步骤。

公开(公告)号：US20090141238A1

公开(公告)日：2009-06-04

申请号：US11605953

申请日：2006-11-30

申请人： Nobuaki Asai ,  Yasuo Nishikawa

发明人： Nobuaki Asai ,  Yasuo Nishikawa

IPC分类号： G02B26/10 ,  A61B3/10

CPC分类号： H04N3/08 ,  H04N9/3129

摘要： A mirror driver is disclosed which includes: a mirror having a reflective surface reflecting incident light thereon; a pair of mechanical beams diametrically opposed to each other with the mirror inbetween as viewed along a reference line parallel to the reflective surface; an actuator imparting bending motions to the pair of beams, respectively; and a pair of joints integrally coupling the pair of beams and the mirror to each other, with less rigidity to resist deformation than rigidity of the pair of beams and the mirror, for allowing conversion of the bending motions of the pair of beams into a rigid-body motion of the mirror without inducing an angular oscillation about the reference line.

摘要翻译： 公开了一种镜驱动器，其包括：具有反射入射光的反射表面的反射镜; 一对机械梁，其沿着与反射表面平行的参考线观察，彼此径向相对，反射镜在其间; 致动器分别向所述一对梁施加弯曲运动; 以及一对接头，将一对梁和反射镜彼此整体地联接，具有较小的刚性以抵抗变形，而不是一对梁和反射镜的刚度，用于允许将该对梁的弯曲运动转换成刚性 - 不会引起围绕参考线的角振荡的镜子运动。

公开(公告)号：US20080068696A1

公开(公告)日：2008-03-20

申请号：US11898597

申请日：2007-09-13

申请人： Yasuo Nishikawa ,  Nobuaki Asai

发明人： Yasuo Nishikawa ,  Nobuaki Asai

IPC分类号： G02B26/08

CPC分类号： G02B26/0858 ,  G02B26/0825

摘要： A light reflecting device includes an elastic plate portion configured to be elastically deformable, the elastic plate portion having a first surface and a second surface that is an opposite surface of the first surface, a mirror formed on the first surface of the elastic plate portion, at least one supporting portion configured to support the elastic plate portion to form a recessed area at a side of the second surface, and at least one strain-generating element provided on the second surface in the recessed area to bend the elastic plate portion in response to deformation thereof.

摘要翻译： 光反射装置包括弹性板部，其构造成可弹性变形，弹性板部分具有第一表面和与第一表面相反的表面的第二表面，形成在弹性板部分的第一表面上的反射镜， 至少一个支撑部分，其构造成支撑所述弹性板部分以在所述第二表面的侧面处形成凹陷区域;以及至少一个应变产生元件，设置在所述凹陷区域中的所述第二表面上以响应于弹性板部分弯曲 变形。

公开(公告)号：US07325736B2

公开(公告)日：2008-02-05

申请号：US11441236

申请日：2006-05-26

申请人： Nobuaki Asai ,  Mitsuyoshi Watanabe

发明人： Nobuaki Asai ,  Mitsuyoshi Watanabe

IPC分类号： G06K7/10

CPC分类号： G02B27/017 ,  G02B26/101 ,  G02B2027/0156

摘要： An optical scanner is disclosed which includes: a first scanning device having a first mirror portion in which a first reflective surface is formed, the first scanning device scanning in a first direction, light which impinges obliquely on the first reflective surface, by oscillatory rotation of the first mirror portion about a first oscillation axi; and a second scanning device having a second mirror portion in which a second reflective surface is formed so as to be generally in parallel to the first reflective surface in a non-active state of the optical scanner, the second scanning device scanning in a second direction intersecting with respect to the first direction, the light exiting the first reflective surface and then entering obliquely the second reflective surface, by oscillatory rotation of the second mirror portion about a second oscillation axis intersecting with respect to the first oscillation axis. The first oscillation axis is oriented substantially parallel to a direction in which the light enters the first reflective surface, when the optical scanner is viewed in a direction perpendicular to the first and second reflective surfaces.

摘要翻译： 公开了一种光学扫描仪，其包括：第一扫描装置，具有第一反射镜部分，第一反射部分形成有第一反射表面，第一扫描装置沿第一方向扫描，倾斜地照射在第一反射表面上的光，通过振荡旋转 关于第一振荡轴的第一镜部分; 以及具有第二反射镜部分的第二扫描装置，其中形成第二反射表面以在所述光学扫描器的非活动状态下大致平行于所述第一反射表面，所述第二扫描装置沿第二方向扫描 通过第二反射镜部分围绕与第一振荡轴相交的第二振荡轴的振荡旋转，离开第一反射表面然后倾斜地进入第二反射表面的光相交于第一方向。 当沿垂直于第一和第二反射表面的方向观察光学扫描器时，第一振荡轴线基本上平行于光进入第一反射表面的方向。

公开(公告)号：US20070070481A1

公开(公告)日：2007-03-29

申请号：US11526734

申请日：2006-09-26

申请人： Yasuo Nishikawa ,  Nobuaki Asai

发明人： Yasuo Nishikawa ,  Nobuaki Asai

IPC分类号： G02B26/08

CPC分类号： G02B7/1821 ,  B81B3/0094 ,  B81B2203/0109 ,  G02B26/105 ,  H04N1/113

摘要： An apparatus for use in optical scanning is disclosed which vibrates at least a part of a vibrating body having a light-reflective surface, to thereby allow light, upon entry, to be reflected from the light-reflective surface in varying directions. The vibrating body includes: (a) a reflective mirror having the light-reflective surface; and (b) an integral spring extending from the reflective mirror and being excited to generate at least a torsional vibration. The vibrating body has vibrational characteristics in which whether or not a resonant frequency of the torsional vibration and a resonant frequency of a disturbing vibration are equal to each other depends upon a shape-defining parameter for defining a shape of the integral spring extending lengthwise. The shape-defining parameter is pre-set to fall within a range allowing the resonant frequency of the torsional vibration and the resonant frequency of the disturbing vibration to be different from each other.

摘要翻译： 公开了一种用于光学扫描的装置，其振动具有光反射表面的振动体的至少一部分，从而允许入射时的光在变化的方向上从光反射表面反射。 振动体包括：（a）具有光反射表面的反射镜; 和（b）从反射镜延伸并被激发以产生至少扭转振动的整体弹簧。 振动体具有振动特性，其中扭转振动的共振频率和干扰振动的共振频率是否彼此相等取决于用于限定纵向延伸的整体弹簧的形状的形状限定参数。 形状定义参数被预先设定为允许扭转振动的共振频率和扰动振动的共振频率彼此不同的范围。