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1.发明授权Lithography apparatus using extreme UV radiation and having a volatile organic compounds sorbing member comprising a getter material 有权使用极紫外辐射的光刻设备并具有包含吸气材料的挥发性有机化合物吸附构件公开(公告)号：US08399861B2
公开(公告)日：2013-03-19
申请号：US12812948
申请日：2009-02-10
申请人： Paolo Manini , Andrea Conte
发明人： Paolo Manini , Andrea Conte
CPC分类号： G03F7/70916
摘要： A lithography apparatus (10) is disclosed using extreme UV radiation and having a hydrocarbon sorbing member comprising a getter material arranged in the process chamber (13) of said apparatus.
摘要翻译： 公开了一种光刻设备（10），其使用极紫外辐射并且具有包含布置在所述设备的处理室（13）中的吸气剂材料的烃吸附构件。
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2.发明申请公开(公告)号：US20100309446A1
公开(公告)日：2010-12-09
申请号：US12812948
申请日：2009-02-10
申请人： Paolo Manini , Andrea Conte
发明人： Paolo Manini , Andrea Conte
IPC分类号： G03B27/52
CPC分类号： G03F7/70916
摘要： A lithography apparatus (10) is disclosed using extreme UV radiation and having a hydrocarbon sorbing member comprising a getter material arranged in the process chamber (13) of said apparatus.
摘要翻译： 公开了一种光刻设备（10），其使用极紫外辐射并且具有包含布置在所述设备的处理室（13）中的吸气剂材料的烃吸附构件。
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公开(公告)号：US20130125874A1
公开(公告)日：2013-05-23
申请号：US13813902
申请日：2011-07-22
IPC分类号： F24J2/05
摘要： Improved solar collectors receiver tubes are described. The improved solar collectors receiver tubes have a getter system containing one or more getter materials in the form of pills housed a single line in a suitable holder.
摘要翻译： 描述了改进的太阳能集热器接收管。 改进的太阳能收集器接收管具有吸气剂系统，其包含一种或多种药丸形式的吸气剂材料，其在合适的保持器中容纳单线。
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公开(公告)号：US08287247B2
公开(公告)日：2012-10-16
申请号：US13202890
申请日：2010-03-09
申请人： Antonio Bonucci , Andrea Conte , Paolo Manini
发明人： Antonio Bonucci , Andrea Conte , Paolo Manini
摘要： A combined pumping system comprising a getter pump and an ion pump is described. The getter pump and the ion pump are mounted in series on a same flange and are respectively arranged on opposite sides thereof so that both getter and ion pumps conductance are maximized towards gas flux sources in a vacuum chamber in order to improve the vacuum level of the system.
摘要翻译： 描述了包括吸气泵和离子泵的组合泵送系统。 吸气泵和离子泵串联安装在相同的法兰上，并且分别布置在其相对侧上，使得吸气剂和离子泵的电导率都朝向真空室中的气体通量源最大化，以便提高真空室的真空度 系统。
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公开(公告)号：US20120014814A1
公开(公告)日：2012-01-19
申请号：US13202890
申请日：2010-03-09
申请人： Antonio Bonucci , Andrea Conte , Paolo Manini
发明人： Antonio Bonucci , Andrea Conte , Paolo Manini
IPC分类号： H01J41/12
摘要： A combined pumping system comprising a getter pump and an ion pump is described. The getter pump and the ion pump are mounted in series on a same flange and are respectively arranged on opposite sides thereof so that both getter and ion pumps conductance are maximized towards gas flux sources in a vacuum chamber in order to improve the vacuum level of the system.
摘要翻译： 描述了包括吸气泵和离子泵的组合泵送系统。 吸气泵和离子泵串联安装在相同的法兰上，并且分别布置在其相对侧上，使得吸气剂和离子泵的电导率都朝向真空室中的气体通量源最大化，以便提高真空室的真空度 系统。
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公开(公告)号：US20050000471A1
公开(公告)日：2005-01-06
申请号：US10909889
申请日：2004-08-02
申请人： Paolo Manini
发明人： Paolo Manini
CPC分类号： F24H1/182
摘要： A gas fed water-heater has a double wall container (1) inside of which are arranged a burner (2) and a tank (3) of the water to be heated. At least in the portion (5′) adjacent to the burner (2) of the interspace (5) between the two walls of the container (1), a thermoinsulating system is placed comprising an inner layer (6) of glass wool or rock wool and an outer layer (7) formed of at least one vacuum panel, which is formed by an envelope which encloses inert material powder having an average particle size of less than 100 nanometers.
摘要翻译： 供气式热水器具有双壁容器（1），其内部设置有待加热的水的燃烧器（2）和罐（3）。 至少在与容器（1）的两个壁之间的间隙（5）的燃烧器（2）相邻的部分（5'）中，放置一个热绝缘系统，其包括玻璃棉或岩石的内层（6） 羊毛和由至少一个真空面板形成的外层（7），其由包围平均粒度小于100纳米的惰性材料粉末的外壳形成。
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公开(公告)号：US5320496A
公开(公告)日：1994-06-14
申请号：US59375
申请日：1993-05-11
申请人： Paolo Manini , Bruno Ferrario
发明人： Paolo Manini , Bruno Ferrario
摘要： An improved high-capacity getter pump, comprising a plurality of porous sintered piled-up annuli made from a non-evaporable getter material and having: i) a first planar surface having a central hole; ii) a second planar surface, having a broader central hole, parallel to said first surface and spaced therefrom by a distance "d" of 1-10.5 mm; iii) a third intermediate planar surface, interposed between said first and second surfaces, spaced from said first surface by a thickness "t" of 0.5-5.0 mm and having a hole coincident with the hole of said first surface; wherein the first surface of a subsequent annulus is in contact with the second surface of a preceding annulus and wherein the first surface of a subsequent annulus is spaced from the third surface of a preceding annulus by a gas conductance having a height "c" of 0.5-10 mm.
