公开(公告)号：US08384882B2

公开(公告)日：2013-02-26

申请号：US12580066

申请日：2009-10-15

申请人： Rene Theodorus Petrus Compen ,  Gerardus Petrus Matthijs Van Nunen ,  Martijn Houben ,  Marco Adrianus Peter Van Den Heuvel

发明人： Rene Theodorus Petrus Compen ,  Gerardus Petrus Matthijs Van Nunen ,  Martijn Houben ,  Marco Adrianus Peter Van Den Heuvel

IPC分类号： G03B27/32 ,  G03B27/58

CPC分类号： G03B27/58 ,  G03F7/70516 ,  G03F7/70691

摘要： A calibration method for calibrating an optimum take over height of a substrate in a lithographic apparatus between a substrate table and an ejector element moveable to load and unload the substrate from the substrate table, the method including clamping the substrate on one of the substrate table and ejector element; moving the ejector element between an unloaded state wherein the substrate is supported by the substrate table and a loaded state wherein the substrate is at least partly supported by the ejector element; determining a reference height of the ejector element at the moment that the weight of the substrate is at least partly taken over between the substrate table and the ejector element; and determining the optimum take over height for the ejector element from the determined reference height.

摘要翻译： 一种校准方法，用于校准光刻设备中的基板的最佳接管高度，该基板在基板台和顶板元件之间移动，可移动以从基板台装载和卸载基板，该方法包括将基板夹在基板台之一和 喷射元件 在所述衬底被所述衬底台支撑的卸载状态和所述衬底至少部分地被所述顶出器元件支撑的负载状态之间移动所述顶出器元件; 在衬底的重量至少部分地覆盖在衬底台和顶出器元件之间的时刻，确定顶出器元件的基准高度; 以及从所确定的参考高度确定所述喷射器元件的最佳接管高度。

公开(公告)号：US20100110408A1

公开(公告)日：2010-05-06

申请号：US12580066

申请日：2009-10-15

申请人： Rene Theodorus Petrus COMPEN ,  Gerardus Petrus Matthijs Van Nunen ,  Martijn Houben ,  Marco Adrianus Peter Van Den Heuvel

发明人： Rene Theodorus Petrus COMPEN ,  Gerardus Petrus Matthijs Van Nunen ,  Martijn Houben ,  Marco Adrianus Peter Van Den Heuvel

IPC分类号： G03B27/58

CPC分类号： G03B27/58 ,  G03F7/70516 ,  G03F7/70691

摘要： A calibration method for calibrating an optimum take over height of a substrate in a lithographic apparatus between a substrate table and an ejector element moveable to load and unload the substrate from the substrate table, the method including clamping the substrate on one of the substrate table and ejector element; moving the ejector element between an unloaded state wherein the substrate is supported by the substrate table and a loaded state wherein the substrate is at least partly supported by the ejector element; determining a reference height of the ejector element at me moment that me weight of me substrate is at least partly taken over between the substrate table and the ejector element; and determining the optimum take over height for the ejector element from the determined reference height.

摘要翻译： 一种校准方法，用于校准光刻设备中的基板的最佳接管高度，该基板在基板台和顶板元件之间移动，可移动以从基板台装载和卸载基板，该方法包括将基板夹在基板台之一和 喷射元件 在所述衬底被所述衬底台支撑的卸载状态和所述衬底至少部分地被所述顶出器元件支撑的负载状态之间移动所述顶出器元件; 在我的时刻确定喷射器元件的基准高度，使得我的底板重量至少部分地被覆在衬底台和喷射器元件之间; 以及从所确定的参考高度确定所述喷射器元件的最佳接管高度。

公开(公告)号：US08154709B2

公开(公告)日：2012-04-10

申请号：US12784763

申请日：2010-05-21

申请人： Jozef Augustinus Maria Alberti ,  Gerardus Petrus Matthijs Van Nunen ,  Frans Erik Groensmit ,  Rene Theodorus Petrus Compen ,  Marco Adrianus Peter Van Den Heuvel

发明人： Jozef Augustinus Maria Alberti ,  Gerardus Petrus Matthijs Van Nunen ,  Frans Erik Groensmit ,  Rene Theodorus Petrus Compen ,  Marco Adrianus Peter Van Den Heuvel

IPC分类号： G03B27/58 ,  G03B27/62

CPC分类号： G03F7/70783 ,  G03F7/70633 ,  G03F7/707

摘要： A method of placing a substrate onto a surface of a substrate holder, in which the surface is provided with a plurality of burls. Substrate placement data for allowing placement of the substrate at a certain position with respect to a position of the plurality of burls on the surface of the substrate holder is calculated. The substrate is placed at the certain position in accordance with the substrate placement data. The certain position may be based on the position at which placement would result in a minimized overlay error or may be based on the position at which placement would result in minimized substrate deformation.

摘要翻译： 将衬底放置在衬底保持器的表面上的方法，其中表面设置有多个毛刺。 计算用于允许将衬底相对于衬底保持器表面上的多个毛刺的位置放置在特定位置的衬底放置数据。 根据衬底放置数据将衬底放置在特定位置。 该位置可以基于放置将导致最小重叠误差的位置，或者可以基于放置将导致最小化的基板变形的位置。

公开(公告)号：US20100265488A1

公开(公告)日：2010-10-21

申请号：US12784763

申请日：2010-05-21

申请人： Jozef Augustinus Maria Alberti ,  Gerardus Petrus Matthijs Van Nunen ,  Frans Erik Groensmit ,  Rene Theodorus Petrus Compen ,  Marco Adrianus Peter Van Den Heuvel

发明人： Jozef Augustinus Maria Alberti ,  Gerardus Petrus Matthijs Van Nunen ,  Frans Erik Groensmit ,  Rene Theodorus Petrus Compen ,  Marco Adrianus Peter Van Den Heuvel

IPC分类号： G03B27/58

CPC分类号： G03F7/70783 ,  G03F7/70633 ,  G03F7/707

摘要： A method of placing a substrate onto a surface of a substrate holder, in which the surface is provided with a plurality of burls. Substrate placement data for allowing placement of the substrate at a certain position with respect to a position of the plurality of burls on the surface of the substrate holder is calculated. The substrate is placed at the certain position in accordance with the substrate placement data. The certain position may be based on the position at which placement would result in a minimized overlay error or may be based on the position at which placement would result in minimized substrate deformation.

摘要翻译： 将衬底放置在衬底保持器的表面上的方法，其中表面设置有多个毛刺。 计算用于允许将衬底相对于衬底保持器表面上的多个毛刺的位置放置在特定位置的衬底放置数据。 根据衬底放置数据将衬底放置在特定位置。 该位置可以基于放置将导致最小重叠误差的位置，或者可以基于放置将导致最小化的基板变形的位置。