Wafer storage device, carrier plate and wafer cassette

    公开(公告)号:US11367641B2

    公开(公告)日:2022-06-21

    申请号:US16867453

    申请日:2020-05-05

    IPC分类号: H01L21/673

    摘要: A wafer storage device includes a wafer cassette and a carrier plate. The wafer cassette includes a housing and a plurality pairs of retaining members disposed on lateral walls of the housing. The carrier plate is placed into the housing, is supported by one pair of the retaining members, and includes a plate body carrying the wafer thereon, and having a periphery formed with two slots extending respectively in two different radial directions of the wafer. Two positioning members respectively and radially correspond in position to the slots, and abut against an outer rim of the wafer.

    Chip carrier device
    3.
    发明授权

    公开(公告)号:US11587808B2

    公开(公告)日:2023-02-21

    申请号:US16998266

    申请日:2020-08-20

    IPC分类号: H01L21/673 C23C14/56

    摘要: A chip carrier device includes a frame, a chip support and a limiter. The chip support is disposed on the frame, and includes a supporting film for chips to be adhered thereto. A peripheral portion of the supporting film is attached to a surrounding frame part of the frame. A crossing portion of the supporting film passes through a center of the supporting film, and interconnects two opposite points of the peripheral portion. The supporting film is formed with through holes. The limiter includes a limiting part that interconnects two opposite points of the surrounding frame part, that is positioned corresponding to the crossing portion, and that is positioned on one side of the supporting film where the chips are to be arranged.

    Semiconductor packaging structure with back-deposited shielding layer and manufacturing method thereof

    公开(公告)号:US11658046B2

    公开(公告)日:2023-05-23

    申请号:US17094537

    申请日:2020-11-10

    IPC分类号: H01L23/552 H01L21/56

    摘要: Batch semiconductor packaging structures with back-deposited shielding layer and manufacturing method are provided. A grid having multiple frames is glued on an adhesive substrate. Multiple semiconductor devices respectively align with corresponding frames and are stuck on the adhesive substrate. Then a metal layer covers the semiconductor devices and the grid. A distance between four peripheries of a bottom of each semiconductor device and the corresponding frame is smaller than a distance between the bottom and the adhesive substrate, so that the a portion of the metal layer extended to the peripheries of the bottom is effectively reduced during forming the metal layer. After the semiconductor devices are picked up, no metal scrap is remined thereon. Therefore, the adhesive substrate does not need to form openings in advance and is reusable. The grid is also reusable so the manufacturing cost of the present invention is decreased.