公开(公告)号：US08817250B2

公开(公告)日：2014-08-26

申请号：US13226032

申请日：2011-09-06

申请人： Paul Doyle ,  Guoheng Zhao ,  Alexander Belyaev ,  Christian H. Wolters ,  Howard W. Dando ,  Mehdi Vaez-Iravani ,  Carmela C. Moreno

发明人： Paul Doyle ,  Guoheng Zhao ,  Alexander Belyaev ,  J. Rex Runyon ,  Christian H. Wolters ,  Howard W. Dando ,  Mehdi Vaez-Iravani

IPC分类号： G01N21/00

CPC分类号： H01L21/6838

摘要： A tool for investigating a substrate, where the tool has a tool head for investigating the substrate, a chuck for disposing an upper surface of the substrate in proximity to the tool head, and an air bearing disposed on the tool head adjacent the substrate. The air bearing has a pressure source and a vacuum source, where the vacuum source draws the substrate toward the air bearing and the pressure source prevents the substrate from physically contacting the air bearing. The pressure source and the vacuum source work in cooperation to dispose the upper surface of the substrate at a known distance from the tool head. By using the air bearing as part of the tool in this manner, registration of the substrate to the tool head is accomplished relative to the upper surface of the substrate, not the back side of the substrate.

摘要翻译： 一种用于调查基板的工具，其中该工具具有用于检查基板的工具头，用于将基板的上表面设置在工具头附近的卡盘以及设置在与基板相邻的工具头上的空气轴承。 空气轴承具有压力源和真空源，其中真空源将基板拉向空气轴承，并且压力源防止基板物理接触空气轴承。 压力源和真空源协同工作，将衬底的上表面设置在与工具头一段已知距离处。 通过以这种方式使用空气轴承作为工具的一部分，基板相对于基板的上表面而不是基板的背面完成对准工具头。

公开(公告)号：US20120062877A1

公开(公告)日：2012-03-15

申请号：US13226032

申请日：2011-09-06

申请人： Paul Doyle ,  Guoheng Zhao ,  Alexander Belyaev ,  J. Rex Runyon ,  Christian H. Wolters ,  Howard W. Dando ,  Mehdi Vaez-Iravani

发明人： Paul Doyle ,  Guoheng Zhao ,  Alexander Belyaev ,  J. Rex Runyon ,  Christian H. Wolters ,  Howard W. Dando ,  Mehdi Vaez-Iravani

IPC分类号： G01N21/88 ,  G01R31/26

CPC分类号： H01L21/6838

摘要： A tool for investigating a substrate, where the tool has a tool head for investigating the substrate, a chuck for disposing an upper surface of the substrate in proximity to the tool head, and an air bearing disposed on the tool head adjacent the substrate. The air bearing has a pressure source and a vacuum source, where the vacuum source draws the substrate toward the air bearing and the pressure source prevents the substrate from physically contacting the air bearing. The pressure source and the vacuum source work in cooperation to dispose the upper surface of the substrate at a known distance from the tool head. By using the air bearing as part of the tool in this manner, registration of the substrate to the tool head is accomplished relative to the upper surface of the substrate, not the back side of the substrate.

摘要翻译： 一种用于调查基板的工具，其中该工具具有用于检查基板的工具头，用于将基板的上表面设置在工具头附近的卡盘以及设置在与基板相邻的工具头上的空气轴承。 空气轴承具有压力源和真空源，其中真空源将基板拉向空气轴承，并且压力源防止基板物理接触空气轴承。 压力源和真空源协同工作，将衬底的上表面设置在与工具头一段已知距离处。 通过以这种方式使用空气轴承作为工具的一部分，基板相对于基板的上表面而不是基板的背面完成对准工具头。

公开(公告)号：US20110069306A1

公开(公告)日：2011-03-24

申请号：US12994793

申请日：2009-05-29

申请人： Paul Doyle ,  Guoheng Zhao ,  Alexander Belyaev ,  J. Rex Runyon

发明人： Paul Doyle ,  Guoheng Zhao ,  Alexander Belyaev ,  J. Rex Runyon

IPC分类号： G01N21/88 ,  G01R31/26

CPC分类号： H01L21/6838

摘要： A tool for investigating a substrate, where the tool has a tool head for investigating the substrate, a chuck for disposing an upper surface of the substrate in proximity to the tool head, and an air bearing disposed on the tool head adjacent the substrate. The air bearing has a pressure source and a vacuum source, where the vacuum source draws the substrate toward the air bearing and the pressure source prevents the substrate from physically contacting the air bearing. The pressure source and the vacuum source work in cooperation to dispose the upper surface of the substrate at a known distance from the tool head. By using the air bearing as part of the tool in this manner, registration of the substrate to the tool head is accomplished relative to the upper surface of the substrate, not the back side of the substrate.

摘要翻译： 一种用于调查基板的工具，其中该工具具有用于检查基板的工具头，用于将基板的上表面设置在工具头附近的卡盘以及设置在与基板相邻的工具头上的空气轴承。 空气轴承具有压力源和真空源，其中真空源将基板拉向空气轴承，并且压力源防止基板物理接触空气轴承。 压力源和真空源协同工作，将衬底的上表面设置在与工具头一段已知距离处。 通过以这种方式使用空气轴承作为工具的一部分，基板相对于基板的上表面而不是基板的背面完成对准工具头。