摘要翻译： 一种改进的大容量吸气泵，包括由非蒸发性吸气材料制成的多个多孔烧结堆积环，其具有：i）具有中心孔的第一平面; ii）具有平行于所述第一表面并与其隔开距离“d”为1-10.5mm的较宽中心孔的第二平坦表面; iii）介于所述第一和第二表面之间的第三中间平面，与所述第一表面隔开0.5-5.0mm的厚度“t”，并具有与所述第一表面的孔重合的孔; 其中后续环形空间的第一表面与先前的环形空间的第二表面接触，并且其中随后的环形空间的第一表面通过具有高度“c”为0.5的气体导电与先前环形空间的第三表面间隔开 -10毫米。
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公开(公告)号：US06200494B1
公开(公告)日：2001-03-13
申请号：US08683386
申请日：1996-07-18
申请人： Paolo Manini , Claudio Boffito
发明人： Paolo Manini , Claudio Boffito
IPC分类号： H01J3520
CPC分类号： H01J7/186 , B01J20/06 , H01J7/183 , Y02E60/321
摘要： A combination of getter materials particularly suitable to maintain vacuum in devices which cannot be heated at temperatures higher than about 200° C. The getter comprises: a mixture MO/Pd between an oxide of a transition metal MO chosen among cobalt oxide, copper oxide or their combinations and metallic palladium, wherein the latter is present up to about 2% by weight; and a moisture sorbing material. In some applications it is possible to add to this combination a barium- and lithium-based alloy, preferably BaLi4. Getter devices for containing such a combination are also described.
摘要翻译： 吸气剂的组合特别适用于在高于约200℃的温度下不能加热的装置中保持真空。吸气剂包括：过渡金属MO的氧化物之间的混合物MO / Pd，其选自氧化钴，氧化铜或 它们的组合和金属钯，其中后者存在至多约2重量％; 和吸湿材料。 在一些应用中，可以向该组合添加钡和锂基合金，优选BaLi 4。 还描述了用于包含这种组合的吸气装置。
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公开(公告)号：US5911336A
公开(公告)日：1999-06-15
申请号：US656212
申请日：1996-06-07
CPC分类号： B65D81/2038
摘要： It is described a vacuum stabilizing device comprising a holder (100) impermeable to gases, in the form of a box open at its upper end, with edges folded and prolonged outwards to form a peripheral "wing" (104); a getter material (110) in the lower part of holder (100) inside a lower volume (II) defined by the bottom of the holder and by a lower septum (120), permeable to gases; a dryer material (130) is an upper volume (I) defined by said septum (120) and by a second upper septum (140) permeable to gases. A film (150) of a material impermeable to gases is hermetically fixed to the external part of wing (104), as to seal the whole device. A few methods for producing the device are also described.
摘要翻译： PCT No.PCT / IT94 / 00201 Sec。 371日期1996年6月7日第 102（e）日期1996年6月7日PCT 1994年12月2日PCT公布。 公开号WO95 / 16166 日期1996年6月15日描述了一种真空稳定装置，其包括不透气体的保持器（100），其形式为在其上端开口的箱体，边缘折叠并向外延伸以形成外围“翼”（104） ; 在保持器的底部限定的下容积（II）内的保持器（100）的下部中的吸气剂材料（110）和可渗透气体的下隔膜（120）; 干燥器材料（130）是由所述隔膜（120）和可渗透气体的第二上隔膜（140）限定的上部容积（I）。 不透气体的薄膜（150）气密地固定在机翼（104）的外部，以密封整个装置。 还描述了用于制造该装置的几种方法。
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公开(公告)号：US07036531B2
公开(公告)日：2006-05-02
申请号：US10751760
申请日：2004-01-05
IPC分类号： F16L9/14
CPC分类号： F16L59/065
摘要： A heat insulating system for tubular bodies includes at least two superimposed evacuated panels (4, 4′), at least one of the panels is formed essentially by an evacuated envelope which contains a polymeric filling material inside thereof, and at least one other panel is formed essentially by an evacuated envelope which has an inorganic filler present inside thereof, in the form of powders, fibers or their mixtures. Each of the evacuated panels (4, 4′) is rolled up around a rolling axis to such that two opposed edges thereof (5, 5′) parallel to the rolling axis are mutually set side by side. The rolled evacuated panels (4, 4′) are also arranged with the edges (5) of an evacuated panel (4) being staggered with respect to the edges (5′) of another evacuated panel (4′).
摘要翻译： 用于管状体的绝热系统包括至少两个叠置的抽真空板（4,4'），所述面板中的至少一个基本上由在其内部包含聚合物填充材料的真空外壳形成，并且至少一个其它面板是 基本上由其内部存在无机填料的真空外壳形成粉末，纤维或其混合物的形式。 每个抽真空板（4,4'）围绕滚动轴线卷起，使得平行于滚动轴线的两个相对的边缘（5,5'）彼此并排设置。 滚动的抽真空板（4,4'）也布置成使得真空板（4）的边缘（5）相对于另一抽真空板（4'）的边缘（5'）交错排列。
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