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公开(公告)号：US20170351027A1
公开(公告)日：2017-12-07
申请号：US15612087
申请日：2017-06-02
Applicant: Ohio State Innovation Foundation
Inventor： Ronald M. Reano , Li Chen
CPC classification number: G02B6/1347 , G02B6/12 , G02B6/126 , G02B6/132 , G02B6/136 , G02B2006/1204 , G02B2006/12042 , G02B2006/12045 , G02B2006/12078 , G02F1/035 , G02F2202/20
Abstract: An example method of forming a deterministic thin film from a crystal substrate is described herein. The method can include implanting ions into a surface of the crystal substrate to form a thin film crystal layer, and bonding the crystal substrate and a handle substrate to form a bilayer bonding interface between the crystal substrate and the handle substrate. The method can also include exfoliating the thin film crystal layer from the crystal substrate, patterning the thin film crystal layer to define a deterministic thin film, etching one or more trenches in the thin film crystal layer, etching the bilayer bonding interface via the one or more trenches, and releasing the deterministic thin film from the handle substrate.
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公开(公告)号：US10302864B2
公开(公告)日：2019-05-28
申请号：US15612087
申请日：2017-06-02
Applicant: Ohio State Innovation Foundation
Inventor： Ronald M. Reano , Li Chen
Abstract: An example method of forming a deterministic thin film from a crystal substrate is described herein. The method can include implanting ions into a surface of the crystal substrate to form a thin film crystal layer, and bonding the crystal substrate and a handle substrate to form a bilayer bonding interface between the crystal substrate and the handle substrate. The method can also include exfoliating the thin film crystal layer from the crystal substrate, patterning the thin film crystal layer to define a deterministic thin film, etching one or more trenches in the thin film crystal layer, etching the bilayer bonding interface via the one or more trenches, and releasing the deterministic thin film from the handle substrate.
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