High throughput servo load cup with integrated wet chemistry delivery
    1.
    发明授权
    High throughput servo load cup with integrated wet chemistry delivery 有权
    高吞吐量伺服负载杯,集成湿化学输送

    公开(公告)号:US07811153B1

    公开(公告)日:2010-10-12

    申请号:US11731737

    申请日:2007-03-30

    IPC分类号: B24B49/00 B24B51/00

    摘要: A work piece handling apparatus moves workpieces with a plurality of independently movable load cups that have combined multiple axes of motion. The apparatus can load and unload work pieces from a wet process station and move work pieces between wet process stations and maintain wet chemistry delivery to the workpiece without involving a robot. A method of work piece handling using the apparatus provides a significant throughput improvement by reducing the inherent time lag of pneumatic systems and eliminating multiple steps involving the robot during inter-station wafer transfer.

    摘要翻译: 工件处理装置利用具有组合的多个运动轴的多个可独立移动的装载杯移动工件。 该设备可以从湿处理站加载和卸载工件,并在湿处理站之间移动工件,并保持湿化学物质输送到工件而不涉及机器人。 使用该装置的工件处理方法通过减少气动系统的固有时滞并且消除了在台站间晶片传送期间涉及机器人的多个步骤而提供了显着的通量提高。

    Magnetic rotational hardstop for robot
    2.
    发明授权
    Magnetic rotational hardstop for robot 有权
    用于机器人的磁旋转硬止动器

    公开(公告)号:US08757345B2

    公开(公告)日:2014-06-24

    申请号:US12432620

    申请日:2009-04-29

    IPC分类号: G05G5/00 G05G5/04

    CPC分类号: B25J9/101 H01L21/67742

    摘要: Rotational hardstop assemblies that provide greater than 360 degrees of non-continuous rotation for rotating mechanisms are provided. In certain embodiments, an assembly is used to provide 630 or more degrees of rotation for the shoulder axis of a robot, such as a wafer transfer robot. The rotational hardstop assemblies include opposing magnets as springs. According to various embodiments, the opposing magnets provide non-contact engagement and produce no contact noise nor have any wear over time. The rotational hardstop assemblies provide the ability to location from either direction of rotation of a robot cylindrical coordinate system.

    摘要翻译: 提供了为旋转机构提供大于360度的非连续旋转的旋转硬止动组件。 在某些实施例中,组件用于为机器人(例如晶片传送机器人)的肩轴提供630或更多的旋转度。 旋转硬止动组件包括作为弹簧的相对磁体。 根据各种实施例,相对的磁体提供非接触接合,并且不产生接触噪声,也不会随着时间而磨损。 旋转硬止动组件提供从机器人圆柱坐标系的旋转方向定位的能力。

    MAGNETIC ROTATIONAL HARDSTOP FOR ROBOT
    3.
    发明申请
    MAGNETIC ROTATIONAL HARDSTOP FOR ROBOT 有权
    用于机器人的磁性旋转硬件

    公开(公告)号:US20100278623A1

    公开(公告)日:2010-11-04

    申请号:US12432620

    申请日:2009-04-29

    IPC分类号: H01L21/68 B25J18/00 F16D71/00

    CPC分类号: B25J9/101 H01L21/67742

    摘要: Rotational hardstop assemblies that provide greater than 360 degrees of non-continuous rotation for rotating mechanisms are provided. In certain embodiments, an assembly is used to provide 630 or more degrees of rotation for the shoulder axis of a robot, such as a wafer transfer robot. The rotational hardstop assemblies include opposing magnets as springs. According to various embodiments, the opposing magnets provide non-contact engagement and produce no contact noise nor have any wear over time. The rotational hardstop assemblies provide the ability to location from either direction of rotation of a robot cylindrical coordinate system.

    摘要翻译: 提供了为旋转机构提供大于360度的非连续旋转的旋转硬止动组件。 在某些实施例中,组件用于为机器人(例如晶片传送机器人)的肩轴提供630或更多的旋转度。 旋转硬止动组件包括作为弹簧的相对磁体。 根据各种实施例,相对的磁体提供非接触接合,并且不产生接触噪声,也不会随着时间而磨损。 旋转硬止动组件提供从机器人圆柱坐标系的旋转方向定位的能力。

    Dedicated hot and cold end effectors for improved throughput
    4.
    发明授权
    Dedicated hot and cold end effectors for improved throughput 有权
    专用冷热端效应器,提高吞吐量

    公开(公告)号:US08430620B1

    公开(公告)日:2013-04-30

    申请号:US12079242

    申请日:2008-03-24

    申请人: Rich Blank

    发明人: Rich Blank

    IPC分类号: H01L21/677

    摘要: Methods, systems and apparatuses for high throughput substrate transfer are provided. According to various embodiments, the methods and systems described use robots having dedicated end effectors for hot and cold wafers or other substrates). Throughput is increased by optimizing the transfer of both the hot and the cold wafers. Also described are wafer transfer apparatuses having end effectors configured for supporting either hot or cold wafers. In certain embodiments, dual arm robots having dedicated hot and cold wafer arms are provided. Also provided are methods of transferring substrates that to improve overall throughput. The methods involve transferring hot and cold substrates at different accelerations.

    摘要翻译: 提供了用于高通量衬底转移的方法,系统和装置。 根据各种实施例,所描述的方法和系统使用具有用于冷和冷晶片或其它基板的专用端部执行器的机器人)。 通过优化热晶片和冷晶片的转移来增加产量。 还描述了具有配置为支持热晶片或冷晶片的端部执行器的晶片传送装置。 在某些实施例中,提供具有专用的热和冷晶片臂的双臂机器人。 还提供了转移基底以改善总体生产量的方法。 该方法涉及以不同的加速度转移热和冷的基底。