公开(公告)号：US09444403B2

公开(公告)日：2016-09-13

申请号：US14836354

申请日：2015-08-26

申请人： SEIKO EPSON CORPORATION

发明人： Akinori Yamada

IPC分类号： H03B5/30 ,  H03H9/10 ,  H03H9/24 ,  H03H9/02

CPC分类号： H03B5/30 ,  H03H9/1057 ,  H03H9/2431 ,  H03H9/2473 ,  H03H9/2484 ,  H03H9/2494 ,  H03H2009/02299 ,  H03H2009/02503

摘要： A resonation element includes a basal portion, resonating arms extending out in a Y-axis direction from the basal portion, and a vibration substrate, formed of single crystal silicon, in which a Z-axis direction is set to a thickness direction, and is configured such that the resonating arms are flexurally vibrated in an XY in-plane direction. In addition, when resonation frequencies of the resonating arms are set to F [kHz], widths of the resonating arms are set to W [μm], and lengths of the resonating arms are set to L [μm], at least one expression of the following Expression (1) and the following Expression (2) is satisfied. W

公开(公告)号：US06701785B2

公开(公告)日：2004-03-09

申请号：US09893145

申请日：2001-06-26

申请人： Stuart J. Knowles ,  Robert H. Moore

发明人： Stuart J. Knowles ,  Robert H. Moore

IPC分类号： G01P904

CPC分类号： G01C19/5607 ,  H03H9/2494 ,  Y10S29/901 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49156

摘要： Tuning fork and method in which a pair of elongated tines having front and rear surfaces are disposed symmetrically about an axis, and balancing masses on the front surface of one tine and on the rear surface of the other tine are trimmed to reduce quadrature error and also to maintain mass balance between the tines.

摘要翻译： 调整叉和方法，其中具有前表面和后表面的一对细长尖齿围绕轴线对称设置，并且平衡一个齿的前表面和另一个齿的后表面上的质量以减小正交误差，并且还 以保持齿间的质量平衡。

公开(公告)号：US20160072474A1

公开(公告)日：2016-03-10

申请号：US14836354

申请日：2015-08-26

申请人： SEIKO EPSON CORPORATION

发明人： Akinori YAMADA

IPC分类号： H03H9/24 ,  H03B5/30

CPC分类号： H03B5/30 ,  H03H9/1057 ,  H03H9/2431 ,  H03H9/2473 ,  H03H9/2484 ,  H03H9/2494 ,  H03H2009/02299 ,  H03H2009/02503

摘要： A resonation element includes a basal portion, resonating arms extending out in a Y-axis direction from the basal portion, and a vibration substrate, formed of single crystal silicon, in which a Z-axis direction is set to a thickness direction, and is configured such that the resonating arms are flexurally vibrated in an XY in-plane direction. In addition, when resonation frequencies of the resonating arms are set to F [kHz], widths of the resonating arms are set to W [μm], and lengths of the resonating arms are set to L [μm], at least one expression of the following Expression (1) and the following Expression (2) is satisfied. W

摘要翻译： 谐振元件包括基部，从基部向Y轴方向延伸的谐振臂，以及Z轴方向设定为厚度方向的单晶硅形成的振动基板，为 被配置为使得谐振臂在XY面内方向上弯曲地振动。 此外，当谐振臂的谐振频率设定为F [kHz]时，谐振臂的宽度被设定为W [μm]，并且谐振臂的长度被设定为L [μm]，至少一个表达式 满足以下表达式（1）和以下表达式（2）。 W <10A×Log（F）+ B（1）其中，A为-5.006×10-1，B为2.451，L <10C×Log（F）+ D（2）其中，C为-7.507× 10-1，D为4.268。

公开(公告)号：US08723611B2

公开(公告)日：2014-05-13

申请号：US13032106

申请日：2011-02-22

申请人： Ville Kaajakari

发明人： Ville Kaajakari

IPC分类号： H03B5/30

CPC分类号： G01C19/5621 ,  H03H9/02275 ,  H03H9/02338 ,  H03H9/2484 ,  H03H9/2494

摘要： The object of the invention is to provide an improved structure for a microelectromechanical (MEMS) resonator. According to a first aspect of the invention, the resonator structure in accordance with the invention has a characteristic frequency of oscillation in combination with a given mechanical amplitude, whereby to set said mechanical amplitude, in the resonator structure, by way anchoring at an anchor point located at a given point of the resonator structure substrate, a first element is adapted oscillatory and a second element is adapted oscillatory in such a manner that at least one of said first element and of said second element are arranged to oscillate synchronously with regard to said anchor point, whereby the location of said anchor point is selected to be substantially within the joint projection defined by the dimensions of said first and said second element.

