公开(公告)号：US4956817A

公开(公告)日：1990-09-11

申请号：US199008

申请日：1988-05-26

申请人： Paul E. West ,  Jamshid Jahanmir

发明人： Paul E. West ,  Jamshid Jahanmir

IPC分类号： G11B9/00 ,  G11B23/42 ,  G11C11/22

CPC分类号： G11B23/42 ,  G11B9/14 ,  G11B9/1445 ,  G11B9/1481 ,  G11C11/22 ,  B82Y10/00 ,  Y10S977/947

摘要： A high density computer memory which utilizes a probe operating with two degrees of freedom over a memory area, the probe location altered by drive systems incorporating piezoelectric elements arranged to drive the probe parallel to the plane of the memory surface. Sensors to provide an indication of the location of the probe independent of the drive system are provided. The memory system incorporates an underlying substrate upon which is deposited one of a variety of elements or compounds chosen to effect a change in physical-chemical properties when a data bit is written on the surface. The probe is moved over the surface at a distance which produces a current from Schottky or Field effect.

摘要翻译： 一种高密度计算机存储器，其利用在存储区域上以两个自由度操作的探针，所述探针位置由包含压电元件的驱动系统改变，所述驱动系统被布置成驱动探针平行于存储器表面的平面。 提供了传感器以提供独立于驱动系统的探针位置的指示。 存储系统包含下面的衬底，在其上沉积了当将数据位写在表面上时选择的多种元素或化合物之一来实现物理化学性质的变化。 探针以一定距离移动到表面上，该距离产生肖特基或场效应的电流。

公开(公告)号：US5173605A

公开(公告)日：1992-12-22

申请号：US848106

申请日：1992-03-09

申请人： John B. Hayes ,  Jamshid Jahanmir ,  Eric M. Frey

发明人： John B. Hayes ,  Jamshid Jahanmir ,  Eric M. Frey

IPC分类号： G01Q10/04 ,  G01Q70/04 ,  H01L41/09

CPC分类号： G01Q10/04 ,  B82Y35/00 ,  G01Q70/04 ,  H02N2/0095 ,  Y10S977/872

摘要： A scanning probe microscope includes a base, an inner piezoelectric tube, and an outer piezoelectric tube, with a first end of the outer piezoelectric tube connected to the base. A first end of the inner piezoelectric tube is rigidly connected to a second end of the outer piezoelectric tube. Thin inner conductors are disposed on the inner surfaces of the inner piezoelectric tube and the outer piezoelectric tube, and quadrant conductors are disposed on the outer surfaces of the inner piezoelectric tube and the outer piezoelectric tube. Separate x, y, and z scan control voltage signals are applied to various quadrant conductors of the inner and outer piezoelectric tubes to control scanning of the free end of the inner tube in the x, y, and z directions, respectively.

摘要翻译： 扫描探针显微镜包括底座，内部压电管和外部压电管，外部压电管的第一端连接到基座。 内部压电管的第一端刚性地连接到外部压电管的第二端。 薄内导体设置在内压电管和外压电管的内表面上，象限导体设置在内压电管和外压电管的外表面上。 将分离的x，y和z扫描控制电压信号施加到内部和外部压电管的各种象限导体，以分别控制内部管在x，y和z方向上的自由端的扫描。

