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    METHOD OF MAKING A COMPOSITION AND AQUEOUS COMPOSITION PREPARABLE THEREBY
    1.
    发明申请
    METHOD OF MAKING A COMPOSITION AND AQUEOUS COMPOSITION PREPARABLE THEREBY 审中-公开
    制备组合物的方法和可制备的水性组合物

    公开(公告)号：US20100160458A1

    公开(公告)日：2010-06-24

    申请号：US12625652

    申请日：2009-11-25

    申请人： Patricia M. Savu ,  Philip G. Clark ,  Michael J. Parent ,  Jason M. Kehren

    发明人： Patricia M. Savu ,  Philip G. Clark ,  Michael J. Parent ,  Jason M. Kehren

    IPC分类号： B01F17/26

    CPC分类号： C11D1/004 ,  C11D1/65

    摘要： A method of making a composition comprises independently providing a first component comprising a first compound, and a second components comprising a second compound; and combining the first component and the second component, wherein: a) the first compound is represented by and b) the second compound is represented by Rf represents a perfluoroalkyl group having from 1 to 12 carbon atoms. R1, R2, R3, and R4 each independently represent H or an alkyl group having from 1 to 6 carbon atoms. R5 represents H, an alkyl group having from 1 to 6 carbon atoms, or a hydroxyalkyl group having from 1 to 6 carbon atoms. R6 and R7 each independently represent an alkyl group having from 1 to 6 carbon atoms, or a hydroxyalkyl group having from 1 to 6 carbon atoms. Compositions preparable according to the method are also disclosed.

    摘要翻译： 制备组合物的方法包括独立地提供包含第一化合物的第一组分和包含第二化合物的第二组分; 并且组合第一组分和第二组分，其中：a）第一化合物由下式表示，b）第二化合物由Rf表示具有1至12个碳原子的全氟烷基表示。 R 1，R 2，R 3和R 4各自独立地表示H或具有1至6个碳原子的烷基。 R5表示H，具有1至6个碳原子的烷基或具有1至6个碳原子的羟烷基。 R6和R7各自独立地表示具有1至6个碳原子的烷基或具有1至6个碳原子的羟烷基。 还公开了根据该方法可制备的组合物。

    Perfluoroalkyl sulfonamides surfactants for photoresist rinse solutions
    2.
    发明授权
    Perfluoroalkyl sulfonamides surfactants for photoresist rinse solutions 有权
    用于光刻胶冲洗溶液的全氟烷基磺酰胺表面活性剂

    公开(公告)号：US09551936B2

    公开(公告)日：2017-01-24

    申请号：US14237193

    申请日：2012-08-01

    申请人： Jason M. Kehren ,  Patricia M. Savu ,  Matthew J. Pinnow

    发明人： Jason M. Kehren ,  Patricia M. Savu ,  Matthew J. Pinnow

    IPC分类号： G03F7/32 ,  G03F7/40 ,  H01L21/027

    CPC分类号： G03F7/40 ,  G03F7/405 ,  H01L21/0273

    摘要： A method of modifying a surface of a photoresist material including exposing the photoresist material to an aqueous ionic surfactant solution and varying the pH of the aqueous ionic surfactant solution until a fluorochemical layer is formed in or on the photoresist material. The aqueous ionic surfactant solution includes a perfluoroalkyl sulfonamide the formula: RfS02NH—R′ where Rf=CnF2n+1— and n=1 to 6, R′=—H, —CH3, and —CH2CH2OH. The aqueous ionic surfactant solution has a pH of within about 3 pH units of a pKa of the perfluoroalkyl sulfonamide.

    摘要翻译： 一种修饰光致抗蚀剂材料的表面的方法，包括将光致抗蚀剂材料暴露于水性离子表面活性剂溶液并改变离子表面活性剂水溶液的pH，直到在光致抗蚀剂材料中或其上形成含氟化合物层。 所述含水离子表面活性剂溶液包括式RfS02NH-R'的全氟烷基磺酰胺，其中Rf = CnF2n + 1-和n = 1-6，R'= -H，-CH3和-CH2CH2OH。 所述离子表面活性剂水溶液的pH值为所述全氟烷基磺酰胺的pKa的约3个pH单位。

    Coatings and methods for particle reduction
    3.
    发明授权
    Coatings and methods for particle reduction 有权
    涂料和减少颗粒的方法

    公开(公告)号：US07923133B2

    公开(公告)日：2011-04-12

    申请号：US12326629

    申请日：2008-12-02

    申请人： Jason M. Kehren ,  Patricia M. Savu

    发明人： Jason M. Kehren ,  Patricia M. Savu

    IPC分类号： G11B3/58 ,  B32B7/12 ,  B32B15/082 ,  B32B27/28

    CPC分类号： C09D133/16 ,  G11B5/82 ,  Y10T428/11 ,  Y10T428/1164 ,  Y10T428/28 ,  Y10T428/2852 ,  Y10T428/2891 ,  Y10T428/3154

    摘要： The present disclosure relates to high purity apparati, e.g., magnetic hard disk drives, and more specifically, to coatings for particle reduction of surfaces of such apparati. The provided coatings include thin polymer coatings with reactive pendant groups having crosslinking functionality and ability to anchor to substrate surfaces to suppress particle shedding from substrate surfaces. Provided is a substrate that includes a coating on at least a portion of the substrate that comprises a fluorinated acrylate random copolymer. Methods of reducing particulate contamination are also provided.

    摘要翻译： 本公开涉及高纯度装置，例如磁性硬盘驱动器，更具体地，涉及用于这种装置的表面的颗粒减少的涂层。 所提供的涂层包括具有交联官能团的反应性侧基的薄聚合物涂层和锚定到基材表面以抑制从基材表面脱落的颗粒的能力。 提供了一种基材，其在基材的至少一部分上包含含有氟化丙烯酸酯无规共聚物的涂层。 还提供减少颗粒污染的方法。