-
公开(公告)号：US06615510B2
公开(公告)日：2003-09-09
申请号：US10230846
申请日：2002-08-28
申请人： Oliver David Jones , Kenneth C. McMahon , Jonathan E. Borkowski , Scott Petersen , Donald E. Stephens , Yassin Mehmandoust , James M. Olivas
发明人： Oliver David Jones , Kenneth C. McMahon , Jonathan E. Borkowski , Scott Petersen , Donald E. Stephens , Yassin Mehmandoust , James M. Olivas
IPC分类号： F26B300
CPC分类号： H01L21/67057 , H01L21/67034 , H01L21/67046 , H01L21/6776
摘要： Liquid is removed from wafers for drying a wafer that has been wet in a liquid bath. The wafer and the bath are separated at a controlled rate as the wafer is positioned in a gas-filled volume. The controlled rate is generally not less than the maximum rate at which a meniscus will form between the liquid bath and the surface of the wafer when the liquid bath and the wafer are separated. The gas-filled volume is defined by a hot chamber that continuously transfers thermal energy to the wafer in the gas-filled volume. Hot gas directed into the volume and across the wafer and out of the volume continuously transfers thermal energy to the wafer.
摘要翻译： 将液体从晶片上除去，以干燥已在液体浴中湿润的晶片。 当晶片定位在气体填充的体积中时，以受控的速率分离晶片和浴。 控制速率通常不低于当液浴和晶片分离时在液槽和晶片表面之间形成弯液面的最大速率。 充气体积由热室定义，其在气体填充体积中将热能连续传递到晶片。 引导到体积中并跨越晶片并且离开体积的热气体将热能连续传递到晶片。
-
公开(公告)号：US06430841B1
公开(公告)日：2002-08-13
申请号：US09580825
申请日：2000-05-26
申请人： Jonathan Borkowski , Oliver David Jones , Kenneth C. McMahon , Scott Petersen , Donald Stephens , Yassin Mehmandoust , James M. Olivas
发明人： Jonathan Borkowski , Oliver David Jones , Kenneth C. McMahon , Scott Petersen , Donald Stephens , Yassin Mehmandoust , James M. Olivas
IPC分类号： F26B2108
CPC分类号： H01L21/67057 , H01L21/67034 , H01L21/67046 , H01L21/6776
摘要： Liquid is removed from batches of substrates by apparatus and methods for drying substrates that have been wet in an elongated liquid bath. The substrates are moved relative to the bath and an elongated gas-filled volume at rates of movement selected according to the location of the batches of substrates in the bath or the volume. As an example, the substrates and the bath are separated at a controlled rate to form a thin layer of liquid on each substrate as each substrate enters the gas-filled volume. The gas-filled volume is defined by an elongated hot chamber and hot gas directed into the volume and across the substrates and out of the volume continuously transfers thermal energy to the substrates. The flow rate of the gas into the volume is related to introduction of the substrates into the bath to avoid disturbing the liquid in the bath. The thermal energy transferred to the substrates in the volume evaporates the thin layer from the substrates without decreasing the rate of separation of the substrates and the bath below the maximum rate of such separation at which a meniscus will form between the bath and the surface of one of the substrates during such separation. Relative humidity in the volume is controlled by sensing the relative humidity and regulating the speed of a fan that draws gas from the volume.
