公开(公告)号：US07522793B2

公开(公告)日：2009-04-21

申请号：US11580628

申请日：2006-10-12

申请人： Pawel Drabarek ,  Jochen Straehle ,  Stefan Franz ,  Matthias Fleischer ,  Ralf Kochendoerfer ,  David Rychtarik ,  Jan Fischer

发明人： Pawel Drabarek ,  Jochen Straehle ,  Stefan Franz ,  Matthias Fleischer ,  Ralf Kochendoerfer ,  David Rychtarik ,  Jan Fischer

IPC分类号： G02B6/26 ,  G02B6/38

CPC分类号： G02B6/32 ,  G02B6/3886

摘要： A device for coupling beam guides of optical systems for unidirectional or bidirectional transmission of beams via a beam transition between the optical systems is provided, the device having a connecting device and mechanical centering means. The connecting device provides a magnetic coupling for implementing a coupling connection in a coupling area. The centering means are situated opposite one another on the optical systems and coupled in such a way to cause the beam guides to self-center due to the attraction caused by the magnetic forces.

摘要翻译： 提供了一种用于耦合用于通过光学系统之间的光束过渡来单向或双向传输光束的光学系统的装置，该装置具有连接装置和机械定心装置。 连接装置提供用于在耦合区域中实现耦合连接的磁耦合。 定心装置在光学系统上彼此相对设置并且以这样的方式耦合，以使得光束引导件由于由磁力引起的吸引力而自对中心。

公开(公告)号：US20070122079A1

公开(公告)日：2007-05-31

申请号：US11580628

申请日：2006-10-12

申请人： Pawel Drabarek ,  Jochen Straehle ,  Stefan Franz ,  Matthias Fleischer ,  Ralf Kochendoerfer ,  David Rychtarik ,  Jan Fischer

发明人： Pawel Drabarek ,  Jochen Straehle ,  Stefan Franz ,  Matthias Fleischer ,  Ralf Kochendoerfer ,  David Rychtarik ,  Jan Fischer

IPC分类号： G02B6/26 ,  G02B6/42

CPC分类号： G02B6/32 ,  G02B6/3886

摘要： A device for coupling beam guides of optical systems for unidirectional or bidirectional transmission of beams via a beam transition between the optical systems is provided, the device having a connecting device and mechanical centering means. The connecting device provides a magnetic coupling for implementing a coupling connection in a coupling area. The centering means are situated opposite one another on the optical systems and coupled in such a way to cause the beam guides to self-center due to the attraction caused by the magnetic forces.

摘要翻译： 提供了一种用于耦合用于通过光学系统之间的光束过渡来单向或双向传输光束的光学系统的装置，该装置具有连接装置和机械定心装置。 连接装置提供用于在耦合区域中实现耦合连接的磁耦合。 定心装置在光学系统上彼此相对设置并且以这样的方式耦合，以使得光束引导件由于由磁力引起的吸引力而自对中心。

公开(公告)号：US20070229840A1

公开(公告)日：2007-10-04

申请号：US11731052

申请日：2007-03-30

申请人： Pawel Drabarek ,  Stefan Franz ,  Matthias Fleischer

发明人： Pawel Drabarek ,  Stefan Franz ,  Matthias Fleischer

IPC分类号： G01B9/02

CPC分类号： G01B9/0209 ,  G01B9/02065 ,  G01B2290/20

摘要： An interferometric measuring device includes a short-coherent radiation source and a system composed of a modulation interferometer having a first and a second modulation interferometer beam path and a downstream reference interferometer, the radiation being split in the reference interferometer into a first beam path and a second beam path. If a dispersive optical component is situated in at least one beam path of the reference interferometer, a different optical path length becomes effective for radiation of a different wavelength in the beam path having the dispersive optical component. Therefore, if one measuring probe is replaced with another one having a modified optical path length, the modulation interferometer may be adjusted and the reference interferometer may remain unchanged. The reference interferometer may thus be used over an extended adjustment path of the modulation interferometer without optical components having to be replaced for adjusting the different path difference of measuring probes in the reference interferometer.

