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    Microactuator magnetic circuit
    1.
    发明授权
    Microactuator magnetic circuit 失效
    微致动器磁路

    公开(公告)号：US06671132B1

    公开(公告)日：2003-12-30

    申请号：US09742569

    申请日：2000-12-20

    申请人： Peter Crane ,  Derek A. Lewis ,  Zine-Eddine Boutaghou ,  Lee Walter

    发明人： Peter Crane ,  Derek A. Lewis ,  Zine-Eddine Boutaghou ,  Lee Walter

    IPC分类号： G11B5596

    CPC分类号： G11B5/5552

    摘要： An improved microactuator magnetic circuit having a simplified assembly, reduced field leakage, and improved passivation methods is disclosed. To simplify assembly, a single magnet is polarized in two magnetic regions so that the single magnet is functionally similar to two separate magnets. In addition, the magnetic circuit can be produced without a top keeper. Field leakage is reduced by expanding the bottom keeper. Finally, corrosion-resistant alloys with acceptable magnetic properties are used in forming the keeper.

    摘要翻译： 公开了一种具有简化的组装，减少的场泄漏和改进的钝化方法的改进的微致动器磁路。 为了简化组装，单个磁体在两个磁性区域中极化，使得单个磁体在功能上类似于两个分离的磁体。 此外，可以在没有顶部保持器的情况下制造磁路。 通过扩大底部保持器来减少场泄漏。 最后，使用具有可接受磁性的耐腐蚀合金来形成保持器。

    Bending microactuator having a two-piece suspension design
    3.
    发明授权
    Bending microactuator having a two-piece suspension design 失效
    具有两件悬挂设计的弯曲微型致动器

    公开(公告)号：US06859345B2

    公开(公告)日：2005-02-22

    申请号：US09553220

    申请日：2000-04-20

    申请人： Zine-Eddine Boutaghou ,  Peter Crane ,  Markus E. Mangold ,  Lee Walter

    发明人： Zine-Eddine Boutaghou ,  Peter Crane ,  Markus E. Mangold ,  Lee Walter

    IPC分类号： G11B5/55 ,  G11B5/56

    CPC分类号： G11B5/5552 ,  G11B5/4873

    摘要： A microactuation system selectively alters a position of a transducing head carried by a slider in a disc drive system with respect to a track of a rotatable disk having a plurality of concentric tracks. The microactuation system includes a head suspension having a first portion and a flexure for supporting the slider. A flexible beam extends from the first portion of the head suspension at one end to the flexure at the other end. An electroactive element is attached to the beam. The electroactive element bends in response to a control signal applied thereto. The beam is sufficiently compliant to permit movement of the first portion of the head suspension with respect to the flexure.

    摘要翻译： 微致动器系统相对于具有多个同心轨道的可旋转盘的轨道选择性地改变由盘驱动系统中的滑块承载的换能头的位置。 该微致动系统包括具有用于支撑滑块的第一部分和挠曲件的头部悬挂。 柔性梁从一端的头部悬架的第一部分延伸到另一端的挠曲件。 电活性元件连接到梁上。 电活性元件响应于施加到其上的控制信号弯曲。 梁足够柔顺以允许头部悬架的第一部分相对于挠曲件移动。

    Laterally supported handle wafer for through-wafer reactive-ion etch micromachining
    5.
    发明授权
    Laterally supported handle wafer for through-wafer reactive-ion etch micromachining 失效
    用于通过晶片反应离子蚀刻微加工的侧面支撑的处理晶片

    公开(公告)号：US06733681B1

    公开(公告)日：2004-05-11

    申请号：US09707698

    申请日：2000-11-07

    申请人： Roger L. Hipwell, Jr. ,  Lee Walter ,  Wayne A. Bonin ,  Barry D. Wissman ,  Zine-Eddine Boutaghou ,  Barbara J. Ihlow-Mahrer

    发明人： Roger L. Hipwell, Jr. ,  Lee Walter ,  Wayne A. Bonin ,  Barry D. Wissman ,  Zine-Eddine Boutaghou ,  Barbara J. Ihlow-Mahrer

    IPC分类号： B81C100

    CPC分类号： B81C1/00357 ,  B81C2201/019 ,  Y10T29/49025

    摘要： A method of handling a wafer for through-wafer plasma etching includes lateral support provided between a handle wafer and a product wafer without wafer bonding or an adhesive film using mating mechanical structures. The product wafer is easily separated from the handle wafer following etching without stripping or cleaning. Because the connection between the wafers is mechanical, not from an adhesive layer/bonded layer, a wafer can be etched, inspected, and subsequently continue to be etched without the hindrance of repeated bonding, separation, and cleaning. A non-bonded support for released devices following a through-etch process is also provided.

