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公开(公告)号:US5124013A
公开(公告)日:1992-06-23
申请号:US640487
申请日:1991-01-10
IPC分类号: C23C8/02 , C23C14/00 , C23C14/08 , C23C14/10 , C23C14/34 , C23C14/35 , C23C14/50 , C23C14/56 , C23C14/58
CPC分类号: C23C14/3407 , C23C14/0047 , C23C14/0078 , C23C14/083 , C23C14/10 , C23C14/352 , C23C14/505 , C23C14/56 , C23C14/562 , C23C14/58 , C23C8/02 , H01J2237/022
摘要: A high ratio planetary drive system, a vacuum processing chamber system incorporating the planetary drive system, and a method of operating the system are disclosed. The planetary drive system provides relatively slow planetary workpiece rotation for effecting processing (deposition and reaction) of thin films, in particular, optical thin films, with complete film oxidation, controlled film uniformity, reduced bearing wear and reduced heat dissipation.
摘要翻译: 公开了一种高比例的行星驱动系统,包括行星驱动系统的真空处理室系统和操作该系统的方法。 行星驱动系统提供相对较慢的行星工件旋转,用于实现薄膜特别是光学薄膜的处理(沉积和反应),具有完整的膜氧化,受控的膜均匀性,降低的轴承磨损和减少的散热。
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公开(公告)号:US20100040799A1
公开(公告)日:2010-02-18
申请号:US12542637
申请日:2009-08-17
申请人: Vladimir P. Raksha , Paul G. Coombs , Charles T. Markantes , Wilfred C. Kittler, JR. , Dave Williams , John D. Sonderman , Cornelis Jan Delst
发明人: Vladimir P. Raksha , Paul G. Coombs , Charles T. Markantes , Wilfred C. Kittler, JR. , Dave Williams , John D. Sonderman , Cornelis Jan Delst
IPC分类号: B05D3/06
CPC分类号: B05D3/207 , B05D1/12 , B05D5/063 , B05D2252/02 , C09D5/36 , C09D5/38 , C09D7/69 , C09D7/70 , C09D11/037 , C09D11/101
摘要: A method of planarizing a plurality of orientable non-spherical flakes supported by a longitudinal web is disclosed. A web supporting a coating of field orientable non-spherical flakes is placed between magnets so that the fields from the magnets traverse the web. First and third magnets are provided on one side of a feedpath and a second magnet is provided between the first and third magnets on the other side of the feedpath. The first and third magnets have a same polarity and the second magnet has a complementary polarity to the first and third magnets, so that a first magnetic field spanning the feedpath is present between the first and second magnets and second magnetic field spanning the feedpath is present between the second and third magnets, wherein the magnets are positioned so that a plurality of non-spherical field orientable flakes moving along the feedpath experience a first rotation as they pass the second magnet during relative movement between the web and the magnets; The web is then moved through the fields passing the magnets and the coating is subsequently cured.
摘要翻译: 公开了一种平面化由纵向腹板支撑的多个可定向非球形薄片的方法。 支撑可定向的非球形薄片的涂层的网放置在磁体之间,使得来自磁体的磁场穿过网。 第一和第三磁体设置在进给路径的一侧,并且第二磁体设置在进给路径的另一侧上的第一和第三磁体之间。 第一和第三磁体具有相同的极性,并且第二磁体具有与第一和第三磁体互补的极性,使得跨越馈送路径的第一磁场存在于第一和第二磁体之间,并且存在横跨馈送路径的第二磁场 在所述第二和第三磁体之间,其中所述磁体被定位成使得沿着所述进给路径移动的多个非球形场可取向薄片在所述卷材和所述磁体之间的相对运动期间经过所述第二磁体时经历第一旋转; 然后将幅材移动通过通过磁体的场,并且随后固化涂层。
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公开(公告)号:US08137762B2
公开(公告)日:2012-03-20
申请号:US12542637
申请日:2009-08-17
申请人: Vladimir P. Raksha , Paul G. Coombs , Charles T. Markantes , Wilfred C. Kittler, Jr. , Dave Williams , John D. Sonderman , Cornelis Jan Delst
发明人: Vladimir P. Raksha , Paul G. Coombs , Charles T. Markantes , Wilfred C. Kittler, Jr. , Dave Williams , John D. Sonderman , Cornelis Jan Delst
IPC分类号: B05D3/06
CPC分类号: B05D3/207 , B05D1/12 , B05D5/063 , B05D2252/02 , C09D5/36 , C09D5/38 , C09D7/69 , C09D7/70 , C09D11/037 , C09D11/101
摘要: A method of planarizing a plurality of orientable non-spherical flakes supported by a longitudinal web is disclosed. A web supporting a coating of field orientable non-spherical flakes is placed between magnets so that the fields from the magnets traverse the web. First and third magnets are provided on one side of a feedpath and a second magnet is provided between the first and third magnets on the other side of the feedpath. The first and third magnets have a same polarity and the second magnet has a complementary polarity to the first and third magnets, so that a first magnetic field spanning the feedpath is present between the first and second magnets and second magnetic field spanning the feedpath is present between the second and third magnets, wherein the magnets are positioned so that a plurality of non-spherical field orientable flakes moving along the feedpath experience a first rotation as they pass the second magnet during relative movement between the web and the magnets; The web is then moved through the fields passing the magnets and the coating is subsequently cured.
摘要翻译: 公开了一种平面化由纵向腹板支撑的多个可定向非球形薄片的方法。 支撑可定向的非球形薄片的涂层的网放置在磁体之间,使得来自磁体的磁场穿过网。 第一和第三磁体设置在进给路径的一侧,并且第二磁体设置在进给路径的另一侧上的第一和第三磁体之间。 第一和第三磁体具有相同的极性,并且第二磁体具有与第一和第三磁体互补的极性,使得跨越馈送路径的第一磁场存在于第一和第二磁体之间,并且存在横跨馈送路径的第二磁场 在所述第二和第三磁体之间,其中所述磁体被定位成使得沿着所述进给路径移动的多个非球形场可取向薄片在所述卷材和所述磁体之间的相对运动期间经过所述第二磁体时经历第一旋转; 然后将幅材移动通过通过磁体的场,并且随后固化涂层。
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公开(公告)号:US06785002B2
公开(公告)日:2004-08-31
申请号:US09810828
申请日:2001-03-16
IPC分类号: G01B902
CPC分类号: G01J3/02 , G01J3/0256 , G01J3/26 , G01J3/28
摘要: An optical spectrometer uses a tapered Fabry-Perot type variable optical filter in conjunction with an optical detector array. The filter can be a long-pass, short-pass, or narrow bandpass filter. The stability of the variable optical filter allows high resolution, depending on the number and spacing of the detectors used. In a further embodiment, signal-processing techniques are used to enhance the resolution of the spectrometer beyond the measured response.
摘要翻译: 光学光谱仪使用锥形法布里 - 珀罗型可变光学滤光片与光学检测器阵列结合使用。 滤波器可以是长通,短通或窄带通滤波器。 根据所使用的检测器的数量和间距,可变光学滤波器的稳定性允许高分辨率。 在另一个实施例中,使用信号处理技术来提高超出测量响应的光谱仪的分辨率。
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