Sample shape measuring method and sample shape measuring apparatus

    公开(公告)号:US10458785B2

    公开(公告)日:2019-10-29

    申请号:US15815867

    申请日:2017-11-17

    Abstract: A sample shape measuring method includes a step of preparing illumination light passing through a predetermined illumination region, a step of applying the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set so as not to include the optical axis at a pupil position of the illumination optical system and is set such that the illumination light is applied to part of the inside of the pupil and the outside of the pupil at a pupil position of the observation optical system. The predetermined processing step includes a step of receiving light, a step of obtaining the quantity of light, a step of calculating the difference or the ratio between the quantity of light and a reference quantity of light, and a step of calculating the amount of tilt in the surface of the sample from the difference or the ratio.

    Photoacoustic microscope for detecting reflected detection light resulting from modulation by specimen
    3.
    发明授权
    Photoacoustic microscope for detecting reflected detection light resulting from modulation by specimen 有权
    用于检测由样品调制产生的反射检测光的光声显微镜

    公开(公告)号:US09335253B2

    公开(公告)日:2016-05-10

    申请号:US14559312

    申请日:2014-12-03

    Inventor: Hisashi Ode

    Abstract: Provided is a photoacoustic microscope, including: an objective lens configured to collect excitation light into a specimen, the excitation light in a wavelength range that is absorbed by an object to be observed; a detection light optical system configured to (i) form an image of a point light source of detection light in a middle portion of a pupil of the objective lens, the detection light having a wavelength that is different from the wavelength range of the excitation light, and (ii) emit the detection light onto the specimen by means of the objective lens; an optical scanning unit configured to deflect the excitation light and the detection light that enter the objective lens, for scanning the specimen; and a light detection unit configured to detect reflected light of the detection light that is reflected by the specimen.

    Abstract translation: 本发明提供一种光声显微镜,包括:被配置为将激发光收集到样本中的物镜,所述激发光在被观察对象吸收的波长范围内; 检测光光学系统,被配置为:(i)在所述物镜的光瞳的中间部分形成检测光的点光源的图像,所述检测光的波长与所述激发光的波长范围不同 ,和(ii)通过物镜将检测光发射到样品上; 光学扫描单元,被配置为偏转激发光和进入物镜的检测光,用于扫描样本; 以及光检测单元,被配置为检测由所述检体反射的检测光的反射光。

    Microscope Objective Lens
    5.
    发明申请
    Microscope Objective Lens 有权
    显微镜物镜

    公开(公告)号:US20130194660A1

    公开(公告)日:2013-08-01

    申请号:US13755243

    申请日:2013-01-31

    CPC classification number: G02B21/02

    Abstract: A microscope objective lens has an aspheric-surface lens, and a first lens nearest to an object side is a negative lens. It is desirable that at least any one surface of the first lens nearest to the object side is an aspheric surface. Moreover, it is desirable that the microscope objective lens satisfies the following conditional expression (1) −20

    Abstract translation: 显微镜物镜具有非球面透镜,最靠近物体侧的第一透镜是负透镜。 理想的是,最靠近物体侧的第一透镜的至少任何一个表面是非球面。 此外,期望显微镜物镜满足以下条件式(1)-20

    Sample shape measuring method and sample shape measuring apparatus

    公开(公告)号:US10458781B2

    公开(公告)日:2019-10-29

    申请号:US16028936

    申请日:2018-07-06

    Abstract: A sample shape measuring method includes a step of preparing illumination light passing through a predetermined illumination region, a step of applying the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set such that the illumination light is applied to part of inside of a pupil and outside of the pupil, a light intensity of the illumination light incident on the predetermined illumination region differs between a center and a periphery. The predetermined processing step includes a step of receiving light transmitted through the observation optical system, a step of obtaining a quantity of light of the received light, a step of calculating a difference or a ratio between the quantity of light and a reference quantity of light, and a step of calculating an amount of tilt in a surface of the sample from the difference or the ratio.

    Microscope objective lens
    7.
    发明授权
    Microscope objective lens 有权
    显微镜物镜

    公开(公告)号:US09170413B2

    公开(公告)日:2015-10-27

    申请号:US13755243

    申请日:2013-01-31

    CPC classification number: G02B21/02

    Abstract: A microscope objective lens has an aspheric-surface lens, and a first lens nearest to an object side is a negative lens. It is desirable that at least any one surface of the first lens nearest to the object side is an aspheric surface. Moreover, it is desirable that the microscope objective lens satisfies the following conditional expression (1) −20

    Abstract translation: 显微镜物镜具有非球面透镜,最靠近物体侧的第一透镜是负透镜。 理想的是,最靠近物体侧的第一透镜的至少任何一个表面是非球面。 此外,期望显微镜物镜满足以下条件式(1)-20

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