Method and Device for Measurement of a Plurality of Semiconductor Chips in a Wafer Array

    公开(公告)号:US20190189527A1

    公开(公告)日:2019-06-20

    申请号:US16323237

    申请日:2017-07-25

    摘要: A method and a device for measuring a plurality of semiconductor chips in a wafer array are disclosed. In an embodiment a method for measuring the semiconductor chips in a wafer array, wherein the wafer array is arranged on an electrically conductive carrier so that in each case back contacts of the semiconductor chips are contacted by the carrier, wherein a contact structure is arranged on a side of the wafer array facing away from the carrier, and wherein the contact structure includes a contact element and/or a plurality of radiation-emitting measurement semiconductor chips, includes applying a voltage between the contact structure and the carrier and measuring the semiconductor chips depending on a luminous image which is generated by emitted radiation which is caused simultaneously by fluorescence when the semiconductor chips are illuminated or by a radiation-emitting operation of the measurement semiconductor chips when the voltage is applied.

    MEASUREMENT OF THE LIGHT RADIATION OF LIGHT-EMITTING DIODES
    4.
    发明申请
    MEASUREMENT OF THE LIGHT RADIATION OF LIGHT-EMITTING DIODES 有权
    发光二极管的光辐射测量

    公开(公告)号:US20150204718A1

    公开(公告)日:2015-07-23

    申请号:US14423695

    申请日:2013-08-22

    IPC分类号: G01J1/04 G01M11/00 G01J1/42

    摘要: The invention relates to a method for measuring a light radiation (300) emitted by a light-emitting diode (210). In the method, an end (121) of an optical fibre (120) which is connected to a measuring device (130) is irradiated with the light radiation (300), which is emitted by the light-emitting diode (210), through an optical device (140), so that a portion of the light radiation (300) is coupled into the optical fibre (120) and is guided to the measuring device (130). The optical device (140) causes the light radiation (300) passing through the optical device (140) to be emitted in diffuse form in the direction of the end (121) of the optical fibre (120). The invention also relates to an apparatus (100) for measuring a light radiation (300) emitted by a light-emitting diode (210).

    摘要翻译: 本发明涉及一种用于测量由发光二极管(210)发射的光辐射(300)的方法。 在该方法中,连接到测量装置(130)的光纤(120)的端部(121)被由发光二极管(210)发射的光辐射(300)照射通过 光学装置(140),使得光辐射(300)的一部分耦合到光纤(120)中并被引导到测量装置(130)。 光学装置(140)使通过光学装置(140)的光辐射沿着光纤(120)的端部(121)的方向以漫射形式发射。 本发明还涉及一种用于测量由发光二极管(210)发射的光辐射(300)的装置(100)。