摘要翻译： 通过用于干燥在细长液体浴中润湿的基底的装置和方法从批次的基底中除去液体。 衬底相对于浴移动，并且根据衬底批次在浴中的位置或体积选择移动速率的细长气体填充体积。 作为示例，基板和浴以受控的速率分离，以在每个基板进入气体填充体积时在每个基板上形成薄层的液体。 气体填充体积由细长的热室和引导到体积中并跨过衬底的热气体限定，并且在体积之外连续地将热能传递到衬底。 进入体积的气体的流速与将基底引入浴中以避免干扰浴中的液体有关。 在体积中转移到基底的热能从衬底中蒸发薄层，而不会降低衬底和浴的分离速率低于这种分离的最大速率，其中在浴和表面之间形成弯液面 在这种分离过程中。 通过感测相对湿度并调节从体积吸取气体的风扇的速度来控制体积中的相对湿度。
-
公开(公告)号：US06477786B1
公开(公告)日：2002-11-12
申请号：US09579837
申请日：2000-05-26
申请人： Oliver David Jones , Kenneth C. McMahon , Jonathan Borkowski , Scott Petersen , Donald Stephens , Yassin Mehmandoust , James M. Olivas
发明人： Oliver David Jones , Kenneth C. McMahon , Jonathan Borkowski , Scott Petersen , Donald Stephens , Yassin Mehmandoust , James M. Olivas
IPC分类号： F26B1900
CPC分类号： H01L21/67057 , H01L21/67034 , H01L21/67046 , H01L21/6776
摘要： Liquid is removed from batches of substrates by apparatus and methods for drying substrates that have been wet in an elongated liquid bath. The substrates are moved relative to the bath and an elongated gas-filled volume at rates of movement selected according to the location of the batches of substrates in the bath or the volume. As an example, the substrates and the bath are separated at a controlled rate to form a thin layer of liquid on each substrate as each substrate enters the gas-filled volume. The gas-filled volume is defined by an elongated hot chamber and hot gas directed into the volume and across the substrates and out of the volume continuously transfers thermal energy to the substrates . The flow rate of the gas into the volume is related to introduction of the substrates into the bath to avoid disturbing the liquid in the bath. The thermal energy transferred to the substrates in the volume evaporates the thin layer from the substrates without decreasing the rate of separation of the substrates and the bath below the maximum rate of such separation at which a meniscus will form between the bath and the surface of one of the substrates during such separation. Relative humidity in the volume is controlled by sensing the relative humidity and regulating the speed of a fan that draws gas from the volume.
摘要翻译： 通过用于干燥在细长液体浴中润湿的基底的装置和方法从批次的基底中除去液体。 衬底相对于浴移动，并且根据衬底批次在浴中的位置或体积选择移动速率的细长气体填充体积。 作为示例，基板和浴以受控的速率分离，以在每个基板进入气体填充体积时在每个基板上形成薄层的液体。 气体填充体积由细长的热室和引导到体积中并跨过衬底的热气体限定，并且在体积之外连续地将热能传递到衬底。 进入体积的气体的流速与将基底引入浴中以避免干扰浴中的液体有关。 在体积中转移到基底的热能从衬底中蒸发薄层，而不会降低衬底和浴的分离速率低于这种分离的最大速率，其中在浴和表面之间形成弯液面 在这种分离过程中。 通过感测相对湿度并调节从体积吸取气体的风扇的速度来控制体积中的相对湿度。
-
公开(公告)号：US06446355B1
公开(公告)日：2002-09-10
申请号：US09579841
申请日：2000-05-26
申请人： Oliver David Jones , Kenneth C. McMahon , Jonathan Borkowski , Scott Petersen , Donald Stephens , Yassin Mehmandoust , James M. Olivas
发明人： Oliver David Jones , Kenneth C. McMahon , Jonathan Borkowski , Scott Petersen , Donald Stephens , Yassin Mehmandoust , James M. Olivas
IPC分类号： F26B334
CPC分类号： H01L21/67057 , H01L21/67034 , H01L21/67046 , H01L21/6776
摘要： Liquid is removed from disks by apparatus and methods for drying a disk that has been wet in a liquid bath. The disk and the bath are separated at a controlled rate to form a monolayer of liquid on the disk as the disk is positioned in a gas-filled volume. The separation may be by moving the disk out of the liquid bath, and the controlled rate is generally not less than the maximum rate at which a meniscus will form between the liquid bath and the surface of the disk when the liquid bath and the disk are separated. The gas-filled volume is defined by a hot chamber that continuously transfers thermal energy to the disk in the gas-filled volume. Hot gas directed into the volume and across the disk and out of the volume continuously transfers thermal energy to the disk. The directing of the gas out of the volume is independent of the separation of the bath and the disk. The thermal energy transferred to the disk in the volume evaporates the monolayer from the disk without decreasing the rate of separation of the disk and the bath below the maximum rate of such separation at which a meniscus will form between the bath and the surface of the disk during such separation. In addition to such separation, and directing of the hot gas across the disk and out of the volume, the relative humidity in the volume is kept low to inhibit recondensation of the liquid on the disks.
