E/I core actuator commutation formula and control method
    1.
    发明申请
    E/I core actuator commutation formula and control method 失效
    E / I核心执行器换向公式和控制方法

    公开(公告)号:US20050218842A1

    公开(公告)日:2005-10-06

    申请号:US10819041

    申请日:2004-04-05

    IPC分类号: H02P1/00 H02P25/06

    CPC分类号: H02P25/06

    摘要: A stage assembly (220) for moving a device (200) includes a stage (208), and actuator pair (226) and a control system (224). The actuator pair (226) includes a first actuator (228) that is coupled to the stage (208). The first actuator (228) has a first E core (236) and a first I core (240) that is spaced apart a first gap (g1) from the first E core (236). The control system (224) directs current to the first actuator (228) to move the stage (208). In one embodiment, the amount of current directed to the first actuator (228) is determined utilizing a first parameter (a) that is added to the first gap (g1). The value of the first parameter (a) is determined by experimental testing. Additionally, the amount of current directed to the first actuator (228) can be determined utilizing a second parameter (b) that is added to the first gap (g1). The value of the second parameter (b) is determined by experimental testing.

    摘要翻译: 用于移动设备(200)的平台组件(220)包括平台(208)和致动器对(226)和控制系统(224)。 致动器对(226)包括联接到平台(208)的第一致动器(228)。 第一致动器(228)具有第一E型芯(236)和第一I型芯(240),其与第一E型芯(236)间隔开第一间隙(g 1> 1)。 控制系统(224)将电流引导到第一致动器(228)以移动平台(208)。 在一个实施例中,使用添加到第一间隙(g 1> 1)的第一参数(a)来确定引导到第一致动器(228)的电流量。 第一个参数(a)的值由实验测试确定。 另外,可以利用添加到第一间隙(g1> 1)的第二参数(b)来确定引导到第一致动器(228)的电流量。 第二个参数(b)的值由实验测试确定。

    E/I core actuator commutation formula and control method
    2.
    发明授权
    E/I core actuator commutation formula and control method 失效
    E / I核心执行器换向公式和控制方法

    公开(公告)号:US07253576B2

    公开(公告)日:2007-08-07

    申请号:US10819041

    申请日:2004-04-05

    IPC分类号: H02P1/00

    CPC分类号: H02P25/06

    摘要: A stage assembly (220) for moving a device (200) includes a stage (208), and actuator pair (226) and a control system (224). The actuator pair (226) includes a first actuator (228) that is coupled to the stage (208). The first actuator (228) has a first E core (236) and a first I core (240) that is spaced apart a first gap (g1) from the first E core (236). The control system (224) directs current to the first actuator (228) to move the stage (208). In one embodiment, the amount of current directed to the first actuator (228) is determined utilizing a first parameter (a) that is added to the first gap (g1). The value of the first parameter (a) is determined by experimental testing. Additionally, the amount of current directed to the first actuator (228) can be determined utilizing a second parameter (b) that is added to the first gap (g1). The value of the second parameter (b) is determined by experimental testing.

    摘要翻译: 用于移动设备(200)的平台组件(220)包括平台(208)和致动器对(226)和控制系统(224)。 致动器对(226)包括联接到平台(208)的第一致动器(228)。 第一致动器(228)具有第一E型芯(236)和第一I型芯(240),其与第一E型芯(236)间隔开第一间隙(g 1> 1)。 控制系统(224)将电流引导到第一致动器(228)以移动平台(208)。 在一个实施例中,使用添加到第一间隙(g 1> 1)的第一参数(a)来确定引导到第一致动器(228)的电流量。 第一个参数(a)的值由实验测试确定。 另外,可以利用添加到第一间隙(g1> 1)的第二参数(b)来确定引导到第一致动器(228)的电流量。 第二个参数(b)的值由实验测试确定。

    Auto-calibration of attraction-only type actuator commutations
    3.
    发明授权
    Auto-calibration of attraction-only type actuator commutations 失效
    仅吸引型执行器换向的自动校准