    摘要翻译： 用于晶圆等离子体蚀刻处理晶片的方法包括在晶片接合之间提供的手柄晶片和产品晶片之间的侧向支撑，或者使用配合机械结构的粘合膜。 在没有剥离或清洁的情况下，产品晶片在蚀刻之后容易地与处理晶片分离。 因为晶片之间的连接是机械的，而不是粘合层/接合层，所以可以蚀刻，检查晶片并且随后继续蚀刻晶片，而不会重复地进行接合，分离和清洁。 还提供了在通过蚀刻工艺之后的释放器件的非接合支撑。

    Method of fabricating electrically isolated metal MEMS beams and microactuator incorporating the MEMS beam
    6.
    发明授权
    Method of fabricating electrically isolated metal MEMS beams and microactuator incorporating the MEMS beam 有权
    制造电隔离金属MEMS光束的方法和结合MEMS光束的微型致动器

    公开(公告)号：US06674614B2

    公开(公告)日：2004-01-06

    申请号：US10037679

    申请日：2002-01-02

    申请人： Wayne A. Bonin ,  Lee Walter ,  Zine-Eddine Boutaghou

    发明人： Wayne A. Bonin ,  Lee Walter ,  Zine-Eddine Boutaghou

    IPC分类号： G11B2124

    CPC分类号： G11B5/5552

    摘要： A microactuator is formed by defining stator and rotor regions on a wafer. Isolation barriers are formed in the stator and rotor regions to define a isolation regions. Conductive suspension beam are formed between the first and second isolation regions, and wafer material between the stator and rotor regions is removed to form a stator and a rotor. The microactuator is arranged to position a load device having an electrical component. The suspension beams support the rotor and load device and provide electrical connection between the stator and rotor for the microactuator and/or the load device.

    摘要翻译： 通过在晶片上限定定子和转子区域来形成微致动器。 在定子和转子区域中形成隔离屏障，以限定隔离区域。 在第一和第二隔离区域之间形成导电悬架梁，并且去除定子和转子区域之间的晶片材料以形成定子和转子。 微型致动器布置成定位具有电气部件的负载装置。 悬架梁支撑转子和负载装置，并为微型致动器和/或负载装置提供定子和转子之间的电连接。

    Structure and fabrication process for integrated moving-coil magnetic micro-actuator
    7.
    发明授权
    Structure and fabrication process for integrated moving-coil magnetic micro-actuator 有权
    集成式动圈式磁性微型执行器的结构和制造工艺

    公开(公告)号：US06661617B1

    公开(公告)日：2003-12-09

    申请号：US09657884

    申请日：2000-09-08

    申请人： Roger Lee Hipwell, Jr. ,  Lee Walter ,  Wayne Allen Bonin ,  Barry Dean Wissman ,  Zine-Eddine Boutaghou

    发明人： Roger Lee Hipwell, Jr. ,  Lee Walter ,  Wayne Allen Bonin ,  Barry Dean Wissman ,  Zine-Eddine Boutaghou

    IPC分类号： G11B548

    CPC分类号： G11B5/4826 ,  G11B5/5552

    摘要： A moving-coil magnetic microactuator is formed by using a dual silicon wafer structure and thin film technologies such as deep trench reactive ion etching, reactive ion etching, plasma-enhanced chemical vapor deposition and metallo-organinc chemical vapor deposition. Several bottom structures are formed from a bottom wafer, each bottom structure having a coil and wires embedded in the surface of the bottom structure. Several top structures are formed from a top wafer, each top structure having a magnet and mechanical stand-offs. The top structures are bonded to the bottom structures so that the magnet is above the embedded coil, separated by an air gap created by the mechanical stand-offs.

    摘要翻译： 通过使用双硅晶片结构和诸如深沟槽反应离子蚀刻，反应离子蚀刻，等离子体增强化学气相沉积和金属有机化学气相沉积的薄膜技术形成动圈式磁微型致动器。 从底部晶片形成多个底部结构，每个底部结构具有线圈和嵌入在底部结构的表面中的电线。 从顶部晶片形成几个顶部结构，每个顶部结构具有磁体和机械支座。 顶部结构结合到底部结构，使得磁体在嵌入式线圈上方，由机械支座产生的空气间隙分开。

    Transducer-level microactuator with dual-axis control
    8.
    发明授权
    Transducer-level microactuator with dual-axis control 失效
    带双轴控制的传感器级微型致动器

