公开(公告)号：US20230375485A1

公开(公告)日：2023-11-23

申请号：US18228024

申请日：2023-07-31

Applicant: RIGAKU CORPORATION

Inventor： Naoki Matsushima ,  Kiyoshi Ogata ,  Sei Yoshihara ,  Yoshiyasu Ito ,  Kazuhiko Omote ,  Hiroshi Motono ,  Shigematsu Asano ,  Katsutaka Horada ,  Sensui Yasuda

IPC: G01N23/201 ,  G01N23/20025 ,  G01N23/20016

CPC classification number: G01N23/201 ,  G01N23/20025 ,  G01N23/20016 ,  G01N2223/3306 ,  G01N2223/6116 ,  G01N2223/054

Abstract: A transmission type small-angle scattering device of the present invention includes a goniometer 10 including a rotation arm 11. The rotation arm 11 is freely turnable around a θ-axis extending in a horizontal direction from an origin with a vertical arrangement state of the rotation arm 11 being defined as the origin, and has a vertical arrangement structure in which an X-ray irradiation unit 20 is installed on a lower-side end portion of the rotation arm 11, and a two-dimensional X-ray detector 30 is installed on an upper-side end portion of the rotation arm 11 to form a vertical arrangement structure.

公开(公告)号：US20210063326A1

公开(公告)日：2021-03-04

申请号：US16958556

申请日：2018-09-05

Applicant: RIGAKU CORPORATION

Inventor： Naoki Matsushima ,  Kiyoshi Ogata ,  Kazuhiko Omote ,  Sei Yoshihara ,  Yoshiyasu Ito ,  Hiroshi Motono ,  Hideaki Takahashi ,  Akifusa Higuchi ,  Shiro Umegaki ,  Shigematsu Asano ,  Ryotaro Yamaguchi ,  Katsutaka Horada

IPC: G01N23/20016 ,  G01N23/207

Abstract: An X-ray inspection device of the present invention includes a sample placement unit 11 for placing a sample as an inspection target therein, a sample placement unit positioning mechanism 30 for moving the sample placement unit 11, a goniometer 20 including first and second rotation members 22, 23 that rotate independently of each other, an X-ray irradiation unit 40 installed on the first rotation member 22, and a two-dimensional X-ray detector 50 installed on the second rotation member 23. The sample placement unit positioning mechanism 30 includes a χ rotation mechanism 35 for rotating the sample placement unit 11 and a ϕ-axis about a χ-axis that is orthogonal to a θs-axis and a θd-axis at a measurement point P and extends horizontally.

公开(公告)号：US11079345B2

公开(公告)日：2021-08-03

申请号：US16958556

申请日：2018-09-05

Applicant: RIGAKU CORPORATION

Inventor： Naoki Matsushima ,  Kiyoshi Ogata ,  Kazuhiko Omote ,  Sei Yoshihara ,  Yoshiyasu Ito ,  Hiroshi Motono ,  Hideaki Takahashi ,  Akifusa Higuchi ,  Shiro Umegaki ,  Shigematsu Asano ,  Ryotaro Yamaguchi ,  Katsutaka Horada

IPC: G01N23/20016 ,  G01N23/207

Abstract: An X-ray inspection device of the present invention includes a sample placement unit 11 for placing a sample as an inspection target therein, a sample placement unit positioning mechanism 30 for moving the sample placement unit 11, a goniometer 20 including first and second rotation members 22, 23 that rotate independently of each other, an X-ray irradiation unit 40 installed on the first rotation member 22, and a two-dimensional X-ray detector 50 installed on the second rotation member 23. The sample placement unit positioning mechanism 30 includes a χ rotation mechanism 35 for rotating the sample placement unit 11 and a ϕ-axis about a χ-axis that is orthogonal to a θs-axis and a θd-axis at a measurement point P and extends horizontally.

