公开(公告)号：US06785002B2

公开(公告)日：2004-08-31

申请号：US09810828

申请日：2001-03-16

申请人： Sohrab Zarrabian ,  Fred J. Van Milligen ,  Kenneth P. Rosenberg ,  John D. Sonderman

发明人： Sohrab Zarrabian ,  Fred J. Van Milligen ,  Kenneth P. Rosenberg ,  John D. Sonderman

IPC分类号： G01B902

CPC分类号： G01J3/02 ,  G01J3/0256 ,  G01J3/26 ,  G01J3/28

摘要： An optical spectrometer uses a tapered Fabry-Perot type variable optical filter in conjunction with an optical detector array. The filter can be a long-pass, short-pass, or narrow bandpass filter. The stability of the variable optical filter allows high resolution, depending on the number and spacing of the detectors used. In a further embodiment, signal-processing techniques are used to enhance the resolution of the spectrometer beyond the measured response.

摘要翻译： 光学光谱仪使用锥形法布里 - 珀罗型可变光学滤光片与光学检测器阵列结合使用。 滤波器可以是长通，短通或窄带通滤波器。 根据所使用的检测器的数量和间距，可变光学滤波器的稳定性允许高分辨率。 在另一个实施例中，使用信号处理技术来提高超出测量响应的光谱仪的分辨率。

公开(公告)号：US6106676A

公开(公告)日：2000-08-22

申请号：US61578

申请日：1998-04-16

申请人： Robert Terry ,  Kevin Gibbons ,  Sohrab Zarrabian

发明人： Robert Terry ,  Kevin Gibbons ,  Sohrab Zarrabian

IPC分类号： H01L21/316 ,  C23C14/00 ,  C23C14/34 ,  C23C14/54 ,  H01J37/32 ,  H01L21/203

CPC分类号： H01J37/32935 ,  C23C14/0042 ,  C23C14/54 ,  H01J37/3299 ,  H01J37/34

摘要： The present invention is a cascade control system for reactive sputtering deposition. A first control loop modifies the power supply in order to keep a monitored value nearly constant. This first control loop can be done relatively quickly. A second control loop monitors a second measure parameter in order to control the reactive gas flow to the system. In a preferred embodiment, the slower control loop is used to maintain a relatively constant power at the power supply.

摘要翻译： 本发明是用于反应溅射沉积的级联控制系统。 第一个控制环路修改电源，以保持监视值几乎恒定。 该第一控制回路可以相对较快地进行。 第二控制回路监测第二测量参数，以便控制反应气体流向系统。 在优选实施例中，较慢的控制回路用于在电源处保持相对恒定的功率。

公开(公告)号：US11614400B2

公开(公告)日：2023-03-28

申请号：US17466005

申请日：2021-09-03

申请人： Sohrab Zarrabian

发明人： Sohrab Zarrabian

IPC分类号： G01N21/25 ,  G01N21/3554 ,  G01N21/3504 ,  G01N21/41 ,  G02B6/02

摘要： Systems and methods are described, and one method includes providing an optical fiber extending into a chamber with a volume of the gas; passing an optical beam, from an optical source, through the optical fiber; applying a spectral analysis to the optical beam as received after passing through the optical fiber, and outputting a corresponding spectral analysis signal; and determining, based on the output spectral analysis signal, whether a liquid is carried by the volume of the gas.

公开(公告)号：US11137349B2

公开(公告)日：2021-10-05

申请号：US16570709

申请日：2019-09-13

申请人： Sohrab Zarrabian

发明人： Sohrab Zarrabian

IPC分类号： G01N21/69 ,  G01J3/02 ,  G01N21/3554 ,  G01N21/25 ,  G01N21/3504 ,  G01N21/41 ,  G02B6/02

摘要： Systems and methods are described, and one method includes passing an optical beam through a volume of the gas to a reception surface, applying spectroanalysis to the optical beam received at the reception surface, and determining from the spectroanalysis whether a liquid is carried by the volume of the gas.

公开(公告)号：US6110540A

公开(公告)日：2000-08-29

申请号：US679288

申请日：1996-07-12

申请人： Joseph Countrywood ,  Sohrab Zarrabian ,  Abraham I. Belkind ,  Charlie Sherwood ,  Frank Jansen

发明人： Joseph Countrywood ,  Sohrab Zarrabian ,  Abraham I. Belkind ,  Charlie Sherwood ,  Frank Jansen

IPC分类号： C23C16/50 ,  C23C16/455 ,  C23C16/503 ,  C23C16/54 ,  H01J37/32 ,  H01L21/205 ,  H05H1/24

CPC分类号： H01J37/3244 ,  C23C16/455 ,  C23C16/503 ,  C23C16/545 ,  H01J37/32532 ,  H01J37/32559 ,  H01J2237/3321

摘要： A gas purged counter-electrode prevents the counter-electrode from being covered with dielectric material by flowing gas past a surface of a metal element. The gas purged counter-electrode produces a relatively high-density plasma which effectively acts as the counter-electrode for a coating system. The gas purged counter-electrodes can be used with PECVD or sputtering systems.

摘要翻译： 气体吹扫的对电极通过使气体流过金属元件的表面来防止对电极被电介质材料覆盖。 气体净化的对电极产生相对高密度的等离子体，其有效地用作涂覆系统的对电极。 气体吹扫的对电极可以与PECVD或溅射系统一起使用。

公开(公告)号：US07581877B1

公开(公告)日：2009-09-01

申请号：US11805925

申请日：2007-05-25

申请人： Sohrab Zarrabian

发明人： Sohrab Zarrabian

IPC分类号： G01N25/02

CPC分类号： G01N25/68

摘要： A new method and apparatus is described for measurement of the dew point, and thus the vapor pressure of various gases and gas mixtures. In this method an optical element which is exposed to a gas atmosphere is cooled while its temperature is being monitored. At the same time an optical signal is sent through the back of the optical element. The optical signal goes through internal reflections. As soon as dew forms on the surface of the element, the optical signal will exhibit selective absorption due to the interaction of the evanescent tail of the optical signal and based on the chemical nature of the condensate. This invention can also be used to characterize condensable content of gas mixtures. The method allows for the spectral characterization and determination of the condensed vapor. It offers several advantages over existing methods.

摘要翻译： 描述了用于测量露点以及因此测量各种气体和气体混合物的蒸汽压力的新方法和装置。 在该方法中，暴露于气体气氛的光学元件在监测其温度的同时被冷却。 同时，光信号通过光学元件的背面发送。 光信号经过内部反射。 一旦在元件的表面上形成露水，光信号将由于光信号的渐逝尾部的相互作用和基于冷凝物的化学性质而呈现选择性吸收。 本发明还可用于表征气体混合物的可冷凝含量。 该方法允许冷凝蒸气的光谱表征和测定。 它比现有方法提供了几个优点。