摘要翻译： 干涉测量装置包括短相干辐射源和由具有第一和第二调制干涉仪光束路径和下游参考干涉仪的调制干涉仪组成的系统，所述辐射在参考干涉仪中分裂为第一光束路径和 第二光束路径。 如果色散光学部件位于参考干涉仪的至少一个光束路径中，则具有分散光学部件的光束路径中不同光程长度对于不同波长的辐射是有效的。 因此，如果一个测量探针被具有修改的光程长度的另一个测量探头所替代，则可以调整调制干涉仪并且参考干涉仪可以保持不变。 因此，参考干涉仪可以在调制干涉仪的扩展调整路径上使用，而不需要替换光学组件来调整参考干涉仪中的测量探针的不同路径差。

公开(公告)号：US07518729B2

公开(公告)日：2009-04-14

申请号：US11731052

申请日：2007-03-30

申请人： Pawel Drabarek ,  Stefan Franz ,  Matthias Fleischer

发明人： Pawel Drabarek ,  Stefan Franz ,  Matthias Fleischer

IPC分类号： G01B9/02

CPC分类号： G01B9/0209 ,  G01B9/02065 ,  G01B2290/20

摘要： An interferometric measuring device includes a short-coherent radiation source and a system composed of a modulation interferometer having a first and a second modulation interferometer beam path and a downstream reference interferometer, the radiation being split in the reference interferometer into a first beam path and a second beam path. If a dispersive optical component is situated in at least one beam path of the reference interferometer, a different optical path length becomes effective for radiation of a different wavelength in the beam path having the dispersive optical component. Therefore, if one measuring probe is replaced with another one having a modified optical path length, the modulation interferometer may be adjusted and the reference interferometer may remain unchanged. The reference interferometer may thus be used over an extended adjustment path of the modulation interferometer without optical components having to be replaced for adjusting the different path difference of measuring probes in the reference interferometer.

摘要翻译： 干涉测量装置包括短相干辐射源和由具有第一和第二调制干涉仪光束路径和下游参考干涉仪的调制干涉仪组成的系统，所述辐射在参考干涉仪中分裂为第一光束路径和 第二光束路径。 如果色散光学部件位于参考干涉仪的至少一个光束路径中，则具有分散光学部件的光束路径中不同光程长度对于不同波长的辐射是有效的。 因此，如果一个测量探针被具有修改的光程长度的另一个测量探头所替代，则可以调整调制干涉仪并且参考干涉仪可以保持不变。 因此，参考干涉仪可以在调制干涉仪的扩展调整路径上使用，而不需要替换光学组件来调整参考干涉仪中的测量探针的不同路径差。

公开(公告)号：US20070229839A1

公开(公告)日：2007-10-04

申请号：US11726175

申请日：2007-03-20

申请人： Stefan Franz ,  Matthias Fleischer

发明人： Stefan Franz ,  Matthias Fleischer

IPC分类号： G01B9/02

CPC分类号： G02B26/0883 ,  G01B2290/65

摘要： A sensor objective at the exit of a measuring branch of a measuring probe of an interferometric measuring unit for detecting the shape, roughness or distance of the surface of a measured object, the interferometric measuring unit including a modulation interferometer and the measuring probe being optically connected to the modulation interferometer via an optical fiber system and the sensor objective having a focusing element and a downstream deflection element for coupling out and coupling back in a measuring beam directed toward the surface to be measured and reflected from the latter. The deflection element includes at least two optical components, each having a shared interface, the deflection angle of the at least one beam deflected to a system longitudinal axis being settable by mutual displacement and/or rotation of the optical components during mounting. The mutual displacement and/or rotation of the optical components is/are performed at the shared interface(s). Therefore, arbitrary deflection angles for the beam may be set using a small number of optical components which are tailored to one another. Because no components have to be manufactured for specific customers, there is a significant reduction in manufacturing costs as well as significantly shortened manufacturing and therefore delivery times. Because the interfaces of the optical components are joined to one another without a wedge-shaped gap during the gluing of the components after adjustment, the disadvantageous influence of non-reproducible adhesive shrinkage is eliminated.

摘要翻译： 用于检测测量对象表面的形状，粗糙度或距离的干涉测量单元的测量探针的测量分支出口处的传感器物镜，所述干涉测量单元包括调制干涉仪和所述测量探针被光学连接 通过光纤系统到调制干涉仪，并且传感器物镜具有聚焦元件和下游偏转元件，用于在指向待测量表面并从后者反射的测量光束中耦合出并耦合回来。 偏转元件包括至少两个光学部件，每个光学部件具有共享的接口，偏转到系统纵向轴线的至少一个光束的偏转角可以通过在安装期间光学部件的相互位移和/或旋转而被设定。 光学部件的相互位移和/或旋转在共享接口处执行。 因此，可以使用彼此定制的少量光学部件来设定光束的任意偏转角。 由于不需要为特定客户制造组件，所以制造成本显着降低，制造成本显着缩短，交货时间也大大缩短。 由于光学部件的界面在调整之后的部件粘合期间彼此接合而没有楔形间隙，因此消除了不可再现的粘合剂收缩的不利影响。

