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    Assembly, apparatus and method for fabricating a structural element of a hard disk drive air bearing
    1.
    发明申请
    Assembly, apparatus and method for fabricating a structural element of a hard disk drive air bearing 有权
    用于制造硬盘驱动器空气轴承的结构元件的组装，装置和方法

    公开(公告)号：US20070159723A1

    公开(公告)日：2007-07-12

    申请号：US11329680

    申请日：2006-01-10

    申请人： Peter Dang ,  Eric Flint ,  Cherngye Hwang ,  Yongjian Sun

    发明人： Peter Dang ,  Eric Flint ,  Cherngye Hwang ,  Yongjian Sun

    IPC分类号： G11B5/60

    CPC分类号： G11B5/6005 ,  Y10T29/49046

    摘要： An assembly, apparatus and method for fabricating a structural element of a hard disk drive air bearing. The method and apparatus provide an improved protective layer, an improved structural element consisting of a single layer of structural material, and a method consisting of applying the improved protective layer, applying a uniform layer of structural material, applying a resist layer, etching the structural material layer, and removing the resist layer.

    摘要翻译： 一种用于制造硬盘驱动器空气轴承的结构元件的组件，装置和方法。 该方法和装置提供改进的保护层，由单层结构材料组成的改进的结构元件，以及由改进的保护层，施加均匀的结构材料层，施加抗蚀剂层，蚀刻结构材料 材料层，并除去抗蚀剂层。

    Assembly, apparatus and method for fabricating a structural element of a hard disk drive air bearing
    2.
    发明授权
    Assembly, apparatus and method for fabricating a structural element of a hard disk drive air bearing 有权
    用于制造硬盘驱动器空气轴承的结构元件的组装，装置和方法

    公开(公告)号：US07929251B2

    公开(公告)日：2011-04-19

    申请号：US11329680

    申请日：2006-01-10

    申请人： Peter Dang ,  Eric W. Flint ,  Cherngye Hwang ,  Yongjian Sun

    发明人： Peter Dang ,  Eric W. Flint ,  Cherngye Hwang ,  Yongjian Sun

    IPC分类号： G11B5/60 ,  B44C1/22

    CPC分类号： G11B5/6005 ,  Y10T29/49046

    摘要： An assembly, apparatus and method for fabricating a structural element of a hard disk drive air bearing. The method and apparatus provide an improved protective layer, an improved structural element consisting of a single layer of structural material, and a method consisting of applying the improved protective layer, applying a uniform layer of structural material, applying a resist layer, etching the structural material layer, and removing the resist layer.

    摘要翻译： 一种用于制造硬盘驱动器空气轴承的结构元件的组件，装置和方法。 该方法和装置提供改进的保护层，由单层结构材料组成的改进的结构元件，以及由改进的保护层，施加均匀的结构材料层，施加抗蚀剂层，蚀刻结构材料 材料层，并除去抗蚀剂层。

    Direct cooling pallet tray for temperature stability for deep ion mill etch process
    5.
    发明申请
    Direct cooling pallet tray for temperature stability for deep ion mill etch process 有权
    直接冷却托盘托盘用于深度离子磨蚀刻蚀工艺的温度稳定性

    公开(公告)号：US20060117762A1

    公开(公告)日：2006-06-08

    申请号：US11001795

    申请日：2004-12-02

    申请人： Pei Chen ,  Jorge Goitia ,  Cherngye Hwang ,  Bigal Leung ,  Diana Perez ,  Yongjian Sun

    发明人： Pei Chen ,  Jorge Goitia ,  Cherngye Hwang ,  Bigal Leung ,  Diana Perez ,  Yongjian Sun

    IPC分类号： F25D25/00 ,  F25D17/04 ,  B65G17/16 ,  B65G17/32

    CPC分类号： H01L21/67109 ,  H01L21/67333

    摘要： Embodiments of the present invention are directed to a pallet assembly which facilitates direct cooling of the wafer carrier. In one embodiment, the pallet assembly comprises a frame which holds at least one carrier of a component. The pallet assembly further comprises a tray which is operable for being mechanically coupled with the frame. The tray comprises at least one discreet region which corresponds with the carrier when the tray is coupled with the frame. In embodiments of the present invention, the discreet region comprises at least one hole extending through the tray for permitting a coolant medium to dissipate heat from the carrier.

