公开(公告)号：US20210063326A1

公开(公告)日：2021-03-04

申请号：US16958556

申请日：2018-09-05

申请人： RIGAKU CORPORATION

发明人： Naoki Matsushima ,  Kiyoshi Ogata ,  Kazuhiko Omote ,  Sei Yoshihara ,  Yoshiyasu Ito ,  Hiroshi Motono ,  Hideaki Takahashi ,  Akifusa Higuchi ,  Shiro Umegaki ,  Shigematsu Asano ,  Ryotaro Yamaguchi ,  Katsutaka Horada

IPC分类号： G01N23/20016 ,  G01N23/207

摘要： An X-ray inspection device of the present invention includes a sample placement unit 11 for placing a sample as an inspection target therein, a sample placement unit positioning mechanism 30 for moving the sample placement unit 11, a goniometer 20 including first and second rotation members 22, 23 that rotate independently of each other, an X-ray irradiation unit 40 installed on the first rotation member 22, and a two-dimensional X-ray detector 50 installed on the second rotation member 23. The sample placement unit positioning mechanism 30 includes a χ rotation mechanism 35 for rotating the sample placement unit 11 and a ϕ-axis about a χ-axis that is orthogonal to a θs-axis and a θd-axis at a measurement point P and extends horizontally.

公开(公告)号：US11079345B2

公开(公告)日：2021-08-03

申请号：US16958556

申请日：2018-09-05

申请人： RIGAKU CORPORATION

发明人： Naoki Matsushima ,  Kiyoshi Ogata ,  Kazuhiko Omote ,  Sei Yoshihara ,  Yoshiyasu Ito ,  Hiroshi Motono ,  Hideaki Takahashi ,  Akifusa Higuchi ,  Shiro Umegaki ,  Shigematsu Asano ,  Ryotaro Yamaguchi ,  Katsutaka Horada

IPC分类号： G01N23/20016 ,  G01N23/207

摘要： An X-ray inspection device of the present invention includes a sample placement unit 11 for placing a sample as an inspection target therein, a sample placement unit positioning mechanism 30 for moving the sample placement unit 11, a goniometer 20 including first and second rotation members 22, 23 that rotate independently of each other, an X-ray irradiation unit 40 installed on the first rotation member 22, and a two-dimensional X-ray detector 50 installed on the second rotation member 23. The sample placement unit positioning mechanism 30 includes a χ rotation mechanism 35 for rotating the sample placement unit 11 and a ϕ-axis about a χ-axis that is orthogonal to a θs-axis and a θd-axis at a measurement point P and extends horizontally.

公开(公告)号：US20170234814A1

公开(公告)日：2017-08-17

申请号：US15518892

申请日：2014-10-14

申请人： RIGAKU CORPORATION

发明人： Kiyoshi Ogata ,  Sei Yoshihara ,  Takao Kinefuchi ,  Shiro Umegaki ,  Shigematsu Asano ,  Katsutaka Horada ,  Muneo Yoshida ,  Hiroshi Motono ,  Hideaki Takahashi ,  Akifusa Higuchi ,  Kazuhiko Omote ,  Yoshiyasu Ito ,  Naoki Kawahara ,  Asao Nakano

IPC分类号： G01N23/223 ,  G01N23/22

CPC分类号： G01N23/223 ,  G01N23/203 ,  G01N23/2204 ,  G01N23/2206 ,  G01N2223/076 ,  G01N2223/315 ,  G01N2223/61 ,  G01N2223/6116

摘要： An X-ray thin film inspection device of the present invention includes an X-ray irradiation unit 40 installed on a first rotation arm 32, an X-ray detector 50 installed on a second rotation arm 33, and a fluorescence X-ray detector 60 for detecting fluorescence X-rays generated from an inspection target upon irradiation of X-rays. The X-ray irradiation unit 40 includes an X-ray optical element 43 comprising a confocal mirror for receiving X-rays radiated from an X-ray tube 42, reflects plural focused X-ray beams monochromatized at a specific wavelength and focuses the plural focused X-ray beams to a preset focal point, and a slit mechanism 46 for passing therethrough any number of focused X-ray beams out of the plural focused X-ray beams reflected from the X-ray optical element 43.

公开(公告)号：US10473598B2

公开(公告)日：2019-11-12

申请号：US15518892

申请日：2014-10-14

申请人： RIGAKU CORPORATION

发明人： Kiyoshi Ogata ,  Sei Yoshihara ,  Takao Kinefuchi ,  Shiro Umegaki ,  Shigematsu Asano ,  Katsutaka Horada ,  Muneo Yoshida ,  Hiroshi Motono ,  Hideaki Takahashi ,  Akifusa Higuchi ,  Kazuhiko Omote ,  Yoshiyasu Ito ,  Naoki Kawahara ,  Asao Nakano

IPC分类号： H05G1/02 ,  A61B6/08 ,  G01N23/20 ,  G01N23/223 ,  G01N23/2204 ,  G01N23/203 ,  G01N23/2206

摘要： An X-ray thin film inspection device of the present invention includes an X-ray irradiation unit 40 installed on a first rotation arm 32, an X-ray detector 50 installed on a second rotation arm 33, and a fluorescence X-ray detector 60 for detecting fluorescence X-rays generated from an inspection target upon irradiation of X-rays. The X-ray irradiation unit 40 includes an X-ray optical element 43 comprising a confocal mirror for receiving X-rays radiated from an X-ray tube 42, reflects plural focused X-ray beams monochromatized at a specific wavelength and focuses the plural focused X-ray beams to a preset focal point, and a slit mechanism 46 for passing therethrough any number of focused X-ray beams out of the plural focused X-ray beams reflected from the X-ray optical element 43.

公开(公告)号：US20190227005A1

公开(公告)日：2019-07-25

申请号：US16205801

申请日：2017-07-12

申请人： Rigaku Corporation

发明人： Kiyoshi Ogata ,  Kazuhiko Omote ,  Sei Yoshihara ,  Yoshiyasu Ito ,  Hiroshi Motono ,  Hideaki Takahashi ,  Takao Kinefuchi ,  Akifusa Higuchi ,  Shiro Umegaki ,  Shigematsu Asano ,  Ryotaro Yamaguchi ,  Katsutaka Horada ,  Makoto Kambe ,  Licai Jiang ,  Boris Verman

IPC分类号： G01N23/20016 ,  G01B15/02 ,  G21K1/06 ,  G01N23/207 ,  G01N23/20025

摘要： In an X-ray inspection device according to the present invention, an X-ray irradiation unit 40 includes a first X-ray optical element 42 for focusing characteristic X-rays in a vertical direction, and a second X-ray optical element 43 for focusing the characteristic X-rays in a horizontal direction. The first X-ray optical element 42 is constituted by a crystal material having high crystallinity. The second X-ray optical element includes a multilayer mirror.