公开(公告)号：US20170234814A1

公开(公告)日：2017-08-17

申请号：US15518892

申请日：2014-10-14

Applicant: RIGAKU CORPORATION

Inventor： Kiyoshi Ogata ,  Sei Yoshihara ,  Takao Kinefuchi ,  Shiro Umegaki ,  Shigematsu Asano ,  Katsutaka Horada ,  Muneo Yoshida ,  Hiroshi Motono ,  Hideaki Takahashi ,  Akifusa Higuchi ,  Kazuhiko Omote ,  Yoshiyasu Ito ,  Naoki Kawahara ,  Asao Nakano

IPC: G01N23/223 ,  G01N23/22

CPC classification number: G01N23/223 ,  G01N23/203 ,  G01N23/2204 ,  G01N23/2206 ,  G01N2223/076 ,  G01N2223/315 ,  G01N2223/61 ,  G01N2223/6116

Abstract: An X-ray thin film inspection device of the present invention includes an X-ray irradiation unit 40 installed on a first rotation arm 32, an X-ray detector 50 installed on a second rotation arm 33, and a fluorescence X-ray detector 60 for detecting fluorescence X-rays generated from an inspection target upon irradiation of X-rays. The X-ray irradiation unit 40 includes an X-ray optical element 43 comprising a confocal mirror for receiving X-rays radiated from an X-ray tube 42, reflects plural focused X-ray beams monochromatized at a specific wavelength and focuses the plural focused X-ray beams to a preset focal point, and a slit mechanism 46 for passing therethrough any number of focused X-ray beams out of the plural focused X-ray beams reflected from the X-ray optical element 43.

公开(公告)号：US12019036B2

公开(公告)日：2024-06-25

申请号：US18228024

申请日：2023-07-31

Applicant: RIGAKU CORPORATION

Inventor： Naoki Matsushima ,  Kiyoshi Ogata ,  Sei Yoshihara ,  Yoshiyasu Ito ,  Kazuhiko Omote ,  Hiroshi Motono ,  Shigematsu Asano ,  Katsutaka Horada ,  Sensui Yasuda

IPC: G01N23/201 ,  G01N23/20016 ,  G01N23/20025

CPC classification number: G01N23/201 ,  G01N23/20016 ,  G01N23/20025 ,  G01N2223/054 ,  G01N2223/3306 ,  G01N2223/6116

Abstract: A transmission type small-angle scattering device of the present invention includes a goniometer 10 including a rotation arm 11. The rotation arm 11 is freely turnable around a θ-axis extending in a horizontal direction from an origin with a vertical arrangement state of the rotation arm 11 being defined as the origin, and has a vertical arrangement structure in which an X-ray irradiation unit 20 is installed on a lower-side end portion of the rotation arm 11, and a two-dimensional X-ray detector 30 is installed on an upper-side end portion of the rotation arm 11 to form a vertical arrangement structure.

公开(公告)号：US11754515B2

公开(公告)日：2023-09-12

申请号：US17442169

申请日：2020-01-08

Applicant: RIGAKU CORPORATION

Inventor： Naoki Matsushima ,  Kiyoshi Ogata ,  Sei Yoshihara ,  Yoshiyasu Ito ,  Kazuhiko Omote ,  Hiroshi Motono ,  Shigematsu Asano ,  Katsutaka Horada ,  Sensui Yasuda

IPC: G01N23/201 ,  G01N23/20016 ,  G01N23/20025

CPC classification number: G01N23/201 ,  G01N23/20016 ,  G01N23/20025 ,  G01N2223/054 ,  G01N2223/3306 ,  G01N2223/6116

Abstract: A transmission type small-angle scattering device of the present invention includes a goniometer 10 including a rotation arm 11. The rotation arm 11 is freely turnable around a θ-axis extending in a horizontal direction from an origin with a vertical arrangement state of the rotation arm being defined as the origin, and has a vertical arrangement structure in which an X-ray irradiation unit 20 is installed on a lower-side end portion of the rotation arm 11, and a two-dimensional X-ray detector 30 is installed on an upper-side end portion of the rotation arm 11 to form a vertical arrangement structure.

公开(公告)号：US20220170869A1

公开(公告)日：2022-06-02

申请号：US17442169

申请日：2020-01-08

Applicant: RIGAKU CORPORATION

Inventor： Naoki Matsushima ,  Kiyoshi Ogata ,  Sei Yoshihara ,  Yoshiyasu Ito ,  Kazuhiko Omote ,  Hiroshi Motono ,  Shigematsu Asano ,  Katsutaka Horada ,  Sensui Yasuda

IPC: G01N23/201 ,  G01N23/20016 ,  G01N23/20025

Abstract: A transmission type small-angle scattering device of the present invention includes a goniometer 10 including a rotation arm 11. The rotation arm 11 is freely turnable around a θ-axis extending in a horizontal direction from an origin with a vertical arrangement state of the rotation arm being defined as the origin, and has a vertical arrangement structure in which an X-ray irradiation unit 20 is installed on a lower-side end portion of the rotation arm 11, and a two-dimensional X-ray detector 30 is installed on an upper-side end portion of the rotation arm 11 to form a vertical arrangement structure.

