公开(公告)号：US5863869A

公开(公告)日：1999-01-26

申请号：US478296

申请日：1995-06-07

申请人： Praveen Chaudhari ,  Richard Joseph Gambino ,  Roger Hilson Koch ,  James Andrew Lacey ,  Robert Benjamin Laibowitz ,  Joseph Michael Viggiano

发明人： Praveen Chaudhari ,  Richard Joseph Gambino ,  Roger Hilson Koch ,  James Andrew Lacey ,  Robert Benjamin Laibowitz ,  Joseph Michael Viggiano

IPC分类号： C30B1/02 ,  C01G1/00 ,  C01G3/00 ,  C30B29/22 ,  H01B12/06 ,  H01B13/00 ,  H01L39/12 ,  H01L39/24 ,  B32B9/00 ,  B05D5/12

CPC分类号： H01L39/2451 ,  H01L39/126 ,  H01L39/2432 ,  Y10S428/93 ,  Y10S505/701 ,  Y10S505/702 ,  Y10S505/73 ,  Y10S505/732 ,  Y10S505/742

摘要： Superconducting transition metal oxide films are provided which exhibit very high onsets of superconductivity and superconductivity at temperatures in excess of 40.degree. K. These films are produced by vapor deposition processes using pure metal sources for the metals in the superconducting compositions, where the metals include multi-valent nonmagnetic transition metals, rare earth elements and/or rare earth-like elements and alkaline earth elements. The substrate is exposed to oxygen during vapor deposition, and, after formation of the film, there is at least one annealing step in an oxygen ambient and slow cooling over several hours to room temperature. The substrates chosen are not critical as long as they are not adversely reactive with the superconducting oxide film. Transition metals include Cu, Ni, Ti and V, while the rare earth-like elements include Y, Sc and La. The alkaline earth elements include Ca, Ba and Sr.

摘要翻译： 提供超导过渡金属氧化物膜，其在超过40℃的温度下表现出非常高的超导性和超导性。这些膜通过使用纯金属源用于超导组合物中的金属的气相沉积工艺制备，其中金属包括多 价值非磁性过渡金属，稀土元素和/或稀土类元素和碱土金属元素。 衬底在气相沉积期间暴露于氧气，并且在膜形成之后，在氧环境中存在至少一个退火步骤，并在几个小时至室温下缓慢冷却。 所选择的衬底不是关键的，只要它们不与超导氧化物膜不利地反应。 过渡金属包括Cu，Ni，Ti和V，而稀土元素包括Y，Sc和La，碱土元素包括Ca，Ba和Sr。