    公开(公告)号:US07034474B2

    公开(公告)日:2006-04-25

    申请号:US10775720

    申请日:2004-02-09

    IPC分类号: H02K41/00

    摘要: A stage assembly (220) for moving a device (200) includes a stage (208), an attraction-only type actuator pair (426) that moves the stage (208), and a control system (24). In one embodiment, the actuator pair (426) includes a first electromagnet (436F), a first conductor (438F) and a first target (440F) having a first target surface (442F). The actuator pair also includes a second electromagnet (436S), a second conductor (438S) and a second target (440S) having a second target surface (442S). The first electromagnet (436F) is positioned at a first angle θ1 relative to a first target surface (442F) and the second electromagnet (436S) is positioned at a second angle θ2 relative to the second target surface (442S). The control system (24) directs a first current to one or more of the electromagnets based on at least one of the angles θ1, θ2. Further, one or more electromagnets (436) can include a first measurement point and a second measurement point. The control system (24) can direct current to the actuator pair (426) based on the relative distance between the first and second measurement points and the corresponding target surface (442).

    摘要翻译: 用于移动装置(200)的平台组件(220)包括台(208),移动台(208)的仅吸引型致动器对(426)和控制系统(24)。 在一个实施例中,致动器对(426)包括具有第一目标表面(442F)的第一电磁体(436F),第一导体(438F)和第一靶(440F)。 致动器对还包括具有第二目标表面(442S)的第二电磁体(436S),第二导体(438S)和第二靶(440S)。 第一电磁体(436F)相对于第一目标表面(442F)位于第一角度θ1,并且第二电磁体(436S)位于第二角度θ 2 相对于第二目标表面(442S)。 控制系统(24)基于角度θ1,θ2 2中的至少一个将第一电流引导到一个或多个电磁体。 此外,一个或多个电磁体(436)可以包括第一测量点和第二测量点。 控制系统(24)可以基于第一和第二测量点与相应的目标表面(442)之间的相对距离将电流引导到致动器对(426)。

    On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage
    4.
    发明申请
    On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage 有权
    用于识别和补偿由多个执行器在多轴平台上产生的力 - 波动和侧力的机上方法

    公开(公告)号:US20080275661A1

    公开(公告)日:2008-11-06

    申请号:US11986314

    申请日:2007-11-19

    IPC分类号: G01L25/00

    CPC分类号: G03F7/70758 G03F7/70725

    摘要: Methods, apparatus, and systems are disclosed for identifying force-ripple and/or side-forces in actuators used for moving a multiple-axis stage. The identified force-ripple and/or side-forces can be mapped, and maps of corresponding position-dependent compensation ratios useful for correcting same are obtained. The methods are especially useful for stages providing motion in at least one degree of freedom using multiple (redundant) actuators. In an exemplary method a stage member is displaced, using at least one selected actuator, multiple times over a set distance in the range of motion of the subject actuator(s). Each displacement has a predetermined trajectory and respective starting point in the range. For each displacement, respective section force-command(s) are extracted and normalized to a reference section force-command to define a section compensation-ratio. Multiple section compensation-ratios are assembled, as functions of displacement in the range, to provide a map of compensation ratios for the actuator(s) throughout the range.

    摘要翻译: 公开了用于识别用于移动多轴平台的致动器中的力波动和/或侧向力的方法,装置和系统。 可以对所识别的力 - 纹波和/或侧向力进行映射,并且获得用于校正相应的位置相关的补偿比的映射。 这些方法对于使用多个(冗余)致动器在至少一个自由度中提供运动的阶段特别有用。 在示例性方法中,使用至少一个所选择的致动器,在主体致动器的运动范围内的设定距离上移动台架构件多次。 每个位移具有预定的轨迹和该范围内的相应起始点。 对于每个位移,提取相应的截面力命令并将其归一化为参考部分力命令以定义截面补偿比。 组合多段补偿比作为该范围内的位移的函数,以提供在整个范围内的致动器的补偿比的图。

    Method for determining a commutation offset and for determining a compensation map for a stage
    5.
    发明授权
    Method for determining a commutation offset and for determining a compensation map for a stage 有权
    用于确定换向偏移和用于确定载物台的补偿图的方法