摘要翻译： 本发明的目的是提供一种用于微机电（MEMS）谐振器的改进的结构。 根据本发明的第一方面，根据本发明的谐振器结构具有与给定的机械振幅相结合的振荡的特征频率，由此通过在锚定点处锚固来在谐振器结构中设定所述机械振幅 位于谐振器结构基板的给定点处，第一元件适于振荡，并且第二元件适于以使得所述第一元件和所述第二元件中的至少一个被布置成相对于所述第二元件同步振荡的方式振荡 由此所述锚点的位置被选择为基本上在由所述第一和所述第二元件的尺寸限定的联合突起内。

公开(公告)号：US20110261659A1

公开(公告)日：2011-10-27

申请号：US13177898

申请日：2011-07-07

申请人： Junya Fukuda

发明人： Junya Fukuda

IPC分类号： G04C11/02 ,  H03B5/36 ,  H01L23/08 ,  H01L41/053

CPC分类号： H01L21/52 ,  H01L21/50 ,  H01L21/78 ,  H01L23/055 ,  H01L27/14618 ,  H01L27/14632 ,  H01L51/56 ,  H01L2224/13 ,  H03H3/02 ,  H03H3/04 ,  H03H9/1021 ,  H03H9/21 ,  H03H9/2494 ,  H03H2003/026 ,  H03H2003/0492 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49126 ,  Y10T29/49798

摘要： A method of manufacturing packages having contents sealed therein, including: a step of forming cavities in a plurality of package forming areas on a first wafer; a step of bonding the first wafer and a second wafer while arranging the contents in the cavities; and a step of irradiating a bonded wafer member with a laser and separating the packages into pieces, characterized in that dummy cavities are formed on an outside of the package forming area in an outermost periphery of the first wafer in the cavity forming step.

摘要翻译： 一种制造密封在其中的内容物的方法，包括：在第一晶片上的多个封装形成区域中形成空腔的步骤; 在将所述内容物排列在所述空腔中的同时，接合所述第一晶片和第二晶片的步骤; 以及利用激光照射接合的晶片构件并将封装分离成片的步骤，其特征在于，在所述空腔形成步骤中，在所述第一晶片的最外周的所述封装形成区域的外侧形成虚设空腔。

公开(公告)号：US20070180672A1

公开(公告)日：2007-08-09

申请号：US11727840

申请日：2007-03-28

申请人： Kenichi Murakami ,  Nobuaki Asai

发明人： Kenichi Murakami ,  Nobuaki Asai

IPC分类号： H04R17/00

CPC分类号： H03H9/02259 ,  G02B26/0858 ,  H03H3/0077 ,  H03H9/2494 ,  H03H2009/02519 ,  Y10T29/42 ,  Y10T29/435 ,  Y10T29/49004 ,  Y10T29/49005 ,  Y10T29/4908

摘要： There is provided a resonant-oscillating-device fabrication method comprising a thickness measurement step of measuring a thickness of a substrate, a piezoelectric-layer formation condition determination step of determining conditions of forming a piezoelectric layer to bring frequency of resonant oscillation of an oscillating element to a desired resonant frequency in accordance with the thickness of the substrate measured in the thickness measurement step, and a piezoelectric-element formation step of forming the piezoelectric element in accordance with the piezoelectric-layer formation conditions determined in the piezoelectric-layer formation condition determination step.

摘要翻译： 提供了一种谐振振荡器件制造方法，包括测量衬底厚度的厚度测量步骤，压电层形成条件确定步骤，确定形成压电层的条件以使振荡元件的谐振振荡频率 根据在厚度测量步骤中测量的衬底的厚度，达到期望的谐振频率;以及压电元件形成步骤，根据压电层形成条件测定中确定的压电层形成条件形成压电元件 步。

公开(公告)号：US08918971B2

公开(公告)日：2014-12-30

申请号：US13177898

申请日：2011-07-07

申请人： Junya Fukuda

发明人： Junya Fukuda

IPC分类号： H01L21/52 ,  H03H3/02 ,  H01L21/78 ,  H01L21/50 ,  H03H3/04 ,  H03H9/10 ,  H01L27/146 ,  H01L51/56 ,  H01L23/055 ,  H03H9/21 ,  H03H9/24

CPC分类号： H01L21/52 ,  H01L21/50 ,  H01L21/78 ,  H01L23/055 ,  H01L27/14618 ,  H01L27/14632 ,  H01L51/56 ,  H01L2224/13 ,  H03H3/02 ,  H03H3/04 ,  H03H9/1021 ,  H03H9/21 ,  H03H9/2494 ,  H03H2003/026 ,  H03H2003/0492 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49126 ,  Y10T29/49798

摘要： A method of manufacturing packages having contents sealed therein, including: a step of forming cavities in a plurality of package forming areas on a first wafer; a step of bonding the first wafer and a second wafer while arranging the contents in the cavities; and a step of irradiating a bonded wafer member with a laser and separating the packages into pieces, characterized in that dummy cavities are formed on an outside of the package forming area in an outermost periphery of the first wafer in the cavity forming step.