公开(公告)号：US5200617A

公开(公告)日：1993-04-06

申请号：US930096

申请日：1992-08-13

申请人： John B. Hayes ,  Jamshid Jahanmir ,  Eric M. Frey

发明人： John B. Hayes ,  Jamshid Jahanmir ,  Eric M. Frey

IPC分类号： G01Q30/06 ,  G01Q10/04 ,  G01Q70/04 ,  H01L41/09

CPC分类号： G01Q10/04 ,  B82Y35/00 ,  G01Q70/04 ,  H01L41/0906 ,  H02N2/0095 ,  Y10S977/872

摘要： A scanning probe microscope includes a base, an inner piezoelectric tube, and an outer PMN translator arrangement including three PMN posts, with first ends of the PMN posts connected to the base. A first end of the inner piezoelectric tube is rigidly connected to second ends of the PMN posts. Inner quadrant conductors are disposed on the inner surfaces of the inner piezoelectric tube, and outer quadrant conductors are disposed on the outer surfaces of the inner piezoelectric tube. Separate x and y scan control voltage signals are applied to corresponding opposed quadrant conductors of the inner piezoelectric tube to control scanning of the free end of the inner tube in the x and y directions. A z scan control voltage is produced by a servo control circuit in response to a probe signal and applied to the PMN posts, which have negligible hysteresis. The servo control circuit refers to a look-up table to correct non-linearities of the PMN posts.

摘要翻译： 扫描探针显微镜包括基座，内部压电管和外部PMN转换器装置，其包括三个PMN柱，PMN柱的第一端连接到基座。 内部压电管的第一端刚性连接到PMN柱的第二端。 内部象限导体设置在内部压电管的内表面上，外部象限导体设置在内部压电管的外表面上。 单独的x和y扫描控制电压信号被施加到内部压电管的对应的相对的象限导体，以控制在x和y方向上内管的自由端的扫描。 z扫描控制电压由伺服控制电路响应于探头信号产生并施加到具有可忽略的滞后的PMN柱。 伺服控制电路是指用于校正PMN柱的非线性的查找表。

公开(公告)号：US5103094A

公开(公告)日：1992-04-07

申请号：US694827

申请日：1991-05-02

申请人： John B. Hayes ,  Jamshid Jahanmir ,  Eric M. Frey

发明人： John B. Hayes ,  Jamshid Jahanmir ,  Eric M. Frey

IPC分类号： G01Q30/02 ,  G01Q10/04 ,  G01Q60/00 ,  G01Q70/04 ,  H01L41/09

CPC分类号： G01Q10/04 ,  B82Y35/00 ,  G01Q70/04 ,  H02N2/0095 ,  Y10S977/871 ,  Y10S977/872

摘要： A scanning probe microscope includes a base, an inner piezoelectric tube, and an outer piezoelectric tube, with a first end of the outer piezoelectric tube connected to the base. A first end of the inner piezoelectric tube is rigidly connected to a second end of the outer piezoelectric tube. Thin inner conductors are disposed on the inner surfaces of the inner piezoelectric tube and the other piezoelectric tube, and quadrant conductors are disposed on the outer surfaces of the inner piezoelectric tube and the outer piezoelectric tube. Variable voltages are applied to the quadrant conductors of the outer piezoelectric tube and the inner piezoelectric tube and varied to cause lateral and axial movement of the second end of the outer piezoelectric tube and also to cause lateral and perpendicular movement of the second end of the inner piezoelectric tube relative to its first end. A probe having a tip is connected to the second end of the inner piezoelectric tube and scans the surface of a sample in response to the applied quadrant conductor voltages. A control system senses current or other parameter sensed by the tip of the probe and indicative of distance of the probe tip from the scanned surface to control application of the quadrant voltages.

摘要翻译： 扫描探针显微镜包括底座，内部压电管和外部压电管，外部压电管的第一端连接到基座。 内部压电管的第一端刚性地连接到外部压电管的第二端。 薄内导体设置在内压电管和另一压电管的内表面上，象限导体设置在内压电管和外压电管的外表面上。 可变电压被施加到外部压电管和内部压电管的象限导体，并且变化以引起外部压电管的第二端的横向和轴向移动，并且还引起内部压电管的第二端的横向和垂直移动 压电管相对于其第一端。 具有尖端的探针连接到内压电管的第二端，并响应于所施加的象限导体电压扫描样品的表面。 控制系统感测由探针的尖端感测的电流或其它参数，并且指示探针尖端与扫描表面的距离以控制象限电压的施加。