公开(公告)号：US20200176212A1

公开(公告)日：2020-06-04

申请号：US16788028

申请日：2020-02-11

Applicant: Oxford Instruments X-ray Technology Inc.

Inventor： Yahya ALIVOV ,  Christopher K. MCKENZIE ,  Bryant GRIGSBY ,  Andrey DEGTYARYOV

IPC: H01J5/18 ,  C23C16/48 ,  C23C16/40 ,  H01J35/18 ,  C23C16/455

Abstract: A window member for separating an internal environment of an x-ray device from an environment external to the x-ray device is provided. The window member comprises a substrate and a coating layer disposed upon a surface of the substrate. The substrate is formed from a polycrystalline material and is substantially transparent to low-energy x-rays. The coating layer is non-porous, covers the crystal grains at the surface of the substrate and extends into the grain boundaries therebetween, such that the coating layer forms an impermeable barrier between the substrate and the external environment.

公开(公告)号：US20180061608A1

公开(公告)日：2018-03-01

申请号：US15783457

申请日：2017-10-13

Applicant: Oxford Instruments X-ray Technology Inc.

Inventor： Yahya ALIVOV ,  Christopher K. MCKENZIE ,  Bryant GRIGSBY ,  Andrey DEGTYARYOV

IPC: H01J5/18 ,  C23C16/40

CPC classification number: H01J5/18 ,  C23C16/403 ,  C23C16/405 ,  C23C16/45525 ,  C23C16/45555 ,  C23C16/488 ,  H01J35/18 ,  H01J2235/183

Abstract: A window member for separating an internal environment of an x-ray device from an environment external to the x-ray device is provided. The window member comprises a substrate and a coating layer disposed upon a surface of the substrate. The substrate is formed from a polycrystalline material and is substantially transparent to low-energy x-rays. The coating layer is non-porous, covers the crystal grains at the surface of the substrate and extends into the grain boundaries therebetween, such that the coating layer forms an impermeable barrier between the substrate and the external environment.