    公开(公告)号:US09465305B2

    公开(公告)日:2016-10-11

    申请号:US13101264

    申请日:2011-05-05

    IPC分类号: H02K41/00 G03F7/20 H02P6/00

    摘要: A method for determining a commutation offset for a mover (250A) of a mover assembly (220C) that moves and positions a stage (220A) relative to a stage base (220B) includes controlling the mover assembly (220C) in a closed loop fashion to maintain the position of the stage (220A) along a first axis and along a second axis with the stage (220A) levitated above the stage base (220B). The method also includes the steps of (i) directing current to a coil array (240) of the mover assembly (220C) so that the mover assembly (220C) imparts a disturbance on the stage (220A); and (ii) evaluating one or more forces generated by the mover assembly (220C) as a result of the disturbance on the stage (220A) created by the mover (250A). Further, a method for generating a compensation map (1402) includes sequentially directing a plurality of excitation signals to the control of the mover assembly (220C) and determining the control commands that result from the plurality of excitation signals.

    摘要翻译: 用于确定相对于台架(220B)移动和定位平台(220A)的移动器组件(220C)的移动器(250A)的换向偏移的方法包括以闭环方式控制所述动子组件(220C) 以使台架(220A)沿着第一轴线并且沿着第二轴线保持台架(220A)的位置,台架(220A)悬浮在平台底座(220B)上方。 该方法还包括以下步骤:(i)将电流引导到移动器组件(220C)的线圈阵列(240),使得移动器组件(220C)在平台(220A)上施加干扰; 以及(ii)评估由所述移动器组件(220C)产生的由所述移动器(250A)产生的所述平台(220A)上的干扰所产生的一个或多个力。 此外,用于产生补偿图(1402)的方法包括将多个激励信号顺序地引导到移动器组件(220C)的控制,并且确定由多个激励信号产生的控制命令。

    Method for determing a commutation offset and for determining a compensation map for a stage
    6.
    发明授权
    Method for determing a commutation offset and for determining a compensation map for a stage 有权
    用于确定换向偏移和用于确定载物台的补偿图的方法

    公开(公告)号:US09013134B2

    公开(公告)日:2015-04-21

    申请号:US13110760

    申请日:2011-05-18

    IPC分类号: H02P1/26 G03F7/20 H02P6/00

    摘要: A method for determining a commutation offset for a mover (250A) of a mover assembly (220C) that moves and positions a stage (220A) relative to a stage base (220B) includes controlling the mover assembly (220C) in a closed loop fashion to maintain the position of the stage (220A) along a first axis and along a second axis with the stage (220A) levitated above the stage base (220B). The method also includes the steps of (i) directing current to a coil array (240) of the mover assembly (220C) so that the mover assembly (220C) imparts a disturbance on the stage (220A); and (ii) evaluating one or more forces generated by the mover assembly (220C) as a result of the disturbance on the stage (220A) created by the mover (250A). Further, a method for generating a compensation map (1402) includes sequentially directing a plurality of excitation signals to the control of the mover assembly (220C) and determining the control commands that result from the plurality of excitation signals.

    摘要翻译: 用于确定相对于台架(220B)移动和定位平台(220A)的移动器组件(220C)的移动器(250A)的换向偏移的方法包括以闭环方式控制所述动子组件(220C) 以使台架(220A)沿着第一轴线并且沿着第二轴线保持台架(220A)的位置,台架(220A)悬浮在平台底座(220B)上方。 该方法还包括以下步骤:(i)将电流引导到移动器组件(220C)的线圈阵列(240),使得移动器组件(220C)在平台(220A)上施加干扰; 以及(ii)评估由所述移动器组件(220C)产生的由所述移动器(250A)产生的所述平台(220A)上的干扰所产生的一个或多个力。 此外,用于产生补偿图(1402)的方法包括将多个激励信号顺序地引导到移动器组件(220C)的控制,并且确定由多个激励信号产生的控制命令。

    METHOD FOR DETERMING A COMMUTATION OFFSET AND FOR DETERMINING A COMPENSATION MAP FOR A STAGE
    7.
    发明申请
    METHOD FOR DETERMING A COMMUTATION OFFSET AND FOR DETERMINING A COMPENSATION MAP FOR A STAGE 有权
    用于确定报告偏移和用于确定阶段的补偿地图的方法