公开(公告)号：US07889354B2

公开(公告)日：2011-02-15

申请号：US12067501

申请日：2006-09-15

申请人： Stefan Franz ,  Matthias Fleischer

发明人： Stefan Franz ,  Matthias Fleischer

IPC分类号： G01B11/02

CPC分类号： G01B9/02049 ,  G01B9/02065 ,  G01B9/0209

摘要： A device for an interferometric measuring device having a first interferometer and a second interferometer, short coherent radiation being supplied to the first interferometer via a radiation source which is split into to beam components by a first beam splitter; and the optical path length in a beam component being longer than in the other beam component to the effect that the optical path difference is greater than the coherence length of the radiation; before emerging from the first interferometer, the two beam components being recombined and supplied to the second interferometer, which splits the radiation into two additional beam components; the optical path lengths of the two beam components being different to the effect that the optical path difference registered in the first interferometer is balanced again; the optical path length for the respective beam component in the first and the second interferometer being able to be set by at least one movable optical component, and the movable optical components are coupled to each other mechanically. A method for balancing an optical path difference in such an interferometric measuring device, the optical path differences between the beam components being changed in the two interferometers by mechanically coupled movable optical components at the same time and by the same absolute amount. By doing this, path differences in the beam components of the interferometers are able to be varied in one working step, the conditions for the formation of interference being complied with.

摘要翻译： 一种用于具有第一干涉仪和第二干涉仪的干涉测量装置的装置，短的相干辐射经由辐射源提供给第一干涉仪，该辐射源通过第一分束器分成束分量; 并且光束分量中的光路长度比另一个光束分量中的光程长度大，使得光程差大于辐射的相干长度; 在从第一干涉仪出射之前，将两个光束分量重新组合并提供给第二干涉仪，其将辐射分成两个额外的光束分量; 两个光束分量的光路长度不同于第一干涉仪中记录的光路差异再次平衡的影响; 第一和第二干涉仪中的各个光束分量的光路长度能够由至少一个可移动光学部件设置，并且可移动的光学部件彼此机械耦合。 一种用于平衡这种干涉测量装置中的光程差的方法，通过机械耦合的可移动光学部件同时和相同的绝对量在两个干涉仪之间改变光束分量之间的光程差。 通过这样做，可以在一个工作步骤中改变干涉仪的光束分量中的路径差异，从而达到形成干扰的条件。

公开(公告)号：US20070268584A1

公开(公告)日：2007-11-22

申请号：US11652942

申请日：2007-01-11

申请人： Stefan Franz ,  Matthias Fleischer

发明人： Stefan Franz ,  Matthias Fleischer

IPC分类号： G02B27/00

CPC分类号： G01B11/2441 ,  G01B9/02065 ,  G01B9/0209 ,  G01B2290/35

摘要： The present invention relates to an interferometric measuring device having a short-coherent radiation source, a modulation interferometer and a downstream reference interferometer connected thereto. The mechanical coupling between the reference interferometer and the modulation interferometer is provided with a backlash. For equalizing an optical path difference in the interferometric measuring device, an optical path difference established in the modulation interferometer is reset in the reference interferometer. The optical path differences between the partial beams in the modulation interferometer and between the partial beams in the reference interferometer may be changed via optical components mechanically coupled with the aid of a backlash, the movable optical component of the reference interferometer following a movement of the movable optical component of the modulation interferometer after passing a backlash distance in the backlash.

摘要翻译： 本发明涉及具有短相干辐射源，调制干涉仪和连接到其上的下行参考干涉仪的干涉测量装置。 参考干涉仪与调制干涉仪之间的机械耦合提供了间隙。 为了均衡干涉测量装置中的光程差，在参考干涉仪中复位在调制干涉仪中建立的光程差。 调制干涉仪中的部分光束和参考干涉仪中的部分光束之间的光程差可以通过借助于间隙机械耦合的光学部件来改变，参考干涉仪的可移动光学部件跟随可移动的移动 通过间隙中的间隙距离后的调制干涉仪的光学部件。

公开(公告)号：US07545506B2

公开(公告)日：2009-06-09

申请号：US11652942

申请日：2007-01-11

申请人： Stefan Franz ,  Matthias Fleischer

发明人： Stefan Franz ,  Matthias Fleischer

IPC分类号： G01B11/02

CPC分类号： G01B11/2441 ,  G01B9/02065 ,  G01B9/0209 ,  G01B2290/35

摘要： The present invention relates to an interferometric measuring device having a short-coherent radiation source, a modulation interferometer and a downstream reference interferometer connected thereto. The mechanical coupling between the reference interferometer and the modulation interferometer is provided with a backlash. For equalizing an optical path difference in the interferometric measuring device, an optical path difference established in the modulation interferometer is reset in the reference interferometer. The optical path differences between the partial beams in the modulation interferometer and between the partial beams in the reference interferometer may be changed via optical components mechanically coupled with the aid of a backlash, the movable optical component of the reference interferometer following a movement of the movable optical component of the modulation interferometer after passing a backlash distance in the backlash.