摘要翻译： 通过用于干燥已经在液浴中润湿的盘的装置和方法将液体从盘上除去。 当盘被定位在充气体积中时，盘和浴以受控的速率分离以在盘上形成单层液体。 分离可以是通过将液体槽移出液槽，并且控制速率通常不低于当液体浴和盘是液体槽时在液体浴和盘表面之间形成弯液面的最大速率 分开 充气体积由热室确定，其在气体填充体积中将热能连续传递到盘。 引导到体积中并跨越盘并且离开体积的热气体将热能连续传递到盘。 将气体引导到体积中是与浴和盘的分离无关的。 在体积中传递到盘的热能从盘中蒸发单层而不降低盘和浴的分离速率低于在浴和表面之间形成弯液面的最大速率的最大速率 在这种分离过程中。 除了这种分离之外，还引导热气体穿过盘并离开体积，体积中的相对湿度保持较低，以防止液体在盘上的再冷凝。
-
公开(公告)号：US07516507B1
公开(公告)日：2009-04-14
申请号：US10984321
申请日：2004-11-08
IPC分类号： B08B11/02
CPC分类号： B08B1/04 , B08B3/12 , G11B23/505 , H01L21/67046
摘要： Substrate preparation systems comprising multi-zone cascade brush scrubbers having sonic assemblies disposed between one or more of the scrubber zones for cleaning of disk-shaped substrates, including silicon wafers and disks for data storage devices, such as hard disk drives (HDD), compact discs (CD) and digital video discs (DVD). The system method combines a sonic particle dislodgement/removal assembly into a cascade brush scrubber line comprising a longi-tudinal array of brush pairs in which the substrates process through preparation zones defined by each pair of brushes, the substrates being transited longitudinally through the zones while rotating on an axis normal to their faces. Piezoelectric transducer arrays transmit sound energy to one or both face(s) of the substrate to dislodge and/or remove particles, and the scrubber simultaneously or thereafter sweeps away the particulates. The sonic energy may be ultrasonic, megasonic, or both, applied to the substrate surface(s) in alternating or sequential process steps.
摘要翻译： 衬底制备系统包括多区级联刷洗涤器，其具有设置在一个或多个洗涤器区域之间的用于清洁盘形基底的声波组件，包括用于数据存储设备的硅晶片和盘，例如硬盘驱动器（HDD），紧凑型 光盘（CD）和数字视频光盘（DVD）。 系统方法将声波粒子移动/移除组件组合成级联刷洗涤器管线，其包括刷子对的纵向阵列，其中衬底通过由每对刷子限定的制备区域进行处理，衬底沿纵向穿过区域，而 在垂直于其脸部的轴上旋转。 压电换能器阵列将声能传递到衬底的一个或两个面，以移除和/或去除颗粒，并且洗涤器同时或此后扫除颗粒。 声波能量可以是超声波，兆声波或两者，以交替或顺序的工艺步骤施加到衬底表面。
-
公开(公告)号：US06625835B1
公开(公告)日：2003-09-30
申请号：US09580827
申请日：2000-05-26
申请人： David T. Frost , Oliver David Jones , Scott Petersen , Donald Stephens , Anthony Jones , Bryan Riley
发明人： David T. Frost , Oliver David Jones , Scott Petersen , Donald Stephens , Anthony Jones , Bryan Riley
IPC分类号： B08B102
CPC分类号： H01L21/67051 , H01L21/67034 , H01L21/67046 , H01L21/67057 , H01L21/67706 , H01L21/67712 , H01L21/6776 , Y10S134/902 , Y10S414/135
摘要： A cascaded disk scrubbing system and method are provided. The cascaded disk scrubbing system includes an array of rows of brush pairs. Each row includes a plurality of counter-rotating brush pairs that are arranged horizontally and longitudinally, and configured to receive and process a disk in a vertical orientation through disk preparation zones defined by each pair of brushes. Below and between the pairs of brushes is a track that is configured to apply a rotation to the disk and to transition the disk in a vertical orientation through the brush pairs. Nozzles dispense fluids on and over the brush pairs, and the brush pairs are configured such that fluids are dispensed through the brush pairs. Nozzles dispense a curtain of fluid between each disk preparation zone, and the cascaded disk scrubbing system is configured to progress from dirtiest to cleanest as the disk transitions through each disk preparation zone.