    公开(公告)号:US20120127447A1

    公开(公告)日:2012-05-24

    申请号:US13110760

    申请日:2011-05-18

    IPC分类号: G03B27/58

    摘要: A method for determining a commutation offset for a mover (250A) of a mover assembly (220C) that moves and positions a stage (220A) relative to a stage base (220B) includes controlling the mover assembly (220C) in a closed loop fashion to maintain the position of the stage (220A) along a first axis and along a second axis with the stage (220A) levitated above the stage base (220B). The method also includes the steps of (i) directing current to a coil array (240) of the mover assembly (220C) so that the mover assembly (220C) imparts a disturbance on the stage (220A); and (ii) evaluating one or more forces generated by the mover assembly (220C) as a result of the disturbance on the stage (220A) created by the mover (250A). Further, a method for generating a compensation map (1402) includes sequentially directing a plurality of excitation signals to the control of the mover assembly (220C) and determining the control commands that result from the plurality of excitation signals.

    摘要翻译: 用于确定相对于台架(220B)移动和定位平台(220A)的移动器组件(220C)的移动器(250A)的换向偏移的方法包括以闭环方式控制所述动子组件(220C) 以使台架(220A)沿着第一轴线并且沿着第二轴线保持台架(220A)的位置,台架(220A)悬浮在平台底座(220B)上方。 该方法还包括以下步骤:(i)将电流引导到移动器组件(220C)的线圈阵列(240),使得移动器组件(220C)在平台(220A)上施加干扰; 以及(ii)评估由所述移动器组件(220C)产生的由所述移动器(250A)产生的所述平台(220A)上的干扰所产生的一个或多个力。 此外,用于产生补偿图(1402)的方法包括将多个激励信号顺序地引导到移动器组件(220C)的控制,并且确定由多个激励信号产生的控制命令。

    METHOD FOR DETERMINING A COMMUTATION OFFSET AND FOR DETERMINING A COMPENSATION MAP FOR A STAGE
    8.
    发明申请
    METHOD FOR DETERMINING A COMMUTATION OFFSET AND FOR DETERMINING A COMPENSATION MAP FOR A STAGE 有权
    用于确定报告偏移量和确定阶段补偿地图的方法

    公开(公告)号:US20120113405A1

    公开(公告)日:2012-05-10

    申请号:US13101264

    申请日:2011-05-05

    IPC分类号: G03B27/58 G05B1/06

    摘要: A method for determining a commutation offset for a mover (250A) of a mover assembly (220C) that moves and positions a stage (220A) relative to a stage base (220B) includes controlling the mover assembly (220C) in a closed loop fashion to maintain the position of the stage (220A) along a first axis and along a second axis with the stage (220A) levitated above the stage base (220B). The method also includes the steps of (i) directing current to a coil array (240) of the mover assembly (220C) so that the mover assembly (220C) imparts a disturbance on the stage (220A); and (ii) evaluating one or more forces generated by the mover assembly (220C) as a result of the disturbance on the stage (220A) created by the mover (250A). Further, a method for generating a compensation map (1402) includes sequentially directing a plurality of excitation signals to the control of the mover assembly (220C) and determining the control commands that result from the plurality of excitation signals.

    摘要翻译: 用于确定相对于台架(220B)移动和定位平台(220A)的移动器组件(220C)的移动器(250A)的换向偏移的方法包括以闭环方式控制所述动子组件(220C) 以使台架(220A)沿着第一轴线并且沿着第二轴线保持台架(220A)的位置,台架(220A)悬浮在平台底座(220B)上方。 该方法还包括以下步骤:(i)将电流引导到移动器组件(220C)的线圈阵列(240),使得移动器组件(220C)在平台(220A)上施加干扰; 以及(ii)评估由所述移动器组件(220C)产生的由所述移动器(250A)产生的所述平台(220A)上的干扰所产生的一个或多个力。 此外,用于产生补偿图(1402)的方法包括将多个激励信号顺序地引导到移动器组件(220C)的控制,并且确定由多个激励信号产生的控制命令。