    摘要翻译： 本发明的实施例涉及一种有助于晶片载体的直接冷却的托盘组件。 在一个实施例中，托盘组件包括保持部件的至少一个托架的框架。 托盘组件还包括可操作以与框架机械联接的托盘。 当托盘与框架联接时，该托盘包括至少一个对应于托架的离散区域。 在本发明的实施例中，离散区域包括延伸穿过托盘的至少一个孔，用于允许冷却剂介质从载体中散发热量。

    FORMING A POLE TIP TOPOGRAPHY
    6.
    发明申请
    FORMING A POLE TIP TOPOGRAPHY 审中-公开
    形成一个尖端的地图

    公开(公告)号：US20090273859A1

    公开(公告)日：2009-11-05

    申请号：US12114502

    申请日：2008-05-02

    申请人： Eric W. Flint ,  Cherngye Hwang ,  Kenneth M.T. Liu ,  Eduardo Torres Mireles ,  Yongjian Sun

    发明人： Eric W. Flint ,  Cherngye Hwang ,  Kenneth M.T. Liu ,  Eduardo Torres Mireles ,  Yongjian Sun

    IPC分类号： G11B5/60

    CPC分类号： G11B5/3163 ,  G11B5/1871 ,  G11B5/3116

    摘要： A method of forming a pole tip topography associated with an air bearing surface (ABS) of a hard disk drive slider is disclosed. The method etches an exposed pole tip region of an ABS at a first angle with respect to the ABS to remove an irregularity from the exposed pole tip region and to flatten the exposed pole tip region. The exposed pole tip region lacks a photo-resist layer. The method also includes etching the flattened exposed pole tip region of the ABS at a second angle with respect to the ABS to form a recession with reference to the ABS.

    摘要翻译： 公开了一种与硬盘驱动器滑块的空气轴承表面（ABS）相关联的形成极尖形状的方法。 该方法相对于ABS以第一角度蚀刻ABS的暴露的极尖端区域以从暴露的极尖端区域去除不规则性并使暴露的极尖端区域变平。 曝光的极尖区域缺少光致抗蚀剂层。 该方法还包括相对于ABS以相对于ABS的第二角度蚀刻ABS的平坦化的露出的极尖端区域，以相对于ABS形成凹陷。

    Direct cooling pallet tray for temperature stability for deep ion mill etch process
    7.
    发明授权
    Direct cooling pallet tray for temperature stability for deep ion mill etch process 有权
    直接冷却托盘托盘用于深度离子磨蚀刻蚀工艺的温度稳定性

    公开(公告)号：US07296420B2

    公开(公告)日：2007-11-20

    申请号：US11001795

    申请日：2004-12-02

    申请人： Pei Chen ,  Jorge Goitia ,  Cherngye Hwang ,  Bigal Leung ,  Diana Perez ,  Yongjian Sun

    发明人： Pei Chen ,  Jorge Goitia ,  Cherngye Hwang ,  Bigal Leung ,  Diana Perez ,  Yongjian Sun

    IPC分类号： F25D25/00 ,  F25D17/06 ,  F25D23/12

    CPC分类号： H01L21/67109 ,  H01L21/67333

    摘要： Embodiments of the present invention are directed to a pallet assembly which facilitates direct cooling of the wafer carrier. In one embodiment, the pallet assembly comprises a frame which holds at least one carrier of a component. The pallet assembly further comprises a tray which is operable for being mechanically coupled with the frame. The tray comprises at least one discreet region which corresponds with the carrier when the tray is coupled with the frame. In embodiments of the present invention, the discreet region comprises at least one hole extending through the tray for permitting a coolant medium to dissipate heat from the carrier.