摘要翻译： 提供了级联的磁盘清洗系统和方法。 级联的磁盘擦除系统包括刷对行的阵列。 每排包括多个反向旋转刷对，它们被水平和纵向布置，并且构造成通过由每对刷定义的盘准备区沿垂直方向接收和处理盘。 刷子对之下和之间是配置为向盘施加旋转并且通过刷对以垂直方向转换盘的轨道。 喷嘴在刷对之上和之上分配流体，并且刷对构造成使得流体通过刷对分配。 喷嘴在每个盘准备区之间分配流体帘子，并且级联盘擦洗系统被配置为随着盘转过每个盘准备区而从最脏到最清洁。
-
公开(公告)号：US06588043B1
公开(公告)日：2003-07-08
申请号：US09580367
申请日：2000-05-26
申请人： David T. Frost , Oliver David Jones , Scott Petersen , Donald Stephens , Anthony Jones , Bryan Riley
发明人： David T. Frost , Oliver David Jones , Scott Petersen , Donald Stephens , Anthony Jones , Bryan Riley
IPC分类号： B08B102
CPC分类号： H01L21/67051 , H01L21/67034 , H01L21/67046 , H01L21/67057 , H01L21/67706 , H01L21/67712 , H01L21/6776 , Y10S134/902 , Y10S414/135
摘要： A cascaded wafer scrubbing system and method are provided. The cascaded wafer scrubbing system includes an array of rows of brush pairs. Each row includes a plurality of counter-rotating brush pairs that are arranged horizontally and longitudinally, and configured to receive and process a wafer in a vertical orientation through wafer preparation zones defined by each pair of brushes. Below and between the pairs of brushes is a track that is configured to apply a rotation to the wafer and to transition the wafer in a vertical orientation through the brush pairs. Nozzles dispense fluids on and over the brush pairs, and the brush pairs are configured such that fluids are dispensed through the brush pairs. Nozzles dispense a curtain of fluid between each wafer preparation zone, and the cascaded wafer scrubbing system is configured to progress from dirtiest to cleanest as the wafer transitions through each wafer preparation zone.
摘要翻译： 提供级联晶片洗涤系统和方法。 级联晶片洗涤系统包括一排刷子对。 每行包括水平和纵向布置的多个反向旋转刷对，并且被配置为通过由每对刷定义的晶片准备区沿垂直取向接收和处理晶片。 刷子对之下和之间是被配置为向晶片施加旋转并且以垂直取向使晶片转过刷对的轨道。 喷嘴在刷对之上和之上分配流体，并且刷对构造成使得流体通过刷对分配。 喷嘴在每个晶片制备区域之间分配流体的帘子，并且级联的晶片洗涤系统被配置为随着晶片转过每个晶片制备区域而从最脏到最干净。
-
公开(公告)号：US20080114712A1
公开(公告)日：2008-05-15
申请号：US11558414
申请日：2006-11-09
申请人： James Gleim , Timothy Witmer , Scott Petersen , Aaron Schafer , Christopher Pietschmann , Nikola Basta
发明人： James Gleim , Timothy Witmer , Scott Petersen , Aaron Schafer , Christopher Pietschmann , Nikola Basta
IPC分类号： G06N5/02
摘要： A lead response system is provided comprising a customizable lead delivery rules engine and a customizable escalation rules engine for delivering leads to appropriate responders and re-routing undeveloped leads to different responders. Each delivery rule includes two or more criteria which may be met in order for the lead to be delivered to the responder specified in the particular rule. A lead that is not accepted by the responder to whom it was delivered within a user-defined time frame is re-routed for delivery to a new responder according to a set of escalation rules. The escalation rules may include delivery instructions specifying the new responder or may re-route the lead to the delivery rules engine for delivery to a new responder according to a re-application of the delivery rules.