公开(公告)号：US12222303B2

公开(公告)日：2025-02-11

申请号：US18228021

申请日：2023-07-31

Applicant: RIGAKU CORPORATION

Inventor： Naoki Matsushima ,  Kiyoshi Ogata ,  Sei Yoshihara ,  Yoshiyasu Ito ,  Kazuhiko Omote ,  Hiroshi Motono ,  Shigematsu Asano ,  Katsutaka Horada ,  Sensui Yasuda

IPC: G01N23/201 ,  G01N23/20016 ,  G01N23/20025

Abstract: A transmission type small-angle scattering device of the present invention includes a goniometer 10 including a rotation arm 11. The rotation arm 11 is freely turnable around a θ-axis extending in a horizontal direction from an origin with a vertical arrangement state of the rotation arm 11 being defined as the origin, and has a vertical arrangement structure in which an X-ray irradiation unit 20 is installed on a lower-side end portion of the rotation arm 11, and a two-dimensional X-ray detector 30 is installed on an upper-side end portion of the rotation arm 11 to form a vertical arrangement structure.

公开(公告)号：US20230384248A1

公开(公告)日：2023-11-30

申请号：US18228021

申请日：2023-07-31

Applicant: RIGAKU CORPORATION

Inventor： Naoki Matsushima ,  Kiyoshi Ogata ,  Sei Yoshihara ,  Yoshiyasu Ito ,  Kazuhiko Omote ,  Hiroshi Motono ,  Shigematsu Asano ,  Katsutaka Horada ,  Sensui Yasuda

IPC: G01N23/201 ,  G01N23/20016 ,  G01N23/20025

CPC classification number: G01N23/201 ,  G01N23/20016 ,  G01N23/20025 ,  G01N2223/054 ,  G01N2223/3306 ,  G01N2223/6116

Abstract: A transmission type small-angle scattering device of the present invention includes a goniometer 10 including a rotation arm 11. The rotation arm 11 is freely turnable around a θ-axis extending in a horizontal direction from an origin with a vertical arrangement state of the rotation arm 11 being defined as the origin, and has a vertical arrangement structure in which an X-ray irradiation unit 20 is installed on a lower-side end portion of the rotation arm 11, and a two-dimensional X-ray detector 30 is installed on an upper-side end portion of the rotation arm 11 to form a vertical arrangement structure.

公开(公告)号：US10473598B2

公开(公告)日：2019-11-12

申请号：US15518892

申请日：2014-10-14

Applicant: RIGAKU CORPORATION

Inventor： Kiyoshi Ogata ,  Sei Yoshihara ,  Takao Kinefuchi ,  Shiro Umegaki ,  Shigematsu Asano ,  Katsutaka Horada ,  Muneo Yoshida ,  Hiroshi Motono ,  Hideaki Takahashi ,  Akifusa Higuchi ,  Kazuhiko Omote ,  Yoshiyasu Ito ,  Naoki Kawahara ,  Asao Nakano

IPC: H05G1/02 ,  A61B6/08 ,  G01N23/20 ,  G01N23/223 ,  G01N23/2204 ,  G01N23/203 ,  G01N23/2206

Abstract: An X-ray thin film inspection device of the present invention includes an X-ray irradiation unit 40 installed on a first rotation arm 32, an X-ray detector 50 installed on a second rotation arm 33, and a fluorescence X-ray detector 60 for detecting fluorescence X-rays generated from an inspection target upon irradiation of X-rays. The X-ray irradiation unit 40 includes an X-ray optical element 43 comprising a confocal mirror for receiving X-rays radiated from an X-ray tube 42, reflects plural focused X-ray beams monochromatized at a specific wavelength and focuses the plural focused X-ray beams to a preset focal point, and a slit mechanism 46 for passing therethrough any number of focused X-ray beams out of the plural focused X-ray beams reflected from the X-ray optical element 43.