摘要翻译： 本发明涉及具有短相干辐射源，调制干涉仪和连接到其上的下行参考干涉仪的干涉测量装置。 参考干涉仪与调制干涉仪之间的机械耦合提供了间隙。 为了均衡干涉测量装置中的光程差，在参考干涉仪中复位在调制干涉仪中建立的光程差。 调制干涉仪中的部分光束和参考干涉仪中的部分光束之间的光程差可以通过借助于间隙机械耦合的光学部件来改变，参考干涉仪的可移动光学部件跟随可移动的移动 通过间隙中的间隙距离后的调制干涉仪的光学部件。

公开(公告)号：US20090033943A1

公开(公告)日：2009-02-05

申请号：US12067501

申请日：2006-09-15

申请人： Stefan Franz ,  Matthias Fleischer

发明人： Stefan Franz ,  Matthias Fleischer

IPC分类号： G01B9/02

CPC分类号： G01B9/02049 ,  G01B9/02065 ,  G01B9/0209

摘要： A device for an interferometric measuring device having a first interferometer and a second interferometer, short coherent radiation being supplied to the first interferometer via a radiation source which is split into to beam components by a first beam splitter; and the optical path length in a beam component being longer than in the other beam component to the effect that the optical path difference is greater than the coherence length of the radiation; before emerging from the first interferometer, the two beam components being recombined and supplied to the second interferometer, which splits the radiation into two additional beam components; the optical path lengths of the two beam components being different to the effect that the optical path difference registered in the first interferometer is balanced again; the optical path length for the respective beam component in the first and the second interferometer being able to be set by at least one movable optical component, and the movable optical components are coupled to each other mechanically. A method for balancing an optical path difference in such an interferometric measuring device, the optical path differences between the beam components being changed in the two interferometers by mechanically coupled movable optical components at the same time and by the same absolute amount. By doing this, path differences in the beam components of the interferometers are able to be varied in one working step, the conditions for the formation of interference being complied with.

摘要翻译： 一种用于具有第一干涉仪和第二干涉仪的干涉测量装置的装置，短的相干辐射经由辐射源提供给第一干涉仪，该辐射源被第一分束器分成束分量; 并且光束分量中的光路长度比另一个光束分量中的光程长度大，使得光程差大于辐射的相干长度; 在从第一干涉仪出射之前，将两个光束分量重新组合并提供给第二干涉仪，其将辐射分成两个额外的光束分量; 两个光束分量的光路长度不同于第一干涉仪中记录的光路差异再次平衡的影响; 第一和第二干涉仪中的各个光束分量的光路长度能够由至少一个可移动光学部件设置，并且可移动的光学部件彼此机械耦合。 一种用于平衡这种干涉测量装置中的光程差的方法，通过机械耦合的可移动光学部件同时和相同的绝对量在两个干涉仪之间改变光束分量之间的光程差。 通过这样做，可以在一个工作步骤中改变干涉仪的光束分量中的路径差异，从而达到形成干扰的条件。

公开(公告)号：US07688451B2

公开(公告)日：2010-03-30

申请号：US11652979

申请日：2007-01-11

申请人： Stefan Franz ,  Matthias Fleischer

发明人： Stefan Franz ,  Matthias Fleischer

IPC分类号： G01B9/02

CPC分类号： G01B11/303 ,  G01B9/02003

摘要： A heterodyne interferometer having two interferometer arms and one optical modulator for changing the frequency of a radiation conducted via one interferometer arm and having a control device for setting the frequency change of the radiation and a detector device for analyzing the interfered output radiation. The amplitude of an input beam conducted into the heterodyne interferometer is modulated using a frequency which is different from the frequency change of the radiation in the optical modulator prior to being split between the interferometer arms. A heterodyne frequency corresponding to the difference of the frequency change of the radiation and the frequency of the amplitude modulation of the radiation may be achieved.

摘要翻译： 一种具有两个干涉仪臂和一个光学调制器的外差干涉仪，用于改变通过一个干涉仪臂传播的辐射的频率，并具有用于设置辐射频率变化的控制装置和用于分析受干扰的输出辐射的检测器装置。 使用在干涉仪臂之间分裂之前，使用与光调制器中的辐射的频率变化不同的频率来调制传导到外差干涉仪中的输入光束的幅度。 可以实现与辐射的频率变化的差异和辐射的幅度调制的频率对应的外差频率。