公开(公告)号：US5660517A

公开(公告)日：1997-08-26

申请号：US415927

申请日：1995-03-31

申请人： Raymon F. Thompson ,  Robert W. Berner ,  Gary L. Curtis ,  Stephen P. Culliton ,  Blaine G. Wright ,  Darryl S. Byle ,  John M. Pedersen

发明人： Raymon F. Thompson ,  Robert W. Berner ,  Gary L. Curtis ,  Stephen P. Culliton ,  Blaine G. Wright ,  Darryl S. Byle ,  John M. Pedersen

IPC分类号： B65G49/07 ,  H01L21/00 ,  H01L21/673 ,  H01L21/677

CPC分类号： H01L21/67781 ,  H01L21/67173 ,  H01L21/67313 ,  H01L21/67326 ,  H01L21/67742 ,  H01L21/67754 ,  H01L21/67769 ,  H01L21/67772 ,  H01L21/67775 ,  H01L21/67778 ,  Y10S134/902 ,  Y10S414/138 ,  Y10S414/14 ,  Y10S414/141

摘要： A processor for processing integrated circuit wafers, semiconductor substrates, data disks and similar units requiring very low contamination levels. The processor has an interface section which receives wafers in standard wafer carriers. The interface section transfers the wafers from carriers onto novel trays for improved processing. The interface unit can hold multiple groups of multiple trays. A conveyor having an automated arm assembly moves wafers supported on a tray. The conveyor moves the trays from the interface along a track to several processing stations. The processing stations are accessed from an enclosed area adjoining the interface section.

摘要翻译： 用于处理集成电路晶片，半导体衬底，数据盘以及需要非常低的污染水平的类似单元的处理器。 处理器具有在标准晶片载体中接收晶片的接口部分。 接口部分将晶片从载体转移到新的托盘上以改进处理。 接口单元可以容纳多组多个托盘。 具有自动臂组件的输送机移动支撑在托盘上的晶片。 输送机将托盘从接口沿轨道移动到多个处理站。 处理站从与接口部分相邻的封闭区域进行访问。

公开(公告)号：US06960257B2

公开(公告)日：2005-11-01

申请号：US10434304

申请日：2003-05-07

申请人： Raymon F. Thompson ,  Robert W. Berner ,  Gary L. Curtis ,  Stephen P. Culliton ,  Blaine G. Wright ,  Darryl S. Byle

发明人： Raymon F. Thompson ,  Robert W. Berner ,  Gary L. Curtis ,  Stephen P. Culliton ,  Blaine G. Wright ,  Darryl S. Byle

IPC分类号： B65G49/07 ,  H01L21/00 ,  H01L21/673 ,  H01L21/677 ,  B05C11/02 ,  B05C21/00

CPC分类号： H01L21/67781 ,  H01L21/67173 ,  H01L21/67313 ,  H01L21/67326 ,  H01L21/67742 ,  H01L21/67754 ,  H01L21/67766 ,  H01L21/67769 ,  H01L21/67775 ,  H01L21/67778 ,  Y10S134/902 ,  Y10S414/138 ,  Y10S414/14

摘要： A processor for processing integrated circuit wafers, semiconductor substrates, data disks and similar units requiring very low contamination levels. The processor has an interface section which receives wafers in standard wafer carriers. The interface section transfers the wafers from carriers onto novel trays for improved processing. The interface unit can hold multiple groups of multiple trays. A conveyor having an automated arm assembly moves wafers supported on a tray. The conveyor moves the trays from the interface along a track to several processing stations. The processing stations are accessed from an enclosed area adjoining the interface section.

摘要翻译： 用于处理集成电路晶片，半导体衬底，数据盘以及需要非常低的污染水平的类似单元的处理器。 处理器具有在标准晶片载体中接收晶片的接口部分。 接口部分将晶片从载体转移到新的托盘上以改进处理。 接口单元可以容纳多组多个托盘。 具有自动臂组件的输送机移动支撑在托盘上的晶片。 输送机将托盘从接口沿轨道移动到多个处理站。 处理站从与接口部分相邻的封闭区域进行访问。

公开(公告)号：US5836736A

公开(公告)日：1998-11-17

申请号：US698034

申请日：1996-08-15

申请人： Raymon F. Thompson ,  Robert W. Berner ,  Gary L. Curtis ,  Stephen P. Culliton ,  Blaine G. Wright ,  Darryl S. Byle

发明人： Raymon F. Thompson ,  Robert W. Berner ,  Gary L. Curtis ,  Stephen P. Culliton ,  Blaine G. Wright ,  Darryl S. Byle

IPC分类号： B65G49/07 ,  H01L21/00 ,  H01L21/673 ,  H01L21/677

CPC分类号： H01L21/67781 ,  H01L21/67173 ,  H01L21/67313 ,  H01L21/67326 ,  H01L21/67742 ,  H01L21/67754 ,  H01L21/67766 ,  H01L21/67769 ,  H01L21/67772 ,  H01L21/67775 ,  H01L21/67778 ,  Y10S414/138

摘要： A processor for processing integrated circuit wafers, semiconductor substrates, data disks and similar units requiring very low contamination levels. The processor has an interface section which receives wafers in standard wafer carriers. The interface section transfers the wafers from carriers onto novel trays for improved processing. The interface unit can hold multiple groups of multiple trays. A conveyor having an automated arm assembly moves wafers supported on a tray. The conveyor moves the trays from the interface along a track to several processing stations. The processing stations are accessed from an enclosed area adjoining the interface section.

公开(公告)号：US5669575A

公开(公告)日：1997-09-23

申请号：US564674

申请日：1995-11-29

申请人： Darryl S. Byle

发明人： Darryl S. Byle

IPC分类号： B65H75/44 ,  B66D1/36 ,  B65H54/553

CPC分类号： B65H75/4402 ,  B66D1/36

摘要： Apparatus that controls its cable on its cable take-up drum, the apparatus ncluding pressure rollers supported by flexible spring steel members, a flexible spring steel member around each end of the cable take-up drum, two ends of each flexible member being pulled together by a pair of adjustable links, the pressure rollers applying pressure on the cable as the cable is being wound on to or off of the cable take-up drum.

摘要翻译： 控制其电缆卷绕鼓上的电缆的装置，该装置包括由柔性弹簧钢构件支撑的压力辊，围绕电缆卷绕滚筒的每一端的柔性弹簧钢构件，每个柔性构件的两端被拉在一起 通过一对可调节的连接，压力辊在电缆被卷绕到或离开电缆卷取滚筒时对电缆施加压力。