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公开(公告)号：US10983055B2
公开(公告)日：2021-04-20
申请号：US16409985
申请日：2019-05-13
申请人： OLYMPUS CORPORATION
发明人： Yoshimasa Suzuki , Mayumi Odaira
摘要： A sample observation apparatus includes a light source unit, an illumination optical system, a detection optical system, a light detection element, and an image processing apparatus. The scanning unit relatively moves the light spot and the sample. An optical member is disposed. The illumination optical system and the detection optical system are disposed such that an image of a pupil of the illumination optical system is formed at a pupil position of the detection optical system. The image of the pupil of the illumination optical system is decentered relative to a pupil of the detection optical system due to refraction caused by the sample. The illumination optical system, the detection optical system, and the optical member are configured such that quantity of light passing through the pupil of the detection optical system changes by decentering.
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公开(公告)号：US10539411B2
公开(公告)日：2020-01-21
申请号：US16406103
申请日：2019-05-08
申请人： OLYMPUS CORPORATION
发明人： Mayumi Odaira , Yoshimasa Suzuki
摘要： A sample shape measuring apparatus includes a light source unit, an illumination optical system, a detection optical system, a light detection element, and a processing apparatus. A scanning unit relatively moves a light spot and the sample. Illumination light applied to the sample is transmitted through the sample, and light transmitted through the sample is incident on the detection optical system. The light detection element receives light. The illumination optical system or the detection optical system includes an optical member. The processing apparatus obtains a quantity of light based on a received light, calculates at least one of a difference and a ratio between the quantity of light and a reference quantity of light, calculates an amount of tilt at a surface of the sample, and calculates a shape of the sample from the amount of tilt.
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公开(公告)号：US10697764B2
公开(公告)日：2020-06-30
申请号：US16410145
申请日：2019-05-13
申请人： OLYMPUS CORPORATION
发明人： Mayumi Odaira , Yoshimasa Suzuki
摘要： A sample shape measuring method includes a step of preparing illumination light passing through a predetermined illumination region, a step of applying the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set so as to include an optical axis at a pupil position of an illumination optical system. Light transmitted through the sample is incident on the observation optical system. The predetermined processing step includes a step of receiving light emerged from the observation optical system, a step of obtaining a quantity of light of the received light, a step of calculating a difference or a ratio between the quantity of light and a reference quantity of light, and a step of calculating an amount of tilt in a surface of the sample from the difference or the ratio.
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公开(公告)号：US10458781B2
公开(公告)日：2019-10-29
申请号：US16028936
申请日：2018-07-06
申请人： OLYMPUS CORPORATION
发明人： Mayumi Odaira , Yoshimasa Suzuki , Kazuo Kajitani , Hisashi Ode
摘要： A sample shape measuring method includes a step of preparing illumination light passing through a predetermined illumination region, a step of applying the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set such that the illumination light is applied to part of inside of a pupil and outside of the pupil, a light intensity of the illumination light incident on the predetermined illumination region differs between a center and a periphery. The predetermined processing step includes a step of receiving light transmitted through the observation optical system, a step of obtaining a quantity of light of the received light, a step of calculating a difference or a ratio between the quantity of light and a reference quantity of light, and a step of calculating an amount of tilt in a surface of the sample from the difference or the ratio.
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公开(公告)号：US11150459B2
公开(公告)日：2021-10-19
申请号：US16598040
申请日：2019-10-10
申请人： OLYMPUS CORPORATION
发明人： Mayumi Odaira
摘要： A sample observation device includes a light source, an illumination optical system, an observation optical system, a detector, a processor, and a drive controller. The illumination optical system includes a condenser lens and an aperture, and the observation optical system includes an objective lens and a light attenuation member. The light attenuation member and the aperture are conjugate. The aperture includes an aperture region, and the light attenuation member includes a light attenuation region. A size of the aperture region, a position of the aperture region, a size of the light attenuation region, and a position of the light attenuation region are set such that a predetermined state is generated. The processor determines light quantity of light received with the detector. The drive controller changes an interval between a sample and the objective lens on the basis of the light quantity such that the light quantity becomes minimum.
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公开(公告)号：US10458785B2
公开(公告)日：2019-10-29
申请号：US15815867
申请日：2017-11-17
申请人： OLYMPUS CORPORATION
发明人： Yoshimasa Suzuki , Hisashi Ode , Mayumi Odaira
摘要： A sample shape measuring method includes a step of preparing illumination light passing through a predetermined illumination region, a step of applying the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set so as not to include the optical axis at a pupil position of the illumination optical system and is set such that the illumination light is applied to part of the inside of the pupil and the outside of the pupil at a pupil position of the observation optical system. The predetermined processing step includes a step of receiving light, a step of obtaining the quantity of light, a step of calculating the difference or the ratio between the quantity of light and a reference quantity of light, and a step of calculating the amount of tilt in the surface of the sample from the difference or the ratio.
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