公开(公告)号：US4393333A

公开(公告)日：1983-07-12

申请号：US215064

申请日：1980-12-10

申请人： Noriyuki Sakudo ,  Katsumi Tokiguchi ,  Hidemi Koike ,  Ichiro Kanomata ,  Humihiko Nakashima

发明人： Noriyuki Sakudo ,  Katsumi Tokiguchi ,  Hidemi Koike ,  Ichiro Kanomata ,  Humihiko Nakashima

IPC分类号： H01J27/18 ,  H01J37/08 ,  H01J7/24 ,  H05B31/26

CPC分类号： H01J37/08 ,  H01J27/18

摘要： A microwave plasma ion source according to the present invention is designed such that a microwave electric field and a magnetic field are applied to a discharge gas introduced into a discharge region, to form plasma, from which ions are extracted. The above magnetic field is formed by means of an electromagnet provided on the low-voltage side of ion extraction electrodes and a high-permeability member provided in that section which is on the side of a waveguide and which permits the microwaves to be propagated freely.

摘要翻译： 根据本发明的微波等离子体离子源被设计成使微波电场和磁场被施加到引入到放电区域的放电气体，形成从其中提取离子的等离子体。 上述磁场通过设置在离子提取电极的低压侧的电磁体和设置在该部分中的位于波导侧的高导磁性部件形成，并允许微波自由传播。