摘要翻译： 一种制造密封在其中的内容物的方法，包括：在第一晶片上的多个封装形成区域中形成空腔的步骤; 在将所述内容物排列在所述空腔中的同时，接合所述第一晶片和第二晶片的步骤; 以及利用激光照射接合的晶片构件并将封装分离成片的步骤，其特征在于，在所述空腔形成步骤中，在所述第一晶片的最外周的所述封装形成区域的外侧形成虚设空腔。

公开(公告)号：US07523537B1

公开(公告)日：2009-04-28

申请号：US09615294

申请日：2000-07-13

申请人： Stuart J. Knowles ,  Robert H. Moore

发明人： Stuart J. Knowles ,  Robert H. Moore

IPC分类号： H04R7/02

CPC分类号： G01C19/5607 ,  H03H9/2494 ,  Y10S29/901 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49156

摘要： Tuning fork and method in which a pair of elongated tines having front and rear surfaces are disposed symmetrically about an axis, and balancing masses on the front surface of one tine and on the rear surface of the other tine are trimmed to reduce quadrature error and also to maintain mass balance between the tines.

摘要翻译： 调整叉和方法，其中具有前表面和后表面的一对细长尖齿围绕轴线对称设置，并且平衡一个齿的前表面和另一个齿的后表面上的质量以减小正交误差，并且还 以保持齿间的质量平衡。

公开(公告)号：US20020021059A1

公开(公告)日：2002-02-21

申请号：US09893145

申请日：2001-06-26

申请人： BEI Technologies, Inc.

发明人： Stuart J. Knowles ,  Robert H. Moore

IPC分类号： H01L041/04

CPC分类号： G01C19/5607 ,  H03H9/2494 ,  Y10S29/901 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49156

摘要： Tuning fork and method in which a pair of elongated tines having front and rear surfaces are disposed symmetrically about an axis, and balancing masses on the front surface of one tine and on the rear surface of the other tine are trimmed to reduce quadrature error and also to maintain mass balance between the tines.

摘要翻译： 调整叉和方法，其中具有前表面和后表面的一对细长尖齿围绕轴线对称设置，并且平衡一个齿的前表面和另一个齿的后表面上的质量以减小正交误差，并且还 以保持齿间的质量平衡。

公开(公告)号：US20110210800A1

公开(公告)日：2011-09-01

申请号：US13032106

申请日：2011-02-22

申请人： VILLE KAAJAKARI

发明人： VILLE KAAJAKARI

IPC分类号： H03B1/00

CPC分类号： G01C19/5621 ,  H03H9/02275 ,  H03H9/02338 ,  H03H9/2484 ,  H03H9/2494

摘要： The object of the invention is to provide an improved structure for a microelectromechanical (MEMS) resonator. According to a first aspect of the invention, the resonator structure in accordance with the invention has a characteristic frequency of oscillation in combination with a given mechanical amplitude, whereby to set said mechanical amplitude, in the resonator structure, by way anchoring at an anchor point located at a given point of the resonator structure substrate, a first element is adapted oscillatory and a second element is adapted oscillatory in such a manner that at least one of said first element and of said second element are arranged to oscillate synchronously with regard to said anchor point, whereby the location of said anchor point is selected to be substantially within the joint projection defined by the dimensions of said first and said second element.

摘要翻译： 本发明的目的是提供一种用于微机电（MEMS）谐振器的改进的结构。 根据本发明的第一方面，根据本发明的谐振器结构具有与给定的机械振幅相结合的振荡的特征频率，由此通过在锚定点处锚固来在谐振器结构中设定所述机械振幅 位于谐振器结构基板的给定点处，第一元件适于振荡，并且第二元件适于以使得所述第一元件和所述第二元件中的至少一个被布置成相对于所述第二元件同步振荡的方式振荡 由此所述锚点的位置被选择为基本上在由所述第一和所述第二元件的尺寸限定的联合突起内。