摘要翻译： 提供引导响应系统，其包括可定制的引导传递规则引擎和可定制的升级规则引擎，用于将导线传递给适当的响应者并将未开发的引线重新路由到不同的响应者。 每个递送规则包括可以满足的两个或多个标准，以便将引导传递给特定规则中指定的响应者。 在用户定义的时间框架内被送达的响应者不接受的引导被重新路由以根据一组升级规则传递给新的响应者。 升级规则可以包括指定新的应答者的传送指令，或者可以根据传送规则的重新应用将引导重新路由到传送规则引擎以传送到新的响应者。
-
公开(公告)号：US08231649B2
公开(公告)日：2012-07-31
申请号：US10762643
申请日：2004-01-20
申请人： Scott Petersen
发明人： Scott Petersen
IPC分类号： A61F2/01
CPC分类号： A61F2/01 , A61F2002/016 , A61F2230/005 , A61F2230/0067
摘要： Retrievable blood clot filter devices implantable within a blood vessel, including methods and apparatuses for retrieving such devices, are disclosed. The retrievable blood clot filter device can include an apical head, and a plurality of elongated filter legs configured to expand between a collapsed position and an expanded position within the blood vessel. A bendable anchoring member disposed on one or more filter support members can be used to secure the blood clot filter device along the inner wall of the blood vessel. The anchoring members can be configured to bend and retract into a number of filter tubes slidably disposed along the support members, allowing the blood clot filter device to be removed with a retrieval apparatus.
摘要翻译： 公开了可植入血管内的可检测血块滤过装置，包括用于检索这些装置的方法和装置。 可回收的血块过滤装置可以包括顶端头和多个细长的过滤腿，其构造成在血管内的折叠位置和扩张位置之间膨胀。 设置在一个或多个过滤器支撑构件上的可弯曲锚固构件可以用于沿着血管的内壁固定血块过滤装置。 锚固构件可以构造成弯曲和缩回到沿着支撑构件可滑动地设置的多个过滤管，从而允许使用取出装置去除血块过滤装置。
-
公开(公告)号：US07747545B2
公开(公告)日：2010-06-29
申请号：US11558414
申请日：2006-11-09
申请人： James Gleim , Timothy Witmer , Scott Petersen , Aaron Schafer , Christopher Pietschmann , Nikola Basta
发明人： James Gleim , Timothy Witmer , Scott Petersen , Aaron Schafer , Christopher Pietschmann , Nikola Basta
摘要： A lead response system is provided comprising a customizable lead delivery rules engine and a customizable escalation rules engine for delivering leads to appropriate responders and re-routing undeveloped leads to different responders. Each delivery rule includes two or more criteria which may be met in order for the lead to be delivered to the responder specified in the particular rule. A lead that is not accepted by the responder to whom it was delivered within a user-defined time frame is re-routed for delivery to a new responder according to a set of escalation rules. The escalation rules may include delivery instructions specifying the new responder or may re-route the lead to the delivery rules engine for delivery to a new responder according to a re-application of the delivery rules.
摘要翻译： 提供引导响应系统，其包括可定制的引导传递规则引擎和可定制的升级规则引擎，用于将导线传递给适当的响应者并将未开发的引线重新路由到不同的响应者。 每个递送规则包括可以满足的两个或多个标准，以便将引导传递给特定规则中指定的响应者。 在用户定义的时间框架内被送达的响应者不接受的引导被重新路由以根据一组升级规则传递给新的响应者。 升级规则可以包括指定新的应答者的传送指令，或者可以根据传送规则的重新应用将引导重新路由到传送规则引擎以传送到新的响应者。
-
-
-
-
-
-
-
-
-
搜索结果
17 条记录 (耗时 0.035 秒)
