专利检索 ap:("Peter C. Newman" OR "John Van Doorn" OR "Darrel W. Fullen" OR "William H. Clopton" OR "Shahryar Rokni") AND inv:"William H. Clopton" 第 1 页

1.

发明授权
Purge monitoring system for gas discharge laser 有权

公开(公告)号：US06504860B2

公开(公告)日：2003-01-07

申请号：US09837150

申请日：2001-04-18

申请人： Peter C. Newman , John Van Doorn , Darrel W. Fullen , William H. Clopton , Shahryar Rokni

发明人： Peter C. Newman , John Van Doorn , Darrel W. Fullen , William H. Clopton , Shahryar Rokni

IPC分类号： H01S322

CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70575 , G03F7/70933 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/22 , H01S3/2207 , H01S3/225

摘要： A laser component purge system for discharge lasers. The LNP, the output coupler and the wavemeter are contained in sealed chambers each having a purge inlet port and a purge outlet port. Purge gas such as N2 is directed to each of the inlet ports. A purge monitoring system is provided which monitors the purge flow and provides one or more signals to a processor which is programmed to minimize laser timeouts attributable to purge conditions without endangering the purged optical components. In a preferred embodiment, gas exiting the outlet ports are directed to flow monitors which provide the one or more signals to the processor. Purge gas may be exhausted or recirculated.