    摘要翻译： 本发明的实施例涉及一种有助于晶片载体的直接冷却的托盘组件。 在一个实施例中，托盘组件包括保持部件的至少一个托架的框架。 托盘组件还包括可操作以与框架机械联接的托盘。 当托盘与框架联接时，该托盘包括至少一个对应于托架的离散区域。 在本发明的实施例中，离散区域包括延伸穿过托盘的至少一个孔，用于允许冷却剂介质从载体中散发热量。

    Reducing the height of a defect associated with an air bearing surface
    8.
    发明授权
    Reducing the height of a defect associated with an air bearing surface 有权
    降低与空气轴承表面相关的缺陷的高度

    公开(公告)号：US08361284B2

    公开(公告)日：2013-01-29

    申请号：US11800182

    申请日：2007-05-03

    申请人： Roberto Cabral Frias ,  Mario Garcia De la Cruz ,  Cherngye Hwang ,  Tetsuya Matsusaki ,  Omar E. Montero Camacho ,  Yongjian Sun

    发明人： Roberto Cabral Frias ,  Mario Garcia De la Cruz ,  Cherngye Hwang ,  Tetsuya Matsusaki ,  Omar E. Montero Camacho ,  Yongjian Sun

    IPC分类号： C23C14/32

    CPC分类号： G11B5/3169 ,  G11B5/3163 ,  G11B5/6005

    摘要： A method for reducing the height of a defect associated with an air bearing surface of a hard disk drive slider is disclosed. The technology initially ion mills for a first period of time at a first angle relative to an air bearing surface of a disk drive slider to remove a first portion of the air bearing surface. Then the technology ion mills for a second period of time at a second angle relative to an air bearing surface of the disk drive slider to remove a second portion of the air bearing surface. The second portion of the air bearing surface comprises a defect wherein the ion milling at the second angle reduces the height of the defect with respect to the air bearing surface.

    摘要翻译： 公开了一种用于降低与硬盘驱动器滑块的空气轴承表面相关联的缺陷的高度的方法。 该技术首先离开第一时间段相对于盘驱动器滑块的空气轴承表面以第一角度铣削以移除空气轴承表面的第一部分。 然后，该技术离子相对于盘驱动器滑块的空气轴承表面以第二角度研磨第二时间段，以去除空气轴承表面的第二部分。 空气轴承表面的第二部分包括缺陷，其中以第二角度的离子铣削相对于空气轴承表面减小缺陷的高度。

    Reducing the height of a defect associated with an air bearing surface
    10.
    发明申请
    Reducing the height of a defect associated with an air bearing surface 有权
    降低与空气轴承表面相关的缺陷的高度

    公开(公告)号：US20080273271A1

    公开(公告)日：2008-11-06

    申请号：US11800182

    申请日：2007-05-03

    申请人： Roberto Cabral Frias ,  Mario Garcia De La Cruz ,  Cherngye Hwang ,  Tetsuya Matsusaki ,  Omar E. Montero Camacho ,  Yongjian Sun

    发明人： Roberto Cabral Frias ,  Mario Garcia De La Cruz ,  Cherngye Hwang ,  Tetsuya Matsusaki ,  Omar E. Montero Camacho ,  Yongjian Sun

    IPC分类号： G11B5/60

    CPC分类号： G11B5/3169 ,  G11B5/3163 ,  G11B5/6005

    摘要： A method for reducing the height of a defect associated with an air bearing surface of a hard disk drive slider is disclosed. The technology initially ion mills for a first period of time at a first angle relative to an air bearing surface of a disk drive slider to remove a first portion of the air bearing surface. Then the technology ion mills for a second period of time at a second angle relative to an air bearing surface of the disk drive slider to remove a second portion of the air bearing surface. The second portion of the air bearing surface comprises a defect wherein the ion milling at the second angle reduces the height of the defect with respect to the air bearing surface.

    摘要翻译： 公开了一种用于降低与硬盘驱动器滑块的空气轴承表面相关联的缺陷的高度的方法。 该技术首先离开第一时间段相对于盘驱动器滑块的空气轴承表面以第一角度铣削以移除空气轴承表面的第一部分。 然后，该技术离子相对于盘驱动器滑块的空气轴承表面以第二角度研磨第二时间段，以去除空气轴承表面的第二部分。 空气轴承表面的第二部分包括缺陷，其中以第二角度的离子铣削相对于空气轴承表面减小缺陷的高度。