公开(公告)号：US09232114B2

公开(公告)日：2016-01-05

申请号：US13966672

申请日：2013-08-14

Applicant: Orbotech Ltd.

Inventor： Yigal Katzir ,  Itay Gur-Arie ,  Yacov Malinovich

IPC: H04N3/14 ,  G01N21/88 ,  G01N21/89 ,  G01N21/956 ,  H01L27/146 ,  H04N5/374

CPC classification number: H04N3/155 ,  G01N21/8851 ,  G01N21/8901 ,  G01N21/956 ,  H01L27/14645 ,  H04N5/3743 ,  H04N5/37455

Abstract: An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.