Abstract:
A sample observation device includes an illumination optical system and an observation optical system, and the illumination optical system includes a light source, a condenser lens and an aperture member, and the observation optical system includes an objective lens and an imaging lens, and the aperture member has a light-shielding part or a darkening part and a transmission part, and the aperture member is disposed so that the light-shielding part or the darkening part includes an optical axis of the illumination optical system, and an image of an inner edge of the transmission part is formed inside of an outer edge of the pupil of the objective lens, and an image of an outer edge of the transmission part is formed outside of the outer edge of the pupil of the objective lens.
Abstract:
A data acquisition apparatus includes an illumination device, a first beam splitter, a measurement unit, and a photodetector. A measurement optical path and a reference optical path are positioned between the illumination device and the photodetector. In the first beam splitter, light traveling in a first direction and light traveling in a second direction are generated from incident light. The measurement optical path is positioned in the first direction, the reference optical path is positioned in the second direction, and the measurement unit is disposed on the measurement optical path. In the optical surface of the first beam splitter, an incident position of light emitted from the illumination device changes with time, and the angle formed by light propagating through the measurement optical path and the optical axis of the measurement optical path changes with change in the incident position.
Abstract:
A sample observation apparatus includes a light source unit, an illumination optical system, a detection optical system, a light detection element, and an image processing apparatus. The scanning unit relatively moves the light spot and the sample. An optical member is disposed. The illumination optical system and the detection optical system are disposed such that an image of a pupil of the illumination optical system is formed at a pupil position of the detection optical system. The image of the pupil of the illumination optical system is decentered relative to a pupil of the detection optical system due to refraction caused by the sample. The illumination optical system, the detection optical system, and the optical member are configured such that quantity of light passing through the pupil of the detection optical system changes by decentering.
Abstract:
A sample shape measuring apparatus includes a light source unit, an illumination optical system, a detection optical system, a light detection element, and a processing apparatus. A scanning unit relatively moves a light spot and the sample. Illumination light applied to the sample is transmitted through the sample, and light transmitted through the sample is incident on the detection optical system. The light detection element receives light. The illumination optical system or the detection optical system includes an optical member. The processing apparatus obtains a quantity of light based on a received light, calculates at least one of a difference and a ratio between the quantity of light and a reference quantity of light, calculates an amount of tilt at a surface of the sample, and calculates a shape of the sample from the amount of tilt.
Abstract:
A sample observation device includes an illumination optical system and an observation optical system, and the illumination optical system includes a light source, a condenser lens, and an aperture member, and the observation optical system includes an objective lens and an imaging lens, and the aperture member has a light-shielding part or a darkening part, and a transmission part, and the transmission part is located outside of an outer edge of the light-shielding part or the darkening part, and an image of an inner edge of the transmission part is formed inside of an outer edge of a pupil of the objective lens, and an image of an outer edge of the transmission part is formed outside of the outer edge of the pupil of the objective lens, and the following conditional expression is satisfied. 0.005≤Ratio≤0.9.
Abstract:
A sample observation device includes an illumination optical system and an observation optical system. The illumination optical system includes a light source, a condenser lens, and an aperture member. The observation optical system includes an objective lens and an imaging lens. The aperture member has a light-shielding part or a darkening part, and a transmission part. The transmission part is disposed asymmetrically with respect to an optical axis of the illumination optical system. An image of an inner edge of the transmission part is formed inside of an outer edge of a pupil of the objective lens. An image of an outer edge of the transmission part is formed outside of the outer edge of the pupil of the objective lens.
Abstract:
A microscope system (100) includes a microscope (10) and an observation unit (20) provided separately from the microscope. The microscope includes a microscope objective lens (3), an image pickup element (31) disposed at a position at which an image is formed through the microscope objective lens, and a first control apparatus (32) connected with the image pickup element. The observation unit includes a second control apparatus (21), a display device (22, 22a, 22b) connected with the second control apparatus, and a magnifier optical system (25a, 25b) arranged at a predetermined distance from the display device. The microscope system further includes a communication apparatus (21) for communication between the first control apparatus and the second control apparatus so that an image picked up by the image pickup apparatus is displayed on the display device.
Abstract:
A microscope objective lens has an aspheric-surface lens, and a first lens nearest to an object side is a negative lens. It is desirable that at least any one surface of the first lens nearest to the object side is an aspheric surface. Moreover, it is desirable that the microscope objective lens satisfies the following conditional expression (1) −20
Abstract:
A sample shape measuring method includes a step of preparing illumination light passing through a predetermined illumination region, a step of applying the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set so as to include an optical axis at a pupil position of an illumination optical system. Light transmitted through the sample is incident on the observation optical system. The predetermined processing step includes a step of receiving light emerged from the observation optical system, a step of obtaining a quantity of light of the received light, a step of calculating a difference or a ratio between the quantity of light and a reference quantity of light, and a step of calculating an amount of tilt in a surface of the sample from the difference or the ratio.