Lithographic apparatus, device manufacturing method and radiation system
    3.
    发明授权
    Lithographic apparatus, device manufacturing method and radiation system 有权
    光刻设备,设备制造方法和辐射系统

    公开(公告)号:US07105837B2

    公开(公告)日:2006-09-12

    申请号:US10844577

    申请日:2004-05-13

    IPC分类号: G21K5/00

    摘要: A lithographic projection apparatus includes an illumination system configured to provide a beam of radiation; a support configured to support a patterning device, the patterning device configured to impart the beam of radiation with a pattern in its cross section; a substrate table configured to hold a substrate, and a projection system configured to project the patterned beam of radiation onto a target portion of the substrate, wherein the illumination system has a radiation source and at least one mirror configured to enhance an output of the source. The illumination system may include a second radiation source and at least one mirror positioned between the radiation sources to image the output of the second source onto the first source, thereby enhancing the output of the source. The radiation sources may be operable to emit radiation in the EUV wavelength range.

    摘要翻译: 光刻投影设备包括被配置为提供辐射束的照明系统; 被配置为支撑图案形成装置的支撑件,所述图案形成装置被构造成在其横截面中赋予所述辐射束的图案; 被配置为保持衬底的衬底台和被配置为将所述图案化的辐射束投射到所述衬底的目标部分上的投影系统,其中所述照明系统具有辐射源和至少一个配置成增强所述源的输出的反射镜 。 照明系统可以包括第二辐射源和位于辐射源之间的至少一个反射镜,以将第二源的输出成像到第一源上,从而增强源的输出。 辐射源可以可操作地发射EUV波长范围内的辐射。

    Filter window manufacturing method
    6.
    发明授权
    Filter window manufacturing method 有权
    过滤窗制造方法

    公开(公告)号:US07776390B2

    公开(公告)日:2010-08-17

    申请号:US11878989

    申请日:2007-07-30

    IPC分类号: B05D5/06

    摘要: A filter window manufacturing method includes fabricating a structure of wires on a substrate, depositing a lacquer over the wires and the substrate, depositing a first layer that includes a material selected from the group consisting of AlN, Ru, Ir, Au, SiN, Rh, C and combinations thereof, removing the lacquer, removing the substrate, and baking the first layer.

    摘要翻译: 一种滤光器窗口制造方法,包括在基板上制造导线的结构,在导线和基板上沉积漆,沉积第一层,该第一层包括选自由AlN,Ru,Ir,Au,SiN,Rh ,C及其组合,除去漆,除去基材,并烘烤第一层。

    Lithographic apparatus, device manufacturing method and radiation system
    7.
    发明授权
    Lithographic apparatus, device manufacturing method and radiation system 有权
    光刻设备,设备制造方法和辐射系统

    公开(公告)号:US07309869B2

    公开(公告)日:2007-12-18

    申请号:US11127312

    申请日:2005-05-12

    IPC分类号: G03B27/52

    摘要: A lithographic projection apparatus includes an illumination system configured to provide a beam of radiation; a support configured to support a patterning device, the patterning device configured to impart the beam of radiation with a pattern in its cross section; a substrate table configured to hold a substrate, and a projection system configured to project the patterned beam of radiation onto a target portion of the substrate, wherein the illumination system has a radiation source and at least one mirror configured to enhance an output of the source. The illumination system may include a second radiation source and at least one mirror positioned between the radiation sources to image the output of the second source onto the first source, thereby enhancing the output of the source. The radiation sources may be operable to emit radiation in the EUV wavelength range.

    摘要翻译: 光刻投影设备包括被配置为提供辐射束的照明系统; 被配置为支撑图案形成装置的支撑件,所述图案形成装置被构造成在其横截面中赋予所述辐射束的图案; 被配置为保持衬底的衬底台和被配置为将所述图案化的辐射束投射到所述衬底的目标部分上的投影系统,其中所述照明系统具有辐射源和至少一个配置成增强所述源的输出的反射镜 。 照明系统可以包括第二辐射源和位于辐射源之间的至少一个反射镜,以将第二源的输出成像到第一源上,从而增强源的输出。 辐射源可以可操作地发射EUV波长范围内的辐射。

    System for copy protection of an information carrier
    10.
    发明授权
    System for copy protection of an information carrier 失效
    信息载体复制保护系统

    公开(公告)号:US07646869B2

    公开(公告)日:2010-01-12

    申请号:US10554599

    申请日:2004-04-16

    IPC分类号: G09C3/00

    摘要: The present invention relates to a system for copy protection of an information carrier, said system comprising a diffractive layer for delivering a speckle pattern when illuminated by a light source, a spatial filter, which is aligned with respect to the diffractive layer, for delivering a filtered optical signal from the speckle pattern and a detector array for delivering, when illuminated by said filtered optical signal, an electrical signal. Said system further comprises means for computing a cryptographic key from the electrical signal, and means for decrypting encrypted data contained in the information carrier from the cryptographic key. It finds its application in copy protection of content carriers such as optical discs or in smart cards.

    摘要翻译: 本发明涉及一种用于信息载体的复制保护的系统,所述系统包括用于在由光源照射时传送散斑图案的衍射层,相对于衍射层对准的空间滤光器,用于传送 来自散斑图案的经滤波的光信号和用于当由所述滤波的光信号照亮时传送电信号的检测器阵列。 所述系统还包括用于从电信号计算加密密钥的装置,以及用于从加密密钥对包含在信息载体中的加密数据进行解密的装置。 它可以应用于诸如光盘或智能卡等内容载体的复制保护。