    On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage
    9.
    发明授权
    On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage 有权
    用于识别和补偿由多个执行器在多轴平台上产生的力 - 波动和侧力的机上方法

    公开(公告)号:US08140288B2

    公开(公告)日:2012-03-20

    申请号:US11986314

    申请日:2007-11-19

    IPC分类号: G01L25/00

    CPC分类号: G03F7/70758 G03F7/70725

    摘要: Methods, apparatus, and systems are disclosed for identifying force-ripple and/or side-forces in actuators used for moving a multiple-axis stage. The identified force-ripple and/or side-forces can be mapped, and maps of corresponding position-dependent compensation ratios useful for correcting same are obtained. The methods are especially useful for stages providing motion in at least one degree of freedom using multiple (redundant) actuators. In an exemplary method a stage member is displaced, using at least one selected actuator, multiple times over a set distance in the range of motion of the subject actuator(s). Each displacement has a predetermined trajectory and respective starting point in the range. For each displacement, respective section force-command(s) are extracted and normalized to a reference section force-command to define a section compensation-ratio. Multiple section compensation-ratios are assembled, as functions of displacement in the range, to provide a map of compensation ratios for the actuator(s) throughout the range.

    摘要翻译: 公开了用于识别用于移动多轴平台的致动器中的力波动和/或侧向力的方法,装置和系统。 可以对所识别的力 - 纹波和/或侧向力进行映射,并且获得用于校正相应的位置相关的补偿比的映射。 这些方法对于使用多个(冗余)致动器在至少一个自由度中提供运动的阶段特别有用。 在示例性方法中,使用至少一个所选择的致动器,在主体致动器的运动范围内的设定距离上移动台架构件多次。 每个位移具有预定的轨迹和该范围内的相应起始点。 对于每个位移,提取相应的截面力命令并将其归一化为参考部分力命令以定义截面补偿比。 组合多段补偿比作为该范围内的位移的函数,以提供在整个范围内的致动器的补偿比的图。

    Auto calibration of attraction-only type actuator commutations
    10.
    发明申请
    Auto calibration of attraction-only type actuator commutations 失效
    仅吸引型执行器换向的自动校准

    公开(公告)号:US20050173992A1

    公开(公告)日:2005-08-11

    申请号:US10775720

    申请日:2004-02-09

    摘要: A stage assembly (220) for moving a device (200) includes a stage (208), an attraction-only type actuator pair (426) that moves the stage (208), and a control system (24). In one embodiment, the actuator pair (426) includes a first electromagnet (436F), a first conductor (438F) and a first target (440F) having a first target surface (442F). The actuator pair also includes a second electromagnet (436S), a second conductor (438S) and a second target (440S) having a second target surface (442S). The first electromagnet (436F) is positioned at a first angle θ1 relative to a first target surface (442F) and the second electromagnet (436S) is positioned at a second angle θ2 relative to the second target surface (442S). The control system (24) directs a first current to one or more of the electromagnets based on at least one of the angles θ1, θ2. Further, one or more electromagnets (436) can include a first measurement point and a second measurement point. The control system (24) can direct current to the actuator pair (426) based on the relative distance between the first and second measurement points and the corresponding target surface (442).

    摘要翻译: 用于移动装置(200)的平台组件(220)包括台(208),移动台(208)的仅吸引型致动器对(426)和控制系统(24)。 在一个实施例中,致动器对(426)包括具有第一目标表面(442F)的第一电磁体(436F),第一导体(438F)和第一靶(440F)。 致动器对还包括具有第二目标表面(442S)的第二电磁体(436S),第二导体(438S)和第二靶(440S)。 第一电磁体(436F)相对于第一目标表面(442F)位于第一角度θ1,并且第二电磁体(436S)位于第二角度θ 2 相对于第二目标表面(442S)。 控制系统(24)基于角度θ1,θ2 2中的至少一个将第一电流引导到一个或多个电磁体。 此外,一个或多个电磁体(436)可以包括第一测量点和第二测量点。 控制系统(24)可以基于第一和第二测量点与相应的目标表面(442)之间的相对距离将电流引导到致动器对(426)。