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公开(公告)号：US20170351027A1
公开(公告)日：2017-12-07
申请号：US15612087
申请日：2017-06-02
Applicant: Ohio State Innovation Foundation
Inventor： Ronald M. Reano , Li Chen
CPC classification number: G02B6/1347 , G02B6/12 , G02B6/126 , G02B6/132 , G02B6/136 , G02B2006/1204 , G02B2006/12042 , G02B2006/12045 , G02B2006/12078 , G02F1/035 , G02F2202/20
Abstract: An example method of forming a deterministic thin film from a crystal substrate is described herein. The method can include implanting ions into a surface of the crystal substrate to form a thin film crystal layer, and bonding the crystal substrate and a handle substrate to form a bilayer bonding interface between the crystal substrate and the handle substrate. The method can also include exfoliating the thin film crystal layer from the crystal substrate, patterning the thin film crystal layer to define a deterministic thin film, etching one or more trenches in the thin film crystal layer, etching the bilayer bonding interface via the one or more trenches, and releasing the deterministic thin film from the handle substrate.
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Patent Agency Ranking
公开(公告)号：US09804423B2
公开(公告)日：2017-10-31
申请号：US14770291
申请日：2014-02-24
Applicant: OHIO STATE INNOVATION FOUNDATION
Inventor： Ronald M. Reano , Peng Sun , Qiang Xu
CPC classification number: G02F1/0136 , G02B6/12002 , G02B6/126 , G02B6/136 , G02B6/2934 , G02B6/3504 , G02B6/3596 , G02F1/0147 , G02F1/025 , G02F2201/06 , G02F2202/10
Abstract: An example optical polarization controller can include a substantially planar substrate and a waveguide unit cell formed on the substantially planar substrate. The waveguide unit cell can include a first out-of-plane waveguide portion and a second out-of-plane waveguide portion coupled to the first out-of-plane waveguide portion. Each of the first and second out-of-plane waveguide portions can respectively include a core material layer arranged between a first optical cladding layer having a first stress-response property and a second optical cladding layer having a second stress-response property. The first and second stress-response properties can be different such that each of the first and second out-of-plane waveguide portions is deflected by a deflection angle.
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公开(公告)号：US10302864B2
公开(公告)日：2019-05-28
申请号：US15612087
申请日：2017-06-02
Applicant: Ohio State Innovation Foundation
Inventor： Ronald M. Reano , Li Chen
Abstract: An example method of forming a deterministic thin film from a crystal substrate is described herein. The method can include implanting ions into a surface of the crystal substrate to form a thin film crystal layer, and bonding the crystal substrate and a handle substrate to form a bilayer bonding interface between the crystal substrate and the handle substrate. The method can also include exfoliating the thin film crystal layer from the crystal substrate, patterning the thin film crystal layer to define a deterministic thin film, etching one or more trenches in the thin film crystal layer, etching the bilayer bonding interface via the one or more trenches, and releasing the deterministic thin film from the handle substrate.
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4.发明申请公开(公告)号：US20180330946A1
公开(公告)日：2018-11-15
申请号：US15978606
申请日：2018-05-14
Applicant: Ohio State Innovation Foundation
Inventor： Ronald M. Reano , Michael Wood , Ryan Patton
CPC classification number: H01L21/02238 , G02B6/12004 , G02B6/12009 , G02B6/1223 , G02B6/1225 , G02B6/42 , G02B2006/12061 , G02B2006/12123 , G02B2006/12138 , G02B2006/12178 , G02F1/0136 , G02F1/025 , G02F1/313 , H01L21/02252 , H01L31/0232
Abstract: Amorphous silicon devices, systems, and related methods are described herein. An example method for fabricating a thin film with light-emitting or light-detecting capability can include depositing a thin film of amorphous silicon on a wafer such that crystalline defects are distributed throughout the thin film. Additionally, an example photonic device can include a p-doped region and an n-doped region formed on a wafer, and a resonator structure formed on the wafer. The resonator structure can be formed from amorphous silicon and can be arranged between the p-doped and n-doped regions to form a PIN junction. Optionally, the photonic device can be incorporated into a monolithic integrated optical system.
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公开(公告)号：US10418238B2
公开(公告)日：2019-09-17
申请号：US15978606
申请日：2018-05-14
Applicant: Ohio State Innovation Foundation
Inventor： Ronald M. Reano , Michael Wood , Ryan Patton
IPC: G02F1/295 , H01L21/02 , H01L31/0232 , G02B6/12 , G02F1/025 , G02B6/122 , G02B6/42 , G02F1/01 , G02F1/313
Abstract: Amorphous silicon devices, systems, and related methods are described herein. An example method for fabricating a thin film with light-emitting or light-detecting capability can include depositing a thin film of amorphous silicon on a wafer such that crystalline defects are distributed throughout the thin film. Additionally, an example photonic device can include a p-doped region and an n-doped region formed on a wafer, and a resonator structure formed on the wafer. The resonator structure can be formed from amorphous silicon and can be arranged between the p-doped and n-doped regions to form a PIN junction. Optionally, the photonic device can be incorporated into a monolithic integrated optical system.
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公开(公告)号：US10133097B2
公开(公告)日：2018-11-20
申请号：US15718350
申请日：2017-09-28
Applicant: OHIO STATE INNOVATION FOUNDATION
Inventor： Ronald M. Reano , Peng Sun , Qiang Xu
Abstract: An example optical polarization controller can include a substantially planar substrate and a waveguide unit cell formed on the substantially planar substrate. The waveguide unit cell can include a first out-of-plane waveguide portion and a second out-of-plane waveguide portion coupled to the first out-of-plane waveguide portion. Each of the first and second out-of-plane waveguide portions can respectively include a core material layer arranged between a first optical cladding layer having a first stress-response property and a second optical cladding layer having a second stress-response property. The first and second stress-response properties can be different such that each of the first and second out-of-plane waveguide portions is deflected by a deflection angle.
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