    公开(公告)号：US06785086B1

    公开(公告)日：2004-08-31

    申请号：US09815679

    申请日：2001-03-23

    申请人： Wayne A. Bonin ,  Zine-Eddine Boutaghou ,  Roger L. Hipwell, Jr. ,  Barry D. Wissman ,  Lee Walter ,  Barbara J. Ihlow-Mahrer

    发明人： Wayne A. Bonin ,  Zine-Eddine Boutaghou ,  Roger L. Hipwell, Jr. ,  Barry D. Wissman ,  Lee Walter ,  Barbara J. Ihlow-Mahrer

    IPC分类号： G11B5596

    CPC分类号： G11B5/5552

    摘要： A slider for carrying and finely adjusting both a radial position and a flying height of a transducing head with respect to a track of a rotatable disc includes a stator portion carried by a support structure such as a flexure of a disc drive system. A plurality of springs extend from the stator portion and are flexible in a lateral direction (for radial positioning) and in a vertical direction (for flying height control). A rotor portion is connected to the stator portion by the plurality of springs. The rotor portion carries the transducing head. The stator portion includes a plurality of stator electrodes, and the rotor portion includes a plurality of rotor electrodes suspended between the stator electrodes. Selected voltages are applied to the stator electrodes and the rotor electrodes to create a selected force in the lateral and vertical directions for moving the rotor portion with respect to the stator portion to finely adjust the radial position and flying height of the transducing head.

    摘要翻译： 用于承载和精细地调节换能头相对于可旋转盘的轨道的径向位置和飞行高度的滑块包括由诸如盘驱动系统的弯曲的支撑结构承载的定子部分。 多个弹簧从定子部分延伸并且在横向方向（用于径向定位）和沿垂直方向（用于飞行高度控制）是柔性的。 转子部分通过多个弹簧连接到定子部分。 转子部分承载换能头。 定子部分包括多个定子电极，转子部分包括悬置在定子电极之间的多个转子电极。 所选择的电压被施加到定子电极和转子电极以在横向和垂直方向上产生选定的力，以使转子部分相对于定子部分移动，以微调头部的径向位置和飞行高度。

    Slider-level microactuator for precise head positioning
    9.
    发明授权
    Slider-level microactuator for precise head positioning 有权
    滑块级微型致动器用于精确的头部定位

    公开(公告)号：US06683757B1

    公开(公告)日：2004-01-27

    申请号：US09733351

    申请日：2000-12-08

    申请人： Wayne A. Bonin ,  Zine-Eddine Boutaghou ,  Roger L. Hipwell, Jr. ,  Barry D. Wissman ,  Lee Walter ,  Barbara J. Ihlow-Mahrer

    发明人： Wayne A. Bonin ,  Zine-Eddine Boutaghou ,  Roger L. Hipwell, Jr. ,  Barry D. Wissman ,  Lee Walter ,  Barbara J. Ihlow-Mahrer

    IPC分类号： G11B556

    CPC分类号： G11B5/5552 ,  G11B21/21

    摘要： A microactuator is built at the slider level to achieve high resolution positioning of a transducing head with respect to a track of a rotatable disc having a plurality of concentric tracks in a disc drive system. The slider includes a main body carried by a flexure. A stator portion extends from the main body, and a plurality of beams extend from the stator portion, the beams being flexible in a lateral direction. A rotor portion is connected to the stator portion by the plurality of beams, forming a gap between the stator portion and the rotor portion. The rotor portion carries the transducing head. A plurality of stator electrodes are formed on the stator portion, and a plurality of rotor electrodes are formed on the rotor portion to confront the stator electrodes across the gap. Control circuitry applies selected voltages to the stator electrodes and the rotor electrodes to create a force in the lateral direction for moving the rotor portion with respect to the stator portion of the slider, thereby finely positioning the transducing head.

    摘要翻译： 在滑块水平上构建微致动器，以实现相对于在盘驱动系统中具有多个同心轨道的可旋转盘的轨道的换能头的高分辨率定位。 滑块包括由挠曲件承载的主体。 定子部分从主体延伸，并且多个梁从定子部分延伸，梁在横向方向上是柔性的。 转子部分通过多个梁连接到定子部分，在定子部分和转子部分之间形成间隙。 转子部分承载换能头。 在定子部分上形成有多个定子电极，并且在转子部分上形成多个转子电极，以跨过间隙对置定子电极。 控制电路将所选择的电压施加到定子电极和转子电极以在横向方向上产生相对于滑块的定子部分移动转子部分的力，从而精细地定位换能头。