Chip carrier device
    2.
    发明授权

    公开(公告)号:US11587808B2

    公开(公告)日:2023-02-21

    申请号:US16998266

    申请日:2020-08-20

    IPC分类号: H01L21/673 C23C14/56

    摘要: A chip carrier device includes a frame, a chip support and a limiter. The chip support is disposed on the frame, and includes a supporting film for chips to be adhered thereto. A peripheral portion of the supporting film is attached to a surrounding frame part of the frame. A crossing portion of the supporting film passes through a center of the supporting film, and interconnects two opposite points of the peripheral portion. The supporting film is formed with through holes. The limiter includes a limiting part that interconnects two opposite points of the surrounding frame part, that is positioned corresponding to the crossing portion, and that is positioned on one side of the supporting film where the chips are to be arranged.