摘要:
A magnetically coupled rotary pump has, in a pump chamber, a pump rotor mounted by a single slide bearing on a stationary axis of a pump bearing support. The slide bearing is formed on one side by a metal sleeve shrunk over the bearing sleeve, said sleeve being connected by means of a weld with the pump rotor, and on the other side by a bushing mounted on the pump bearing support or a one-piece slide bearing surface formed correspondingly directly on pump bearing support. With this design of the bearing, dead spaces and gaps are avoided, enabling complete cleaning and sterilization of the pump chamber with complete draining of the pump chamber. A pump of this kind is especially suitable for use in sterile applications.
摘要:
Method of applying optical coatings of silicon compounds to substrates by reactive cathode sputtering of siliceous target materials. To solve the problem of improving the utilization of the target material and eliminating the blowout of particles from the target, the target of the invention is a polycrystalline silicon casting of at least 99% silicon containing dopants from the group, boron, antimony, phosphorus and arseic, and it is sputtered by direct current in an atomsphere containing the reaction gas.
摘要:
In a cathode sputtering apparatus, in order to achieve a very uniform utilization of the target and a high-quality coating on the substrate, the cathode is provided on its side of the target facing away from the substrate with a flat plate on which a plurality of magnets are disposed in rows, the magnets of the individual rows parallel to one another being at approximately equal distances apart and having the same polarity. Moreover, the magnetic of the one row are offset by a dimension g from the magnets of the adjacent row, so that, in the area of the target provided with the coating material, when the cathode is used in a chamber with suitable gas pressure and with a voltage of any desired frequency is applied, plasma tubes form which are like serpentinely curved racetracks.
摘要:
An aroma-diffusing heating device includes a heating base, an aroma capsule detachably accommodated in the heating base and heatable by the heating base to give off fragrance, and a cap capped on the heating base over the aroma capsule. The aroma capsule includes a heat-transfer container defining a top opening, an aromatic substance held in the heat-transfer container, and a sealing film bonded to the heat-transfer container to seal the aromatic substance in the heat-transfer container.
摘要:
Apparatus for reactive sputtering of an electrically resistive coating onto a planar substrate includes a magnetron cathode with a planar target of a metal which forms one component of the coating. The reaction gas, which provides another component of the coating, is released as close as possible to the target, but outside of its outline. The distance "a" between the target surface and the substrate surface is less than 60 mm, and a mask system is provided at a distance "d" from the substrate which is less than half the distance "a". The density of reaction gas particles in front of the substrate is thus increased, resulting in a high deposition rate.
摘要:
A method and apparatus for fabricating magneto-optical, storable, and/or deletable data carriers. One or more layers, each comprising two or more different chemical materials, are applied on a substrate (4) by means of a magnetron sputtering system (1). The fractional composition of each layer is controlled by changing the strength of the magnetic field produced by the magnetron system (1). By means of a suitable measuring device (51, 58) the compensation temperature of a particular layer is measured and compared with a desired value. If the measured compensation temperature differs from the desired value, the desired value can be attained by adjusting the cathode voltage U.sub.K of the magnetron system. A controller (63) is provided for controlling the cathode voltage and adjusting the distance between the magnetron system's target (6) and magnets (8, 9, 10).
摘要:
A reaction gas is admitted in the immediate vicinity of a target on the cathode and a plasma is generated between the target and a substrate to be coated. The intensity of the spectral line of a target material is measured, and is used to provide a first signal with a relatively short time constant to a controller via a first control circuit. A property of the finished coating is sensed after the substrate leaves the coating zone, and is used to provide a second signal with a relatively long time constant to the controller via a second control circuit. The controller uses the combined signals to regulate the admission of the reaction gas so that a pre-established property of the finished coating is kept substantially constant.