公开(公告)号：US20180174911A1

公开(公告)日：2018-06-21

申请号：US15825035

申请日：2017-11-28

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： SHINSUKE KOMATSU ,  YOSHIO OKAYAMA ,  MASAKI NOBUOKA

IPC: H01L21/78 ,  C30B29/40 ,  H01L21/02 ,  C01F17/00 ,  C30B25/18 ,  H01L33/00

CPC classification number: H01L21/7813 ,  C01F17/0025 ,  C30B25/18 ,  C30B29/403 ,  H01L21/02428 ,  H01L21/0254 ,  H01L33/007

Abstract: An RAMO4 substrate that includes an RAMO4 monocrystalline substrate formed of a single crystal represented by general formula RAMO4, wherein R represents one or more trivalent elements selected from the group consisting of Sc, In, Y, and lanthanoid elements, A represents one or more trivalent elements selected from the group consisting of Fe(III), Ga, and Al, and M represents one or more divalent elements selected from the group consisting of Mg, Mn, Fe(II), Co, Cu, Zn, and Cd. The RAMO4 monocrystalline substrate has a principal surface with a plurality of grooves. The principal surface has an off-angle θ with respect to a cleaving surface of the single crystal. The RAMO4 monocrystalline substrate satisfies tan θ≤Wy/Wx, where Wx is the width at the top surface of a raised portion between the grooves, and Wy is the height of the raised portion.