Sample observation device and sample observation method

    公开(公告)号:US10133050B2

    公开(公告)日:2018-11-20

    申请号:US14926517

    申请日:2015-10-29

    Abstract: A sample observation device includes an illumination optical system and an observation optical system, and the illumination optical system includes a light source, a condenser lens and an aperture member, and the observation optical system includes an objective lens and an imaging lens, and the aperture member has a light-shielding part or a darkening part and a transmission part, and the aperture member is disposed so that the light-shielding part or the darkening part includes an optical axis of the illumination optical system, and an image of an inner edge of the transmission part is formed inside of an outer edge of the pupil of the objective lens, and an image of an outer edge of the transmission part is formed outside of the outer edge of the pupil of the objective lens.

    Data acquisition apparatus
    2.
    发明授权

    公开(公告)号:US11269191B2

    公开(公告)日:2022-03-08

    申请号:US17149357

    申请日:2021-01-14

    Inventor: Yoshimasa Suzuki

    Abstract: A data acquisition apparatus includes an illumination device, a first beam splitter, a measurement unit, and a photodetector. A measurement optical path and a reference optical path are positioned between the illumination device and the photodetector. In the first beam splitter, light traveling in a first direction and light traveling in a second direction are generated from incident light. The measurement optical path is positioned in the first direction, the reference optical path is positioned in the second direction, and the measurement unit is disposed on the measurement optical path. In the optical surface of the first beam splitter, an incident position of light emitted from the illumination device changes with time, and the angle formed by light propagating through the measurement optical path and the optical axis of the measurement optical path changes with change in the incident position.

    Sample observation apparatus
    3.
    发明授权

    公开(公告)号:US10983055B2

    公开(公告)日:2021-04-20

    申请号:US16409985

    申请日:2019-05-13

    Abstract: A sample observation apparatus includes a light source unit, an illumination optical system, a detection optical system, a light detection element, and an image processing apparatus. The scanning unit relatively moves the light spot and the sample. An optical member is disposed. The illumination optical system and the detection optical system are disposed such that an image of a pupil of the illumination optical system is formed at a pupil position of the detection optical system. The image of the pupil of the illumination optical system is decentered relative to a pupil of the detection optical system due to refraction caused by the sample. The illumination optical system, the detection optical system, and the optical member are configured such that quantity of light passing through the pupil of the detection optical system changes by decentering.

    Sample shape measuring apparatus
    4.
    发明授权

    公开(公告)号:US10539411B2

    公开(公告)日:2020-01-21

    申请号:US16406103

    申请日:2019-05-08

    Abstract: A sample shape measuring apparatus includes a light source unit, an illumination optical system, a detection optical system, a light detection element, and a processing apparatus. A scanning unit relatively moves a light spot and the sample. Illumination light applied to the sample is transmitted through the sample, and light transmitted through the sample is incident on the detection optical system. The light detection element receives light. The illumination optical system or the detection optical system includes an optical member. The processing apparatus obtains a quantity of light based on a received light, calculates at least one of a difference and a ratio between the quantity of light and a reference quantity of light, calculates an amount of tilt at a surface of the sample, and calculates a shape of the sample from the amount of tilt.

    Sample observation device and sample observation method

    公开(公告)号:US10310247B2

    公开(公告)日:2019-06-04

    申请号:US15460743

    申请日:2017-03-16

    Inventor: Yoshimasa Suzuki

    Abstract: A sample observation device includes an illumination optical system and an observation optical system, and the illumination optical system includes a light source, a condenser lens, and an aperture member, and the observation optical system includes an objective lens and an imaging lens, and the aperture member has a light-shielding part or a darkening part, and a transmission part, and the transmission part is located outside of an outer edge of the light-shielding part or the darkening part, and an image of an inner edge of the transmission part is formed inside of an outer edge of a pupil of the objective lens, and an image of an outer edge of the transmission part is formed outside of the outer edge of the pupil of the objective lens, and the following conditional expression is satisfied. 0.005≤Ratio≤0.9.

    Sample observation device
    6.
    发明授权

    公开(公告)号:US10302928B2

    公开(公告)日:2019-05-28

    申请号:US15189354

    申请日:2016-06-22

    Inventor: Yoshimasa Suzuki

    Abstract: A sample observation device includes an illumination optical system and an observation optical system. The illumination optical system includes a light source, a condenser lens, and an aperture member. The observation optical system includes an objective lens and an imaging lens. The aperture member has a light-shielding part or a darkening part, and a transmission part. The transmission part is disposed asymmetrically with respect to an optical axis of the illumination optical system. An image of an inner edge of the transmission part is formed inside of an outer edge of a pupil of the objective lens. An image of an outer edge of the transmission part is formed outside of the outer edge of the pupil of the objective lens.

    Observation Unit and Microscope System Equipped with Observation Unit
    7.
    发明申请
    Observation Unit and Microscope System Equipped with Observation Unit 有权
    观察单元和配备观察单元的显微镜系统

    公开(公告)号:US20150070484A1

    公开(公告)日:2015-03-12

    申请号:US14542034

    申请日:2014-11-14

    Abstract: A microscope system (100) includes a microscope (10) and an observation unit (20) provided separately from the microscope. The microscope includes a microscope objective lens (3), an image pickup element (31) disposed at a position at which an image is formed through the microscope objective lens, and a first control apparatus (32) connected with the image pickup element. The observation unit includes a second control apparatus (21), a display device (22, 22a, 22b) connected with the second control apparatus, and a magnifier optical system (25a, 25b) arranged at a predetermined distance from the display device. The microscope system further includes a communication apparatus (21) for communication between the first control apparatus and the second control apparatus so that an image picked up by the image pickup apparatus is displayed on the display device.

    Abstract translation: 显微镜系统(100)包括与显微镜分开设置的显微镜(10)和观察单元(20)。 显微镜包括显微镜物镜(3),设置在通过显微镜物镜形成图像的位置的图像拾取元件(31)和与图像拾取元件连接的第一控制设备(32)。 观察单元包括第二控制设备(21),与第二控制设备连接的显示设备(22,22a,22b)和与显示设备预定距离布置的放大镜光学系统(25a,25b)。 显微镜系统还包括用于在第一控制装置和第二控制装置之间进行通信的通信装置,使得由图像拾取装置拾取的图像显示在显示装置上。

    Microscope Objective Lens
    9.
    发明申请
    Microscope Objective Lens 有权
    显微镜物镜

    公开(公告)号:US20130194660A1

    公开(公告)日:2013-08-01

    申请号:US13755243

    申请日:2013-01-31

    CPC classification number: G02B21/02

    Abstract: A microscope objective lens has an aspheric-surface lens, and a first lens nearest to an object side is a negative lens. It is desirable that at least any one surface of the first lens nearest to the object side is an aspheric surface. Moreover, it is desirable that the microscope objective lens satisfies the following conditional expression (1) −20

    Abstract translation: 显微镜物镜具有非球面透镜,最靠近物体侧的第一透镜是负透镜。 理想的是,最靠近物体侧的第一透镜的至少任何一个表面是非球面。 此外,期望显微镜物镜满足以下条件式(1)-20

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